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1. 发明授权

US4356701A Cryopump 失效
标题翻译：冷冻者
公开(公告)号：US4356701A
公开(公告)日：1982-11-02
申请号：US266186
申请日：1981-05-22
申请人： Allen J. Bartlett , Robert M. Lewis
发明人： Allen J. Bartlett , Robert M. Lewis
IPC分类号： F25B7/00 , F04B37/08 , B01D8/00
CPC分类号： F04B37/08 , Y10S417/901
摘要： For a given temperature differential between a refrigerated heat sink and frontal cryopanel array, the mass of the entire cryopump array is minimized by providing thermal struts between the heat sink and the frontal array. The thermal struts extend through, but are isolated from, the primary pumping surface to minimize their lengths. The struts support the frontal array independent of the side radiation shield to facilitate fabrication. To further reduce the temperature differential to the frontal array, heat pipes may be provided. By reducing the temperature differential between the frontal cryopanel array and refrigerated heat sink through the use of solid thermal struts or heat pipes the load carrying capability of a cryopump can be improved. Heat pipes may also serve as a thermal switch between a heat sink and a cryopanel.
摘要翻译：对于冷藏散热器和正面冷冻板阵列之间的给定温度差，通过在散热器和正面阵列之间提供热支柱，使整个低温泵阵列的质量最小化。热支柱延伸穿过主要泵送表面，但是与主泵送表面隔离，以使其长度最小化。支撑支撑独立于侧面辐射屏蔽的正面阵列以促进制造。为了进一步降低到正面阵列的温差，可以提供热管。通过使用固体热支柱或热管减少正面冷冻板阵列和冷藏散热片之间的温差，可以提高低温泵的承载能力。热管也可以用作散热器和冷冻板之间的热开关。

2. 发明授权

US4454722A Cryopump 失效
标题翻译：冷冻者
公开(公告)号：US4454722A
公开(公告)日：1984-06-19
申请号：US437560
申请日：1982-10-29
申请人： Allen J. Bartlett , Robert M. Lewis
发明人： Allen J. Bartlett , Robert M. Lewis
IPC分类号： F04B37/08 , B01D8/00
CPC分类号： F04B37/08 , Y10S417/901
摘要： For a given temperature differential between a refrigerated heat sink (28) and frontal cryopanel array (46), the mass of the entire cryopump array is minimized by providing thermal struts (54) between the heat sink and the frontal array. The thermal struts extend through, but are isolated from, the primary pumping surface to minimize their lengths. The struts support the frontal array independent of the side radiation shield to facilitate fabrication. To further reduce the temperature differential to the frontal array, heat pipes may be provided. Parallel heat pipes or solid thermal struts may provide the thermal path during cooldown of the system. By reducing the temperature differential between the frontal cryopanel array (46) and refrigerated heat sink (28) through the use of solid thermal struts or heat pipes the load carrying capability of a cryopump can be improved.
摘要翻译：对于冷藏散热器（28）和正面冷冻板阵列（46）之间的给定温度差，通过在散热器和正面阵列之间提供热支柱（54）来使整个低温泵阵列的质量最小化。热支柱延伸穿过主要泵送表面，但是与主泵送表面隔离，以使其长度最小化。支撑支撑独立于侧面辐射屏蔽的正面阵列以促进制造。为了进一步降低到正面阵列的温差，可以提供热管。平行的热管或固体热支柱可以在系统冷却时提供热路径。通过使用固体热支柱或热管减少正面冷冻板阵列（46）和冷藏散热器（28）之间的温差，可以提高低温泵的承载能力。

3. 发明申请

US20130239593A1 CRYOPUMP WITH CONTROLLED HYDROGEN GAS RELEASE 有权
标题翻译：控制氢气排放的CRYOPUMP
公开(公告)号：US20130239593A1
公开(公告)日：2013-09-19
申请号：US13988497
申请日：2011-11-23
申请人： Michael J. Eacobacci, JR. , Allen J. Bartlett , John J. Casello , Jeffrey A. Wells
发明人： Michael J. Eacobacci, JR. , Allen J. Bartlett , John J. Casello , Jeffrey A. Wells
IPC分类号： B01D8/00
CPC分类号： B01D8/00 , F04B37/08 , F04B37/14
摘要： A cryopump system includes a cryopump having a first cooling stage and a second cooling stage connected to the first cooling stage, the second cooling stage including a gas adsorber having a hydrogen adsorbing capacity of at least about 2 standard liters. The thermal storage capacity of the second cooling stage is sufficient to enable control of hydrogen pressure within the cryopump to satisfy ignition safety limits and limits on hydrogen flow rate in an exhaust line to be within limits of an abatement system to be coupled to the cryopump, upon warming of the second cooling stage during regeneration of up to a fully loaded cryopump.
摘要翻译：低温泵系统包括具有第一冷却级的冷冻泵和连接到第一冷却级的第二冷却级，第二冷却级包括具有至少约2标准升的氢吸附能力的气体吸附器。第二冷却阶段的蓄热能力足以使得能够控制低温泵内的氢气压力，以满足排气管线中的点火安全限制和氢气流量的限制，使之在与低温泵连接的减排系统的限度内，在再次达到完全负载的低温泵的第二冷却阶段变暖。

4. 发明申请

US20110265496A1 PROCESS CHAMBER WITH INTEGRATED PUMPING 审中-公开
标题翻译：具有集成泵送的过程室
公开(公告)号：US20110265496A1
公开(公告)日：2011-11-03
申请号：US13111149
申请日：2011-05-19
申请人： Allen J. Bartlett
发明人： Allen J. Bartlett
IPC分类号： B01D8/00
摘要： A process chamber with integrated pumping including a process chamber, refrigerators and arrays, or pumping surface, that are integral to the process chamber.
摘要翻译：具有集成泵浦的处理室，包括处理室，制冷器和阵列或泵送表面，其与处理室成一体。

5. 发明授权

US07788942B2 Helium management control system 有权
标题翻译：氦管理控制系统
公开(公告)号：US07788942B2
公开(公告)日：2010-09-07
申请号：US11590673
申请日：2006-10-31
申请人： Paul E. Dresens , Gary S. Ash , Allen J. Bartlett , Bruce Andeen , Y. Roberto Than , Joseph Chopy, Jr.
发明人： Paul E. Dresens , Gary S. Ash , Allen J. Bartlett , Bruce Andeen , Y. Roberto Than , Joseph Chopy, Jr.
IPC分类号： F25B45/00 , B01D8/00 , F25J1/00
CPC分类号： F04B37/08 , B01D8/00 , F17D1/04 , F17D3/01 , F17D3/18 , F24F11/30 , F24F2110/50 , F25B9/002 , F25B9/14 , F25B45/00 , F25B2309/001 , F25B2309/002 , F25B2309/1428 , F25B2345/001 , F25B2345/003 , F25J1/0007
摘要： A helium management control system for controlling the helium refrigerant supply from a common manifold supplies a plurality of cryogenic refrigerators with an appropriate helium supply. The system employs a plurality of sensors to monitor and regulate the overall refrigerant supply to deliver an appropriate refrigerant supply to each of the cryogenic refrigerators depending on the computed aggregate cooling demand of all of the cryogenic refrigerators. An appropriate supply of helium is distributed to each cryopump by sensing excess and sparse helium refrigerant and redistributing refrigerant accordingly. If the total refrigeration supply exceeds the total refrigerant demand, or consumption, excess refrigerant is directed to cryogenic refrigerators which can utilize the excess helium to complete a current cooling function more quickly. Similarly, if the total refrigeration demand exceeds the total refrigeration supply, the refrigerant supply to some or all of the cryogenic refrigerators will be reduced accordingly so that detrimental or slowing effects are minimized based upon the current cooling function.
摘要翻译：用于控制来自公共歧管的氦制冷剂供应的氦管理控制系统为多个低温冰箱供应适当的氦气供应。该系统采用多个传感器来监视和调节整个制冷剂供应，以根据所计算的所有低温冰箱的总体冷却需求向每个低温冰箱输送适当的制冷剂供应。通过检测过量稀疏氦制冷剂并相应地重新分配制冷剂，将适当的氦气供应分配给每个低温泵。如果总制冷供应超过总制冷剂需求或消耗量，则过量的制冷剂被引导到可以利用过量氦气来更快地完成当前冷却功能的低温冰箱。类似地，如果总制冷需求超过总制冷供应，则对一些或所有低温冰箱的制冷剂供应将相应地减小，从而基于当前的冷却功能来最小化有害或减速效果。

6. 发明授权

US07320224B2 Method and apparatus for detecting and measuring state of fullness in cryopumps 有权
标题翻译：用于检测和测量低温泵充满状态的方法和装置
公开(公告)号：US07320224B2
公开(公告)日：2008-01-22
申请号：US10763056
申请日：2004-01-21
申请人： Gary S. Ash , Allen J. Bartlett , James A. O'Neil , Bruce R. Andeen
发明人： Gary S. Ash , Allen J. Bartlett , James A. O'Neil , Bruce R. Andeen
IPC分类号： B01D8/00
CPC分类号： F04B37/08
摘要： The present system and method provides a mechanism for monitoring the level of fullness of a cryopump by measuring the cryopump adsorption capacity. An ion gauge or other total pressure gauge is in contact with the condensing or adsorbing panels of the pump. The gauge sensor, for example, can be connected to a tube or duct leading to the central core of the pump where the adsorbing charcoal is located. At this location in the pump, the gauge is exposed to low-boiling-point gases, such as hydrogen, neon and helium, while being substantially shielded from other gases such as nitrogen, argon, oxygen, or water vapor. By connecting a gauge to this location of the pump, the gauge can be used to monitor the absorption capacity of the pump.
摘要翻译：本系统和方法提供了通过测量低温泵吸附能力来监测低温泵的饱和度的机制。离子计或其他总压力表与泵的冷凝或吸附面板接触。例如，量规传感器可以连接到通向吸附木炭所在的泵的中心芯的管或管道。在泵的这个位置，仪表暴露于低沸点气体，如氢气，氖气和氦气，同时基本上与其他气体如氮气，氩气，氧气或水蒸气相隔离。通过将量规连接到泵的该位置，该量规可用于监测泵的吸收能力。

7. 发明授权

US5782096A Cryopump with improved shielding 失效
标题翻译：冷冻库具有改进的屏蔽
公开(公告)号：US5782096A
公开(公告)日：1998-07-21
申请号：US795981
申请日：1997-02-05
申请人： Allen J. Bartlett , John J. Casello
发明人： Allen J. Bartlett , John J. Casello
IPC分类号： F04B37/08 , B01D8/00
CPC分类号： F04B37/08 , Y10S417/901
摘要： A cryopump includes a two-stage refrigerator, a primary pumping surface, and a radiation shield. The radiation shield is in thermal contact with the first stage of the refrigerator. The primary pumping surface is surrounded by the radiation shield and is in thermal contact, through a direct conductive link, with the second stage of the refrigerator. The refrigerator, however, is external to the radiation shield.
摘要翻译：低温泵包括两级冰箱，初级泵送表面和辐射屏蔽。辐射屏蔽与冰箱的第一级热接触。初级泵送表面被辐射屏蔽包围，并通过直接导电连接与冰箱的第二级热接触。然而，冰箱在辐射屏蔽外部。

8. 发明授权

US5156007A Cryopump with improved second stage passageway 失效
标题翻译：具有改进的第二阶段通行证的CRYOPUMP
公开(公告)号：US5156007A
公开(公告)日：1992-10-20
申请号：US647848
申请日：1991-01-30
申请人： Allen J. Bartlett , Philip A. Lessard , Stephen J. Yamartino , John T. Harvell
发明人： Allen J. Bartlett , Philip A. Lessard , Stephen J. Yamartino , John T. Harvell
IPC分类号： F04B37/08 , F25D19/00
CPC分类号： F04B37/08 , F25D19/006 , Y10S417/901
摘要： Condensation on a cryopump second stage refrigerator cylinder is prevented by arranging a passageway between a colder second stage cylinder shield in thermal contact with the coldest section of the second stage and a warmer radiation shield in thermal contact with the warmer first stage. This arrangement produces a uniform and significant temperature differential in the passageway. The passageway is arranged so that the ratio of its length, L, to its width, W, is ideally greater than five. This ensures molecular collisions with the cold surface of the cylinder shield so that gas molecules are tightly bound to the cylinder shield. As a result, condensation on the refrigerator cylinder and resultant pressure variations are prevented.
摘要翻译：通过在与第二级的最冷部分热接触的较冷的第二级气缸罩与在较暖的第一级热接触的较暖的辐射屏蔽之间设置通道来防止在低温泵第二级冷藏箱上的冷凝。这种布置在通道中产生均匀且显着的温差。该通道被布置成使得其长度L与其宽度W之比理想地大于5。这确保了与气缸屏蔽件的冷表面的分子碰撞，使得气体分子紧密地结合到气缸罩。结果，可以防止冰箱圆筒上的冷凝和合成的压力变化。

9. 发明授权

US5060481A Method and apparatus for controlling a cryogenic refrigeration system 失效
标题翻译：控制低温制冷系统的方法和装置
公开(公告)号：US5060481A
公开(公告)日：1991-10-29
申请号：US383170
申请日：1989-07-20
申请人： Allen J. Bartlett , Maureen C. Buonpane , Paul E. Amundsen
发明人： Allen J. Bartlett , Maureen C. Buonpane , Paul E. Amundsen
IPC分类号： F17C13/02 , F17C13/12 , F25B9/02
CPC分类号： F17C13/026 , F17C13/12 , F25B9/02 , F17C2203/0631 , F17C2221/017 , F17C2223/0161 , F17C2223/033 , F17C2227/0304 , F17C2227/0325 , F17C2227/0353 , F17C2250/032 , F17C2250/036 , F17C2250/0439 , F17C2250/0631 , F17C2260/032 , F17C2270/0536 , Y10T137/1189 , Y10T137/6606
摘要： A cryogenic refrigeration system has a control system that controls the operation of the refrigeration system and provides status information to the operator of the refrigeration system. The cryogenic refrigeration system includes one or more heater and at least one Joule-Thomson valve. The heaters are used to control the recondensing capacity of the refrigeration system and to heat the at least one Joule-Thomson valve and other points to melt away contaminants that may freeze at such points. The control system controls operation of the heaters. The control system also automates an initialization routine that utilizes the heaters to prevent blockage of the valves, and cools the refrigeration system down to a desired temperature. In addition, the control system shuts down the refrigeration system if the status information it monitors exceed a safe range.
摘要翻译：低温制冷系统具有控制制冷系统的操作的控制系统，并向制冷系统的操作人员提供状态信息。低温制冷系统包括一个或多个加热器和至少一个焦耳汤姆森阀。加热器用于控制制冷系统的再冷凝能力，并加热至少一个焦耳汤姆斯阀和其他点以熔化可能在这些点冻结的污染物。控制系统控制加热器的运行。控制系统还使利用加热器的初始化程序自动化，以防止阀的堵塞，并将制冷系统冷却到期望的温度。此外，如果控制系统监视的状态信息超过安全范围，则控制系统将关闭制冷系统。

10. 发明授权

US09266038B2 Cryopump 有权
公开(公告)号：US09266038B2
公开(公告)日：2016-02-23
申请号：US13983973
申请日：2012-02-08
申请人： Sergei Syssoev , Allen J. Bartlett , John J. Casello , Jeffrey A. Wells , Michael J. Eacobacci, Jr.
发明人： Sergei Syssoev , Allen J. Bartlett , John J. Casello , Jeffrey A. Wells , Michael J. Eacobacci, Jr.
IPC分类号： B01D8/00 , F04B37/08
CPC分类号： F04B37/08 , B01D8/00 , Y10T29/49236
摘要： A cryopump has a simple-to-manufacture frontal baffle plate with improved gas distribution and has a large-area second-stage array plate to capture Type II gases. The cryopump has a first-stage frontal baffle plate having orifices and flaps bent from and attached to the orifices. The cryopump has a second-stage top plate that is larger in area than cooling baffles of the second stage array.

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