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1. 发明授权

US07573283B2 Method for measurement of a device under test 有权
标题翻译：被测设备的测量方法
公开(公告)号：US07573283B2
公开(公告)日：2009-08-11
申请号：US11765019
申请日：2007-06-19
申请人： Axel Schmidt , Frank Fehrmann , Ulf Hackius , Stojan Kanev , Steffen Laube , Jorg Kiesewetter
发明人： Axel Schmidt , Frank Fehrmann , Ulf Hackius , Stojan Kanev , Steffen Laube , Jorg Kiesewetter
IPC分类号： G01R31/06
CPC分类号： G01R31/2891
摘要： A method is disclosed for measurement of wafers and other semiconductor components in a probe station, which serves for examination and testing of electronic components. The device under test is held by a chuck and at least one electric probe by a probe support and the device under test and the probe are selectively positioned relative to each other by a positioning device with electric drives and the device under test is contacted. The drive of the positioning device remains in a state of readiness until establishment of contact and is switched off after establishment of contact and before measurement of the device under test.
摘要翻译：公开了一种用于测量探针台中的晶片和其它半导体部件的方法，其用于电子部件的检查和测试。被测器件由卡盘和至少一个电探头通过探针支架和被测器件保持，并且探针通过具有电驱动器的定位装置相对于彼此选择性地定位，并且被测器件被接触。定位装置的驱动器保持在准备状态，直到建立接触并且在建立接触之后和在测试装置的测量之前被关闭。

2. 发明授权

US08344744B2 Probe station for on-wafer-measurement under EMI-shielding 有权
标题翻译：探测台用于EMI屏蔽下的晶圆测量
公开(公告)号：US08344744B2
公开(公告)日：2013-01-01
申请号：US12818442
申请日：2010-06-18
申请人： Axel Schmidt , Botho Hirschfeld , Stojan Kanev , Andrej Rumiantsev , Michael Teich
发明人： Axel Schmidt , Botho Hirschfeld , Stojan Kanev , Andrej Rumiantsev , Michael Teich
IPC分类号： G01R31/00
CPC分类号： G01R31/2886 , G01R1/18
摘要： An arrangement is provided for testing DUTs with a chuck that has a support surface for supporting of a DUT as well as for supplying the support surface with a defined potential, or for connecting the DUT. The arrangement further includes a positioning device for positioning the chuck as well as an electromagnetic shielding housing enclosing at least the chuck. Inside the housing and adjacent to the chuck, a signal preamplifier is arranged whose signal port facing the chuck is electrically connected with the support surface, wherein the signal preamplifier is moveable together with the chuck by the positioning device in a way that it holds its position constant relative to the chuck during positioning. The signal preamplifier is connected to a measurement unit outside of the housing via a measurement cable.
摘要翻译：提供了一种用于使用具有用于支撑DUT的支撑表面以及用于向支撑表面提供限定电位或用于连接DUT的卡盘来测试DUT的布置。该装置还包括用于定位卡盘的定位装置以及至少包围卡盘的电磁屏蔽壳体。在壳体内部和卡盘附近，布置了一个信号前置放大器，其信号端口面向卡盘与支撑表面电连接，其中信号前置放大器可以通过定位装置与卡盘一起移动，使其保持其位置在定位期间相对于卡盘是恒定的。信号前置放大器通过测量电缆连接到壳体外部的测量单元。

3. 发明授权

US07652491B2 Probe support with shield for the examination of test substrates under use of probe supports 有权
标题翻译：使用探头支架检测测试基板的探头支架
公开(公告)号：US07652491B2
公开(公告)日：2010-01-26
申请号：US11940354
申请日：2007-11-15
申请人： Stojan Kanev , Hans-Jurgen Fleischer , Stefan Kreissig , Karsten Stoll , Axel Schmidt , Andreas Kittlaus
发明人： Stojan Kanev , Hans-Jurgen Fleischer , Stefan Kreissig , Karsten Stoll , Axel Schmidt , Andreas Kittlaus
IPC分类号： G10R31/28
CPC分类号： G01R31/2889 , G01R1/07342
摘要： A probe support for holding probes which serve for electrical contacting of test substrates in a prober for testing purposes comprises a probe card holder, a probe card, and a probe card adapter, The probe card and probe card adapter are electrically connected to one another as well as to a shield of electrically conductive material and are disposed such that the probe card lies in a passageway of a shield. The shield is disposed between the test substrates and the probe card holder and is electrically insulated from the holder. For testing test substrates their positioning with respect to the probes held in this manner is done by angular alignment of the contact surfaces of the test substrates to the sensor tips and the movement of the test substrates along a path which starts from a first reference position and is composed up to the first, and each additional, contact position of an x-component and a y-component.
摘要翻译：用于保持探头的探针支架用于探测器中的测试基板的电接触以用于测试目的包括探针卡夹，探针卡和探针卡适配器。探针卡和探针卡适配器彼此电连接为以及导电材料的屏蔽件，并且被布置成使得探针卡位于屏蔽件的通道中。屏蔽件设置在测试基板和探针卡座之间并且与保持器电绝缘。为了测试测试基板，它们相对于以这种方式保持的探针的定位是通过将测试基板的接触表面与传感器尖端角度对准并沿着从第一参考位置开始的路径移动测试基板来进行的，由x分量和y分量组成直到第一个和每个附加的接触位置。

4. 发明授权

US08497693B2 Method for testing a test substrate under defined thermal conditions and thermally conditionable prober 有权
标题翻译：在确定的热条件下测试测试基板的方法和热定向探针
公开(公告)号：US08497693B2
公开(公告)日：2013-07-30
申请号：US12681806
申请日：2008-10-01
申请人： Joerg Kiesewetter , Stojan Kanev , Michael Teich , Karsten Stoll , Axel Schmidt
发明人： Joerg Kiesewetter , Stojan Kanev , Michael Teich , Karsten Stoll , Axel Schmidt
IPC分类号： G01R31/00
CPC分类号： G01R31/2891 , G01R31/2874
摘要： In a method and a device for testing a test substrate under defined thermal conditions, a substrate that is to be tested is held by a temperature-controllable chuck and is set to a defined temperature; the test substrate is positioned relative to test probes by at least one positioning device; and the test probes make contact with the test substrate for testing purposes. At least one component of the positioning device that is present in the vicinity of the temperature-controlled test substrate is set to a temperature that is independent of the temperature of the test substrate by a temperature-controlling device, and this temperature is held constant.
摘要翻译：在用于在限定的热条件下测试测试基板的方法和装置中，待测试的基板由温度可控的卡盘保持并设定在限定的温度; 测试基板通过至少一个定位装置相对于测试探针定位; 并且测试探针与测试基板接触以进行测试。存在于受温度控制的测试基板附近的定位装置的至少一个部件通过温度控制装置设定为与测试基板的温度无关的温度，并且该温度保持恒定。

5. 发明授权

US08278951B2 Probe station for testing semiconductor substrates and comprising EMI shielding 有权
标题翻译：用于测试半导体衬底并包含EMI屏蔽的探头站
公开(公告)号：US08278951B2
公开(公告)日：2012-10-02
申请号：US11940355
申请日：2007-11-15
申请人： Stojan Kanev , Hans-Jurgen Fleischer , Stefan Kreissig , Karsten Stoll , Axel Schmidt , Andreas Kittlaus
发明人： Stojan Kanev , Hans-Jurgen Fleischer , Stefan Kreissig , Karsten Stoll , Axel Schmidt , Andreas Kittlaus
IPC分类号： G01R31/00
CPC分类号： G01R31/2886 , G01R1/18
摘要： A probe station for testing semiconductor substrates, i.e., wafers and other electronic semiconductor elements, suitable for carrying out low-current and low-voltage measurement, comprises a shielding with which the electromagnetic influence (EMI) of the measurement of the semiconductor substrate can be minimized, and also comprises devices for the preparation of test signals. In addition, the housing of the probe station can offer a different possibility for the accessibility of individual components or component groups of the probe station.
摘要翻译：适用于进行低电流和低电压测量的半导体衬底（即晶片和其他电子半导体元件）的探测台包括屏蔽，半导体衬底测量的电磁影响（EMI）可以是最小化，并且还包括用于准备测试信号的装置。此外，探针台的外壳可以提供探针台的各个组件或组件组的可访问性的不同可能性。

6. 发明申请

US20080116918A1 PROBE STATION TO TESTING SEMICONDUCTOR SUBSTRATES AND COMPRISING EMI SHIELDING 有权
标题翻译：探测半导体衬底的探测台，并包含EMI屏蔽
公开(公告)号：US20080116918A1
公开(公告)日：2008-05-22
申请号：US11940355
申请日：2007-11-15
申请人： Stojan Kanev , Hans-Juergen Fleischer , Stefan Kreissig , Karsten Stoll , Axel Schmidt , Andreas Kittlaus
发明人： Stojan Kanev , Hans-Juergen Fleischer , Stefan Kreissig , Karsten Stoll , Axel Schmidt , Andreas Kittlaus
IPC分类号： G01R31/26
CPC分类号： G01R31/2886 , G01R1/18
摘要： A probe station for testing semiconductor substrates, i.e., wafers and other electronic semiconductor elements, suitable for carrying out low-current and low-voltage measurement, comprises a shielding with which the electromagnetic influence (EMI) of the measurement of the semiconductor substrate can be minimized, and also comprises devices for the preparation of test signals. In addition, the housing of the probe station can offer a different possibility for the accessibility of individual components or component groups of the probe station.
摘要翻译：适用于进行低电流和低电压测量的半导体衬底（即晶片和其他电子半导体元件）的探测台包括屏蔽，半导体衬底测量的电磁影响（EMI）可以是最小化，并且还包括用于准备测试信号的装置。此外，探针台的外壳可以提供探针台的各个组件或组件组的可访问性的不同可能性。

7. 发明申请

US20080116917A1 PROBE SUPPORT AND PROCESS FOR THE EXAMINATION OF TEST SUBSTRATES UNDER USE OF PROBE SUPPORTS 有权
标题翻译：在使用探测支持下检测测试基板的探测支持和过程
公开(公告)号：US20080116917A1
公开(公告)日：2008-05-22
申请号：US11940354
申请日：2007-11-15
申请人： Stojan Kanev , Hans-Jurgen Fleischer , Stefan Kreissig , Karsten Stoll , Axel Schmidt , Andreas Kittlaus
发明人： Stojan Kanev , Hans-Jurgen Fleischer , Stefan Kreissig , Karsten Stoll , Axel Schmidt , Andreas Kittlaus
IPC分类号： G01R31/02
CPC分类号： G01R31/2889 , G01R1/07342
摘要： A probe support for holding probes which serve for electrical contacting of test substrates in a prober for testing purposes is specified. A process for testing test substrates in such a prober is also specified. The probe support comprises a probe card holder, a probe card, and a probe card adapter, where the probe card and probe card adapter are electrically connected to one another as well as to a shield of electrically conductive material and are disposed in such a manner that the probe card lies in a passageway of a shield. The shield is disposed between the test substrates and the probe card holder and is electrically insulated from it. For testing test substrates their positioning with respect to the probes held in this manner is done by angular alignment of the contact surfaces of the test substrates to the sensor tips and the movement of the test substrates along a path which starts from a first reference position and is composed up to the first, and each additional, contact position of an x-component and a y-component (FIG. 2).
摘要翻译：规定了用于保持探头的探针支架，用于检测探针中的测试基板的电接触用于测试目的。还规定了用于在这种探测器中测试测试底物的方法。探针支架包括探针卡夹，探针卡和探针卡适配器，其中探针卡和探针卡适配器彼此电连接以及导电材料的屏蔽，并以这种方式设置探针卡位于屏蔽的通道中。屏蔽件设置在测试基板和探针卡保持器之间并且与其电绝缘。为了测试测试基板，它们相对于以这种方式保持的探针的定位是通过将测试基板的接触表面与传感器尖端角度对准并沿着从第一参考位置开始的路径移动测试基板来进行的，由x分量和y分量（图2）组成直到第一个和每个附加的接触位置。

8. 发明授权

US08240650B2 Chuck with triaxial construction 有权
标题翻译：夹头三轴结构
公开(公告)号：US08240650B2
公开(公告)日：2012-08-14
申请号：US12048323
申请日：2008-03-14
申请人： Michael Teich , Karsten Stoll , Axel Schmidt , Stojan Kanev , Jörg Kiesewetter
发明人： Michael Teich , Karsten Stoll , Axel Schmidt , Stojan Kanev , Jörg Kiesewetter
IPC分类号： B25B1/00 , B23Q3/00 , G01R31/20 , F28F7/00 , B23B31/30 , B23B31/12
CPC分类号： G01R1/04 , G01R31/2865 , H01L21/68714 , H01L21/68757 , Y10T279/11 , Y10T279/18
摘要： A chuck with triaxial construction comprises a receiving surface for a test substrate and arranged below the receiving surface: an electrically conductive first surface element, an electrically conductive second surface element electrically insulated therefrom, and an electrically conductive third surface element electrically insulated therefrom, and, between the first and the second surface element, a first insulation element and, between the second and the third surface element, a second insulation element. A chuck for very low current measurements which can be used to prevent the occurrence of leakage currents and a triboelectric charge and which is configured favourably in terms of production, is achieved because at least one of the electrically conductive surface elements is mechanically connected to at least one insulation element and has an elasticity that compensates for an expansion difference resulting from differences in different coefficients of expansion between a respective surface element and an adjoining insulation element.
摘要翻译：具有三轴结构的卡盘包括用于测试基板的接收表面并且布置在接收表面下方：导电的第一表面元件，与其电绝缘的导电的第二表面元件和与其电绝缘的导电的第三表面元件，在第一和第二表面元件之间，第一绝缘元件和第二和第三表面元件之间的第二绝缘元件。实现了用于非常低的电流测量的卡盘，其可用于防止泄漏电流和摩擦电荷的发生，并且在生产方面被有利地配置，这是因为至少一个导电表面元件至少机械地连接到一个绝缘元件并且具有补偿由相应的表面元件和相邻绝缘元件之间的不同膨胀系数的差异引起的膨胀差的弹性。

9. 发明申请

US20100289511A1 METHOD FOR TESTING A TEST SUBSTRATE UNDER DEFINED THERMAL CONDITIONS AND THERMALLY CONDITIONABLE PROBER 有权
标题翻译：在定义的热条件和热调节探头下测试测试基板的方法
公开(公告)号：US20100289511A1
公开(公告)日：2010-11-18
申请号：US12681806
申请日：2008-10-01
申请人： Joerg Kiesewetter , Stojan Kanev , Michael Teich , Karsten Stoll , Axel Schmidt
发明人： Joerg Kiesewetter , Stojan Kanev , Michael Teich , Karsten Stoll , Axel Schmidt
IPC分类号： G01R31/00
CPC分类号： G01R31/2891 , G01R31/2874
摘要： In a method and a device for testing a test substrate under defined thermal conditions, a substrate that is to be tested is held by a temperature-controllable chuck and is set to a defined temperature; the test substrate is positioned relative to test probes by at least one positioning device; and the test probes make contact with the test substrate for testing purposes. At least one component of the positioning device that is present in the vicinity of the temperature-controlled test substrate is set to a temperature that is independent of the temperature of the test substrate by a temperature-controlling device, and this temperature is held constant.
摘要翻译：在用于在限定的热条件下测试测试基板的方法和装置中，待测试的基板由温度可控的卡盘保持并设定在限定的温度; 测试基板通过至少一个定位装置相对于测试探针定位; 并且测试探针与测试基板接触以进行测试。存在于受温度控制的测试基板附近的定位装置的至少一个部件通过温度控制装置设定为与测试基板的温度无关的温度，并且该温度保持恒定。

10. 发明授权

US07560942B2 Probe receptacle for mounting a probe for testing semiconductor components, probe holder arm and test apparatus 失效
标题翻译：用于安装用于测试半导体元件，探头支架臂和测试设备的探头的探针插座
公开(公告)号：US07560942B2
公开(公告)日：2009-07-14
申请号：US11674208
申请日：2007-02-13
申请人： Hans-Jurgen Fleischer , Axel Schmidt , Stojan Kanev , Axel Becker
发明人： Hans-Jurgen Fleischer , Axel Schmidt , Stojan Kanev , Axel Becker
IPC分类号： G01R1/067
CPC分类号： G01R31/2891 , G01R31/2874
摘要： To arrange a probe needle in a reproducible manner, ensure reliable contact-connection of the probe needle and ensure that the probe needle is held securely even at high temperatures or test forces, a probe receptacle is provided for mounting a probe for testing semiconductor components. The probe has a probe needle and an essentially prismatic probe shaft. The probe receptacle comprises a base having a socket opening to receive the prismatic probe shaft, surrounded by a base wall. The base wall comprises at least two base wall segments which can be moved toward one another. A probe holder arm having such a probe receptacle, and test apparatus having at least one probe which has such a probe receptacle are also provided.
摘要翻译：为了以可重复的方式布置探针，确保探头针头的可靠接触连接，并确保即使在高温或测试力下也能牢固地固定探头针头，提供探头插座，用于安装用于测试半导体部件的探头。探针具有探针和基本上棱柱形的探针轴。探针插座包括具有插座开口的基座，以容纳棱柱形探针轴，被基壁包围。底壁包括至少两个可以朝向彼此移动的底壁段。还提供了具有这种探针插座的探针支架臂和具有至少一个具有这种探针插座的探头的测试装置。

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