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    • 7. 发明申请
    • METHOD AND APPARATUS FOR DISPENSING A VISCOUS FLUID
    • 用于分配粘度流体的方法和装置
    • US20090324806A1
    • 2009-12-31
    • US12028195
    • 2008-02-08
    • Cem YavaserBernd Heinz
    • Cem YavaserBernd Heinz
    • B05D5/12
    • B05D1/005B05D1/26G11B7/266
    • A method for dispensing a viscous liquid onto a rotating, disk-shaped substrate comprises the steps of Positioning the tip of a nozzle for dispensing said viscous liquid at a first distance relative to a surface of said substrate during start of the dispensing, thereby allowing the viscous liquid (4) to make a controlled first contact with the substrate. Then the gap between said nozzle and the surface of said substrate is increased to a second distance during dispensing. Accordingly, an apparatus for dispensing a viscous liquid comprises a nozzle with a tip for dispensing said viscous liquid and means for changing the distance between said nozzle and the surface of said substrate.
    • 用于将粘性液体分配到旋转的盘形基底上的方法包括以下步骤:在开始分配期间,相对于所述基底的表面在第一距离处定位用于分配所述粘性液体的喷嘴的尖端,从而允许 粘性液体(4)以便与衬底进行受控的第一接触。 然后,所述喷嘴和所述基板的表面之间的间隙在分配期间增加到第二距离。 因此,用于分配粘性液体的装置包括具有用于分配所述粘性液体的末端的喷嘴和用于改变所述喷嘴和所述基板表面之间的距离的装置。