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    • 5. 发明授权
    • Pressure responsive clamp for a processing chamber
    • 用于处理室的压力响应夹
    • US6012600A
    • 2000-01-11
    • US590030
    • 1996-02-02
    • Thanh PhamEugene FukshanskyDavid Wanamaker
    • Thanh PhamEugene FukshanskyDavid Wanamaker
    • B65D45/18H01L21/687
    • B65D45/18H01L21/687
    • A method and apparatus is provided which secures the lid of a processing chamber in abutting engagement with the walls of the chamber to form an airtight processing environment and which provides for the release of pressure within the chamber in the event of a sudden change in pressure such as an over pressure excursion. The method and apparatus generally comprise a clamp member having a base portion for mounting the clamp to a first surface, a contact portion for contacting a second surface and maintaining a desired relationship between the first and second surfaces, and a deflecting portion which allows separation of the first and second surfaces to relieve pressure behind the first or second surface and return to the desired relationship between the first and second surfaces.
    • 提供了一种方法和装置,其将处理室的盖与室的壁邻接地接合以形成气密处理环境,并且在压力突然变化的情况下提供室内压力的释放 作为过度压力的旅行。 所述方法和装置通常包括具有用于将夹具安装到第一表面的基部的夹持构件,用于接触第二表面并保持第一和第二表面之间期望的关系的接触部分和允许将第二表面分离的偏转部分 所述第一和第二表面以减轻所述第一或第二表面后面的压力并返回到所述第一和第二表面之间的所需关系。
    • 6. 发明授权
    • Liquid flow rate estimation and verification by direct liquid measurement
    • 液体流量估算和直接液体测量验证
    • US5866795A
    • 1999-02-02
    • US819593
    • 1997-03-17
    • Yen-Kun WangFong ChangThanh PhamJeff Plante
    • Yen-Kun WangFong ChangThanh PhamJeff Plante
    • G01L25/00
    • G01F25/0007C23C16/4481G01F1/007G01F1/708G01F25/003G01F25/0038
    • An apparatus for controlling the flow of a liquid precursor into a deposition chamber comprises a liquid injection system having a liquid injection outlet connected to a chamber inlet line upstream of the deposition chamber. The liquid injection system includes a liquid precursor supply, a purge gas supply, a carrier gas supply, a liquid flow meter, and a controller managing flows of the liquid precursor and carrier gas to the chamber. A purge line is connected between the purge gas supply and the liquid flow meter and is used to trap a known mass of liquid precursor. To calibrate the flow of the liquid precursor, the purge gas is used to push the trapped liquid precursor through the liquid flow meter at a steady rate. The elapsed time for evacuating the trapped liquid precursor from the purge line is measured. Calibration information is computed using the mass of the trapped liquid precursor and the measured elapsed time based on the direct liquid measurement approach. The calibration information is used to calibrate the controller to correct deviations in the liquid flow rate and achieve a target liquid precursor flow rate for improving wafer uniformity.
    • 用于控制液体前体流入沉积室的装置包括具有连接到沉积室上游的室入口管的液体注入口的液体注入系统。 液体注入系统包括液体前体供应源,吹扫气体供应源,载气供应器,液体流量计和控制液体前体和载体气体流到腔室的控制器。 吹扫管线连接在净化气体供应源和液体流量计之间,用于捕集已知质量的液体前体。 为了校准液体前体的流动,吹扫气体以稳定的速率推动被捕获的液体前体通过液体流量计。 测量从清除管线排出被捕获的液体前体的经过时间。 基于直接液体测量方法,使用捕获的液体前体的质量和测量的经过时间计算校准信息。 校准信息用于校准控制器以校正液体流速中的偏差,并实现目标液体前体流速以改善晶片均匀性。