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    • 10. 发明授权
    • Temperature control of cryogenic systems
    • 低温系统的温度控制
    • US4679401A
    • 1987-07-14
    • US752354
    • 1985-07-03
    • Philip A. LessardAllen J. BartlettJohn F. Peterson
    • Philip A. LessardAllen J. BartlettJohn F. Peterson
    • B01D8/00F04B37/08
    • B01D8/00F04B37/08Y10S417/901
    • To control the temperature of one or more heat sinks of a cryogenic refrigerator in a cryopump, refrigerant gas to the refrigerator is diverted through heat exchangers associated with the refrigerator heat sinks. The diverted refrigerant gas may be used to maintain the temperature of the first stage cryopumping surfaces above some level to avoid cross over hangup. The second stage cryopumping surfaces may be warmed by the diverted refrigerant to some temperature level for partial regeneration. Both heat sinks may be warmed for full regeneration of the cryopump. Bleed flow of refrigerant gas cooled by the first stage of the refrigerator can be directed past a thermal mass to cool that mass. By reversing the flow of refrigerant gas during cooldown of the system, the thermal mass can be used to more rapidly cool the refrigerator. The thermal mass is thermally isolated from the refrigerator heat sinks and is positioned within the vacuum vessel of the cryopump adjacent to the first stage of the refrigerator.
    • 为了控制低温泵中的低温冰箱的一个或多个散热器的温度,通向与冰箱散热器相关联的热交换器将制冷剂气体输送到冰箱。 转向的制冷剂气体可用于将第一级低温泵的表面的温度保持在一定程度上,以避免交叉悬挂。 可将第二级低温泵送表面由转向制冷剂加热到一定温度以进行部分再生。 这两个散热片可能会被加热,以便低温泵完全再生。 由冰箱的第一级冷却的制冷剂气体的流出可以被引导通过热质量以冷却该质量。 通过在系统的冷却期间逆转制冷剂气体的流动,可以使用热质量来更快速地冷却冰箱。 热物质与冰箱散热器热隔离,并且位于与冰箱的第一级相邻的低温泵的真空容器内。