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1. 发明授权

US08161984B2 Generator for foam to clean substrate 有权
标题翻译：发泡机用于泡沫清洁基材
公开(公告)号：US08161984B2
公开(公告)日：2012-04-24
申请号：US12185780
申请日：2008-08-04
申请人： Arnold Kholodenko , Anwar Husain , Gregory A. Tomasch , Cheng-Yu (Sean) Lin
发明人： Arnold Kholodenko , Anwar Husain , Gregory A. Tomasch , Cheng-Yu (Sean) Lin
IPC分类号： B08B3/00 , B05B7/04
CPC分类号： H01L21/67051 , B01F3/04446 , B01F5/0473 , B01F5/0475 , B01F5/0485 , B01F5/0656 , B01F5/0657 , Y10T137/0318
摘要： In an example embodiment, a device for generating a cleaning foam includes a female housing and a male plug. The plug includes an aperture into which a fluid flows from another component of the cleaning system. The plug includes a premix chamber which receives the fluid from the aperture and into which a gas is injected to form a foam. In an example embodiment, the chamber is a hollow cylinder and the gas is injected into the cylinder through channels which are tangential to the cylinder. The plug also includes a solid cylinder with a continuous helical indentation on the outside of the solid cylinder. When the male plug is inserted into the female housing, the continuous helical indentation and the inner surface of the housing form a helical channel through which the foam flows and is further mixed on its way back into the cleaning system.
摘要翻译：在示例性实施例中，用于产生清洁泡沫的装置包括阴壳体和阳插头。塞子包括孔，流体从清洁系统的另一部件流入流体。塞子包括预混合室，其接收来自孔的流体并注入气体以形成泡沫。在一个示例性实施例中，腔室是中空圆柱体，并且气体通过与气缸相切的通道注入气缸。塞子还包括在实心圆柱体的外侧上具有连续的螺旋形凹陷的实心圆柱体。当公插头插入阴壳体中时，连续的螺旋形凹口和壳体的内表面形成螺旋通道，泡沫流过该通道，并进一步在返回到清洁系统中的混合物中混合。

2. 发明授权

US08739805B2 Confinement of foam delivered by a proximity head 有权
标题翻译：密封由接近头发送的泡沫
公开(公告)号：US08739805B2
公开(公告)日：2014-06-03
申请号：US12324316
申请日：2008-11-26
申请人： Arnold Kholodenko , Cheng-Yu (Sean) Lin , Leon Ginzburg , Mark Mandelboym , Gregory A. Tomasch , Anwar Husain
发明人： Arnold Kholodenko , Cheng-Yu (Sean) Lin , Leon Ginzburg , Mark Mandelboym , Gregory A. Tomasch , Anwar Husain
IPC分类号： B08B3/04
CPC分类号： H01L21/6704 , B08B3/003 , C11D11/0047 , C11D11/0058 , H01L21/67051 , H01L21/67057 , H01L21/6719 , H01L21/6776
摘要： In an example embodiment, a linear wet system includes a carrier and a proximity head in a chamber. The proximity head includes three sections in a linear arrangement. The first section suctions liquid from the upper surface of a semiconductor wafer as the wafer is transported by the carrier under the proximity head. The second section is configured to cause a film (or meniscus) of cleaning foam which is a non-Newtonian fluid to flow onto the upper surface of the wafer. The third section is configured to cause a film of rinsing fluid to flow onto the upper surface of the wafer as the wafer is carried under the proximity head. The third section is defined partially around the second section and up to the first section, so that the third section and the first section create a confinement of the cleaning foam with respect to the chamber.
摘要翻译：在一个示例性实施例中，线性湿式系统包括载体和室中的邻近头部。接近头包括线性布置的三个部分。第一部分在半导体晶片的上表面吸附液体，因为晶片由邻近头部下方的载体输送。第二部分被配置为使得作为非牛顿流体的清洁泡沫的膜（或弯液面）流动到晶片的上表面上。第三部分构造成当晶片被携带在邻近头部下方时，使冲洗流体膜流到晶片的上表面。第三部分围绕第二部分和第一部分部分地限定，使得第三部分和第一部分产生相对于室的清洁泡沫的限制。

3. 发明申请

US20100024842A1 GENERATOR FOR FOAM TO CLEAN SUBSTRATE 有权
标题翻译：泡沫发电机清洁基板
公开(公告)号：US20100024842A1
公开(公告)日：2010-02-04
申请号：US12185780
申请日：2008-08-04
申请人： Arnold Kholodenko , Anwar Husain , Gregory A. Tomasch , Cheng-Yu (Sean) Lin
发明人： Arnold Kholodenko , Anwar Husain , Gregory A. Tomasch , Cheng-Yu (Sean) Lin
IPC分类号： B08B5/00 , B08B3/00 , C23G1/00
CPC分类号： H01L21/67051 , B01F3/04446 , B01F5/0473 , B01F5/0475 , B01F5/0485 , B01F5/0656 , B01F5/0657 , Y10T137/0318
摘要： In an example embodiment, a device for generating a cleaning foam includes a female housing and a male plug. The plug includes an aperture into which a fluid flows from another component of the cleaning system. The plug includes a premix chamber which receives the fluid from the aperture and into which a gas is injected to form a foam. In an example embodiment, the chamber is a hollow cylinder and the gas is injected into the cylinder through channels which are tangential to the cylinder. The plug also includes a solid cylinder with a continuous helical indentation on the outside of the solid cylinder. When the male plug is inserted into the female housing, the continuous helical indentation and the inner surface of the housing form a helical channel through which the foam flows and is further mixed on its way back into the cleaning system.
摘要翻译：在示例性实施例中，用于产生清洁泡沫的装置包括阴壳体和阳插头。塞子包括孔，流体从清洁系统的另一部件流入流体。塞子包括预混合室，其接收来自孔的流体并注入气体以形成泡沫。在一个示例性实施例中，腔室是中空圆柱体，并且气体通过与气缸相切的通道注入气缸。塞子还包括在实心圆柱体的外侧上具有连续的螺旋形凹陷的实心圆柱体。当公插头插入阴壳体中时，连续的螺旋形凹口和壳体的内表面形成螺旋通道，泡沫流过该通道，并进一步在返回到清洁系统中的混合物中混合。

4. 发明授权

US08557051B2 Method for using generator for foam to clean substrate 有权
标题翻译：使用发泡机清洗基材的方法
公开(公告)号：US08557051B2
公开(公告)日：2013-10-15
申请号：US13445868
申请日：2012-04-12
申请人： Arnold Kholodenko , Anwar Husain , Gregory A. Tomasch , Cheng-Yu (Sean) Lin
发明人： Arnold Kholodenko , Anwar Husain , Gregory A. Tomasch , Cheng-Yu (Sean) Lin
IPC分类号： B08B3/00 , B05B7/04
CPC分类号： H01L21/67051 , B01F3/04446 , B01F5/0473 , B01F5/0475 , B01F5/0485 , B01F5/0656 , B01F5/0657 , Y10T137/0318
摘要： A system for cleaning a substrate with a foam performs a method for generating a cleaning foam. In the first operation of the method, the system pumps a fluid into a premix chamber. The premix chamber is a component of a male plug which fits into a female housing in the system. Then the system injects a gas into the premix chamber to initiate generation of the foam from the fluid. The foam flows from the premix chamber into a sealed helical channel formed by a helical indentation on an outside surface of the male plug and an inner surface of the female housing to allow the foam to reach a desired state along a length of the sealed helical channel. In the last operation of the method, the foam outputs from an exit end of the helical channel through the male plug to a component of the system.
摘要翻译：用泡沫清洁基材的系统执行产生清洁泡沫的方法。在该方法的第一操作中，系统将流体泵送到预混合室中。预混合室是配合在系统中的阴壳体中的阳插头的部件。然后系统将气体注入到预混合室中以引发从流体产生泡沫。泡沫从预混合室流入密封的螺旋通道，该密封螺旋通道由阳螺栓的外表面上的螺旋形凹陷和阴壳体的内表面形成，以允许泡沫沿着密封的螺旋通道的长度达到期望的状态。在该方法的最后操作中，泡沫从螺旋通道的出口端通过公插头输出到系统的部件。

5. 发明申请

US20120255618A1 Method for Using Generator for Foam to Clean Substrate 有权
标题翻译：使用发生器泡沫清洗基材的方法
公开(公告)号：US20120255618A1
公开(公告)日：2012-10-11
申请号：US13445868
申请日：2012-04-12
申请人： Arnold Kholodenko , Anwar Husain , Gregory A. Tomasch , Chen-Yu (Sean) Lin
发明人： Arnold Kholodenko , Anwar Husain , Gregory A. Tomasch , Chen-Yu (Sean) Lin
IPC分类号： B01F5/04
CPC分类号： H01L21/67051 , B01F3/04446 , B01F5/0473 , B01F5/0475 , B01F5/0485 , B01F5/0656 , B01F5/0657 , Y10T137/0318
摘要： A system for cleaning a substrate with a foam performs a method for generating a cleaning foam. In the first operation of the method, the system pumps a fluid into a premix chamber. The premix chamber is a component of a male plug which fits into a female housing in the system. Then the system injects a gas into the premix chamber to initiate generation of the foam from the fluid. The foam flows from the premix chamber into a sealed helical channel formed by a helical indentation on an outside surface of the male plug and an inner surface of the female housing to allow the foam to reach a desired state along a length of the sealed helical channel. In the last operation of the method, the foam outputs from an exit end of the helical channel through the male plug to a component of the system.
摘要翻译：用泡沫清洁基材的系统执行产生清洁泡沫的方法。在该方法的第一操作中，系统将流体泵送到预混合室中。预混合室是配合在系统中的阴壳体中的阳插头的部件。然后系统将气体注入到预混合室中以引发从流体产生泡沫。泡沫从预混合室流入密封的螺旋通道，该密封螺旋通道由阳螺栓的外表面上的螺旋形凹陷和阴壳体的内表面形成，以允许泡沫沿着密封的螺旋通道的长度达到期望的状态。在该方法的最后操作中，泡沫从螺旋通道的出口端通过公插头输出到系统的部件。

6. 发明授权

US08584613B2 Single substrate processing head for particle removal using low viscosity fluid 有权
标题翻译：用于使用低粘度流体进行颗粒去除的单基板加工头
公开(公告)号：US08584613B2
公开(公告)日：2013-11-19
申请号：US12165577
申请日：2008-06-30
申请人： Arnold Kholodenko , Cheng-yu Lin , Leon Ginzburg , Mark Mandelboym , Gregory A. Tomasch , Anwar Husain
发明人： Arnold Kholodenko , Cheng-yu Lin , Leon Ginzburg , Mark Mandelboym , Gregory A. Tomasch , Anwar Husain
IPC分类号： B05C5/02
CPC分类号： H01L21/67023 , H01L21/67051 , H01L21/67173 , H01L21/67748 , Y10T137/85938
摘要： A head for dispensing a thin film over a substrate is disclosed. The head includes a body assembly that extends between a first and a second end that is at least a width of the substrate. The body includes a main bore that is defined between the first and the second ends, the main bore connected to an upper side of a reservoir through a plurality of feeds that are defined between the main bore and the reservoir. The body also includes a plurality of outlets connected to a lower side of the reservoir and extend to an output slot. The plurality of feeds have a larger cross-sectional area than the plurality of outlets and the plurality of feeds are fewer than the plurality of outlets. Wherein fluid is configured to flow through the main bore, through the plurality of feeds along the bore and fill the reservoir up to at least the threshold level before fluid is evenly output as a film out of the output slot onto the substrate.
摘要翻译：公开了一种用于在衬底上分配薄膜的头部。头部包括主体组件，其在至少基板的宽度的第一端和第二端之间延伸。主体包括限定在第一和第二端之间的主孔，主孔通过限定在主孔和储存器之间的多个进料连接到储存器的上侧。主体还包括连接到储存器的下侧并延伸到输出槽的多个出口。多个进料具有比多个出口更大的横截面积，并且多个进料少于多个出口。其中流体构造成流过主孔，通过沿着孔的多个进料，并且在流体均匀地输出为输出槽之外的流体到基板上之前将储存器填充到至少阈值水平。

7. 发明申请

US20090320942A1 SINGLE SUBSTRATE PROCESSING HEAD FOR PARTICLE REMOVAL USING LOW VISCOSITY FLUID 有权
标题翻译：使用低粘度流体进行颗粒去除的单基板加工头
公开(公告)号：US20090320942A1
公开(公告)日：2009-12-31
申请号：US12165577
申请日：2008-06-30
申请人： Arnold Kholodenko , Cheng-yu Lin , Leon Ginzburg , Mark Mandelboym , Gregory A. Tomasch , Anwar Husain
发明人： Arnold Kholodenko , Cheng-yu Lin , Leon Ginzburg , Mark Mandelboym , Gregory A. Tomasch , Anwar Husain
IPC分类号： F16L41/00
CPC分类号： H01L21/67023 , H01L21/67051 , H01L21/67173 , H01L21/67748 , Y10T137/85938
摘要： A head for dispensing a thin film over a substrate is disclosed. The head includes a body assembly that extends between a first and a second end that is at least a width of the substrate. The body includes a main bore that is defined between the first and the second ends, the main bore connected to an upper side of a reservoir through a plurality of feeds that are defined between the main bore and the reservoir. The body also includes a plurality of outlets connected to a lower side of the reservoir and extend to an output slot. The plurality of feeds have a larger cross-sectional area than the plurality of outlets and the plurality of feeds are fewer than the plurality of outlets. Wherein fluid is configured to flow through the main bore, through the plurality of feeds along the bore and fill the reservoir up to at least the threshold level before fluid is evenly output as a film out of the output slot onto the substrate.
摘要翻译：公开了一种用于在衬底上分配薄膜的头部。头部包括主体组件，其在至少基板的宽度的第一端和第二端之间延伸。主体包括限定在第一和第二端之间的主孔，主孔通过限定在主孔和储存器之间的多个进料连接到储存器的上侧。主体还包括连接到储存器的下侧并延伸到输出槽的多个出口。多个进料具有比多个出口更大的横截面积，并且多个进料少于多个出口。其中流体构造成流过主孔，通过沿着孔的多个进料，并且在流体均匀地输出为输出槽之外的流体到基板上之前将储存器填充到至少阈值水平。

8. 发明授权

US07128305B2 Unitary slot valve actuator with dual valves 有权
标题翻译：带双阀的单排槽阀执行器
公开(公告)号：US07128305B2
公开(公告)日：2006-10-31
申请号：US11110141
申请日：2005-04-19
申请人： Gregory A. Tomasch
发明人： Gregory A. Tomasch
IPC分类号： B65G49/07 , F16K3/10
CPC分类号： F16K43/008 , F16K3/18 , F16K51/02
摘要： A unitary slot valve actuator is in a vacuum body between process and transport modules. A separate valve is provided on the unitary actuator for each of two valve slots, each slot being closed or opened according to the position of the unitary actuator. The separate valves allow a vacuum condition to be maintained in the transport module while an adjacent process module is open to the atmosphere for servicing. Access to both open valves for servicing is by centering the unitary actuator to hold both valves open, but not vertically-spaced, relative to the slots. The open valves are easily reached by a service worker through an access port. A computer workstation operates a controller for the slot closure, and for moving the unitary actuator and the valves from the open and centered position, away from the slots to expose seal surfaces around the slots for cleaning.
摘要翻译：单个槽阀致动器位于过程和传输模块之间的真空体内。在单个致动器上设置单独的阀，用于两个阀槽中的每一个，每个槽根据整体致动器的位置关闭或打开。单独的阀允许在运输模块中保持真空状态，而相邻的处理模块对大气开放以进行维修。进入两个打开的阀门进行维修是通过使整体致动器居中，以保持两个阀相对于槽开启但不垂直间隔开。打开的阀门由服务人员通过进出口轻松到达。计算机工作站操作用于狭槽闭合的控制器，并且用于将整体致动器和阀从打开和中心位置移动远离槽，以暴露槽周围的密封表面以进行清洁。

9. 发明授权

US07059583B2 Unitary slot valve actuator with dual valves 有权
标题翻译：带双阀的单排槽阀执行器
公开(公告)号：US07059583B2
公开(公告)日：2006-06-13
申请号：US11056818
申请日：2005-02-10
申请人： Gregory A. Tomasch
发明人： Gregory A. Tomasch
IPC分类号： B65G49/07 , F16K3/10
CPC分类号： F16K43/008 , F16K3/18 , F16K51/02
摘要： A unitary slot valve actuator is in a vacuum body between adjacent vacuum chambers, such as process and transport modules. Separate valves are provided on the unitary actuator for each of two valve slots, each slot being closed or opened according to the position of the unitary actuator. The separate valves allow a vacuum condition to be maintained in the transport module while an adjacent process module is open to the atmosphere for servicing. The unitary actuator allows access to an open valve for servicing the open valve by way of a centering mechanism that holds the valves in an open, but not vertically-spaced, position relative to the slots. The open valves are easily reached by a service worker. A separate motor moves the unitary actuator and the valves down from the open position and away from the slots to expose seal surfaces around the slots for cleaning.
摘要翻译：单个槽阀致动器位于相邻真空室之间的真空体中，例如过程和运输模块。在单个执行器上为两个阀槽中的每一个提供单独的阀，每个槽根据整体致动器的位置关闭或打开。单独的阀允许在运输模块中保持真空状态，而相邻的处理模块对大气开放以进行维修。整体致动器允许通过定心机构访问打开的阀来维修打开的阀，该定心机构将阀保持在相对于槽的开放但不垂直间隔的位置。打开的阀门很容易被服务人员到达。单独的马达将整体致动器和阀从打开位置向下移动并远离槽，以暴露槽周围的密封表面以进行清洁。

10. 发明授权

US06601824B2 Single shaft, dual cradle vacuum slot valve 有权
公开(公告)号：US06601824B2
公开(公告)日：2003-08-05
申请号：US10096907
申请日：2002-03-12
申请人： Tony R. Kroeker , Gregory A. Tomasch
发明人： Tony R. Kroeker , Gregory A. Tomasch
IPC分类号： B65G4907
CPC分类号： F16K51/02 , F16K3/188 , Y10T137/0514
摘要： A single slot valve shaft is in a vacuum body between adjacent vacuum chambers, such as a process module and a transport module. Separate valves are provided on the single shaft actuator for each of two valve body slots, each body slot being closed or opened according to the position of the single shaft. The separate valves allow a vacuum condition to be maintained in the transport module while an adjacent process module is open to the atmosphere for servicing. The single shaft allows access to an open valve for servicing the open valve by way of stops that limit drive travel and hold the valve in an open, but not vertically-spaced, position relative to a respective slot. The open valve is easily reached by a gloved hand of a service worker. The single shaft is mounted on a first cradle, and the first cradle is mounted on a second cradle. Two separate shaft drives move the two cradles to position the single shaft to locate the valves between the slots to open one slot and close the other slot. Another separate shaft drive moves the single shaft vertically down from the open position and away from the slots to expose seal surfaces around the slots for cleaning.

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