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1. 发明授权

US06611327B2 Detection of contaminants on low wavelength masks 失效
公开(公告)号：US06611327B2
公开(公告)日：2003-08-26
申请号：US09817012
申请日：2001-03-23
申请人： Arun Ramamoorthy , Giang Dao , Christopher Gerth
发明人： Arun Ramamoorthy , Giang Dao , Christopher Gerth
IPC分类号： G01N2188
CPC分类号： G03F7/70483 , G01N21/65
摘要： Testing of a mask which is intended to be used for low wavelength lithography. At lower wavelengths, e.g., 157 nm, certain contaminants may become visible, even though they were transparent under visible or ultraviolet light. A combination of Raman spectroscopy and infrared absorption spectroscopy are used to identify the contaminants.

2. 发明申请

US20060183236A1 Spectroscopic analysis system and method 有权
标题翻译：光谱分析系统及方法
公开(公告)号：US20060183236A1
公开(公告)日：2006-08-17
申请号：US11404680
申请日：2006-04-14
申请人： Andrew Berlin , Christopher Gerth , Tac-Woong Koo
发明人： Andrew Berlin , Christopher Gerth , Tac-Woong Koo
IPC分类号： G01N33/00
CPC分类号： G01N21/65 , G01N21/658 , G01N2021/052 , G01N2021/653 , G01N2021/655 , Y10T436/143333
摘要： Spectroscopic analysis systems and methods for analyzing samples are disclosed. An analysis system may contain an electromagnetic radiation source to provide radiation, a spectroscopic analysis chamber to perform a coherent Raman spectroscopy (e.g., stimulated Raman or coherent anti-Stokes Raman spectroscopy), and a radiation detector to detect radiation based on the spectroscopy. The chamber may have a resonant cavity to contain a sample for analysis, at least one window to the cavity to transmit the first radiation into the cavity and to transmit a second radiation out, a plurality of reflectors affixed to a housing of the cavity to reflect radiation of a predetermined frequency, the plurality of reflectors separated by a distance that is sufficient to resonate the radiation. The spectroscopic analysis system may be coupled with a nucleic acid sequencing system to receive a single nucleic acid derivative in solution and identify the derivative to sequence the nucleic acid.
摘要翻译：公开了用于分析样品的光谱分析系统和方法。分析系统可以包含用于提供辐射的电磁辐射源，用于执行相干拉曼光谱（例如，受激拉曼或相干反斯托克斯拉曼光谱）的光谱分析室，以及基于光谱检测辐射的辐射检测器。腔室可以具有一个谐振腔，以容纳用于分析的样本，至少一个窗口，用于将腔室中的第一辐射传输到腔体中并将第二辐射透射出来，多个反射器固定到空腔的壳体以反射预定频率的辐射，多个反射器分开足以使辐射共振的距离。光谱分析系统可以与核酸测序系统结合以在溶液中接受单个核酸衍生物，并鉴定衍生物以对核酸进行排序。

3. 发明申请

US20050110990A1 Method and device for detecting small numbers of molecules using surface-enhanced coherent anti-Stokes Raman spectroscopy 审中-公开
标题翻译：使用表面增强相干反斯托克斯拉曼光谱法检测少量分子的方法和装置
公开(公告)号：US20050110990A1
公开(公告)日：2005-05-26
申请号：US10966893
申请日：2004-10-15
申请人： Tae-Woong Koo , Christopher Gerth , Mineo Yamakawa
发明人： Tae-Woong Koo , Christopher Gerth , Mineo Yamakawa
IPC分类号： G01J3/44 , G01N21/65
CPC分类号： G01J3/44 , G01N21/658 , G01N2021/653 , G01N2021/656
摘要： The device and method disclosed herein concern detecting, identifying, and or quantifying analytes, such as nucleic acids, with high resolution and fast response times using surface enhanced coherent anti-Stokes Raman spectroscopy. In certain embodiments of the invention, a small number molecular sample of the analyte 210 such as a nucleotide, passes through a microfluidic channel, microchannel, or nanochannel 185 and sample cell 175 that contains Raman-active surfaces, and is detected by surface enhanced, coherent anti-Stokes Raman spectroscopy (SECARS). Other embodiments of the invention concern an apparatus for analyte detection.
摘要翻译：本文公开的装置和方法涉及使用表面增强的相干反斯托克斯拉曼光谱法检测，鉴定和定量分析物，例如具有高分辨率和快速响应时间的核酸。在本发明的某些实施方案中，诸如核苷酸的分析物210的少量分子样品通过含有拉曼活性表面的微流体通道，微通道或纳米通道185和样品池175，并且通过表面增强，相干反斯托克斯拉曼光谱（SECARS）。本发明的其它实施方案涉及用于分析物检测的装置。

4. 发明申请

US20050084980A1 Method and device for detecting a small number of molecules using surface-enhanced coherant anti-stokes raman spectroscopy 审中-公开
标题翻译：使用表面增强型苯属反斯托克斯拉曼光谱法检测少量分子的方法和装置
公开(公告)号：US20050084980A1
公开(公告)日：2005-04-21
申请号：US10688680
申请日：2003-10-17
申请人： Tae-Woong Koo , Christopher Gerth , Mineo Yamakawa
发明人： Tae-Woong Koo , Christopher Gerth , Mineo Yamakawa
IPC分类号： G01J3/44 , G01N21/65 , G01N21/41
CPC分类号： G01J3/44 , G01N21/658 , G01N2021/653 , G01N2021/656
摘要： The device and method disclosed herein concern detecting, identifying, and or quantifying analytes, such as nucleic acids, with high resolution and fast response times using surface enhanced coherent anti-Stokes Raman spectroscopy. In certain embodiments of the invention, a small number molecular sample of the analyte 210 such as a nucleotide, passes through a microfluidic channel, microchannel, or nanochannel 185 and sample cell 175 that contains Raman-active surfaces, and is detected by surface enhanced, coherent anti-Stokes Raman spectroscopy (SECARS). Other embodiments of the invention concern an apparatus for analyte detection.
摘要翻译：本文公开的装置和方法涉及使用表面增强的相干反斯托克斯拉曼光谱法检测，鉴定和定量分析物，例如具有高分辨率和快速响应时间的核酸。在本发明的某些实施方案中，诸如核苷酸的分析物210的少量分子样品通过含有拉曼活性表面的微流体通道，微通道或纳米通道185和样品池175，并且通过表面增强，相干反斯托克斯拉曼光谱（SECARS）。本发明的其它实施方案涉及用于分析物检测的装置。

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