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1. 发明申请

US20130239593A1 CRYOPUMP WITH CONTROLLED HYDROGEN GAS RELEASE 有权
标题翻译：控制氢气排放的CRYOPUMP
公开(公告)号：US20130239593A1
公开(公告)日：2013-09-19
申请号：US13988497
申请日：2011-11-23
申请人： Michael J. Eacobacci, JR. , Allen J. Bartlett , John J. Casello , Jeffrey A. Wells
发明人： Michael J. Eacobacci, JR. , Allen J. Bartlett , John J. Casello , Jeffrey A. Wells
IPC分类号： B01D8/00
CPC分类号： B01D8/00 , F04B37/08 , F04B37/14
摘要： A cryopump system includes a cryopump having a first cooling stage and a second cooling stage connected to the first cooling stage, the second cooling stage including a gas adsorber having a hydrogen adsorbing capacity of at least about 2 standard liters. The thermal storage capacity of the second cooling stage is sufficient to enable control of hydrogen pressure within the cryopump to satisfy ignition safety limits and limits on hydrogen flow rate in an exhaust line to be within limits of an abatement system to be coupled to the cryopump, upon warming of the second cooling stage during regeneration of up to a fully loaded cryopump.
摘要翻译：低温泵系统包括具有第一冷却级的冷冻泵和连接到第一冷却级的第二冷却级，第二冷却级包括具有至少约2标准升的氢吸附能力的气体吸附器。第二冷却阶段的蓄热能力足以使得能够控制低温泵内的氢气压力，以满足排气管线中的点火安全限制和氢气流量的限制，使之在与低温泵连接的减排系统的限度内，在再次达到完全负载的低温泵的第二冷却阶段变暖。

2. 发明授权

US09266038B2 Cryopump 有权
公开(公告)号：US09266038B2
公开(公告)日：2016-02-23
申请号：US13983973
申请日：2012-02-08
申请人： Sergei Syssoev , Allen J. Bartlett , John J. Casello , Jeffrey A. Wells , Michael J. Eacobacci, Jr.
发明人： Sergei Syssoev , Allen J. Bartlett , John J. Casello , Jeffrey A. Wells , Michael J. Eacobacci, Jr.
IPC分类号： B01D8/00 , F04B37/08
CPC分类号： F04B37/08 , B01D8/00 , Y10T29/49236
摘要： A cryopump has a simple-to-manufacture frontal baffle plate with improved gas distribution and has a large-area second-stage array plate to capture Type II gases. The cryopump has a first-stage frontal baffle plate having orifices and flaps bent from and attached to the orifices. The cryopump has a second-stage top plate that is larger in area than cooling baffles of the second stage array.

3. 发明授权

US09266039B2 Cryopump with controlled hydrogen gas release 有权
标题翻译：冷冻水控制氢气释放
公开(公告)号：US09266039B2
公开(公告)日：2016-02-23
申请号：US13988497
申请日：2011-11-23
申请人： Michael J. Eacobacci, Jr. , Allen J. Bartlett , John J. Casello , Jeffrey A. Wells
发明人： Michael J. Eacobacci, Jr. , Allen J. Bartlett , John J. Casello , Jeffrey A. Wells
IPC分类号： B60H1/00 , B01D8/00 , F04B37/08 , F04B37/14
CPC分类号： B01D8/00 , F04B37/08 , F04B37/14
摘要： A cryopump system includes a cryopump having a first cooling stage and a second cooling stage connected to the first cooling stage, the second cooling stage including a gas adsorber having a hydrogen adsorbing capacity of at least about 2 standard liters. The thermal storage capacity of the second cooling stage is sufficient to enable control of hydrogen pressure within the cryopump to satisfy ignition safety limits and limits on hydrogen flow rate in an exhaust line to be within limits of an abatement system to be coupled to the cryopump, upon warming of the second cooling stage during regeneration of up to a fully loaded cryopump.
摘要翻译：低温泵系统包括具有第一冷却级的冷冻泵和连接到第一冷却级的第二冷却级，第二冷却级包括具有至少约2标准升的氢吸附能力的气体吸附器。第二冷却阶段的蓄热能力足以使得能够控制低温泵内的氢气压力，以满足排气管线中的点火安全限制和氢气流量的限制，使之在与低温泵连接的减排系统的限度内，在再次达到完全负载的低温泵的第二冷却阶段变暖。

4. 发明授权

US10760562B2 Pressure burst free high capacity cryopump 有权
公开(公告)号：US10760562B2
公开(公告)日：2020-09-01
申请号：US12008985
申请日：2008-01-15
申请人： Allen J. Bartlett , Michael A. Driscoll , Michael J. Eacobacci, Jr. , William L. Johnson , Robert P. Sullivan , Sergei Syssoev , Mark A. Stira , John J. Casello
发明人： Allen J. Bartlett , Michael A. Driscoll , Michael J. Eacobacci, Jr. , William L. Johnson , Robert P. Sullivan , Sergei Syssoev , Mark A. Stira , John J. Casello
IPC分类号： F04B37/08 , B01D8/00
摘要： A cryopump includes a refrigerator with at least first and second stages. A radiation shield surrounds the second stage and is in thermal contact with the first stage. The radiation shield includes a drain hole to permit cryogenic fluid to traverse through the drain hole during regeneration. The cryopump also includes a primary pumping surface supporting adsorbent in thermal contact with the second stage. The second stage array assembly includes a primary condensing surface, protected surfaces having adsorbent, and non-primary condensing surfaces. A baffle is disposed over the drain hole. The baffle redirects gas from an annular space disposed between the radiation shield and the vacuum vessel that attempts to traverse through the drain hole to prevent the gas from condensing on a non-primary condensing surface. The baffle directs gas to condense on the primary condensing surface.

5. 发明申请

US20130312431A1 Cryopump 有权
标题翻译：冷冻者
公开(公告)号：US20130312431A1
公开(公告)日：2013-11-28
申请号：US13983973
申请日：2012-02-08
申请人： Sergei Syssoev , Allen J. Bartlett , John J. Casello , Jeffrey A. Wells , JR. Michael J. Eacobacci
发明人： Sergei Syssoev , Allen J. Bartlett , John J. Casello , Jeffrey A. Wells , JR. Michael J. Eacobacci
IPC分类号： B01D8/00 , F04B37/08
CPC分类号： F04B37/08 , B01D8/00 , Y10T29/49236
摘要： A cryopump has a simple-to-manufacture frontal baffle plate with improved gas distribution and has a large-area second-stage array plate to capture Type II gases. The cryopump has a first-stage frontal baffle plate having orifices and flaps bent from and attached to the orifices. The cryopump has a second-stage top plate that is larger in area than cooling baffles of the second stage array.
摘要翻译：低温泵具有易于制造的前挡板，具有改进的气体分布，并且具有大面积的第二级阵列板以捕获II型气体。低温泵具有第一级前挡板，其具有从孔口弯曲并连接到孔口的孔口和翼片。低温泵具有比第二级阵列的冷却挡板更大的面积的第二级顶板。

6. 发明授权

US08082741B2 Integral facet cryopump, water vapor pump, or high vacuum pump 有权
标题翻译：积分小面积低温泵，水蒸气泵或高真空泵
公开(公告)号：US08082741B2
公开(公告)日：2011-12-27
申请号：US11803420
申请日：2007-05-15
申请人： Allen J. Bartlett , Joseph A. Kraus , Michael J. Eacobacci, Jr.
发明人： Allen J. Bartlett , Joseph A. Kraus , Michael J. Eacobacci, Jr.
IPC分类号： F17C13/00
CPC分类号： H01L21/67173 , H01L21/6719
摘要： A cluster tool has a transfer chamber, and a load lock chamber. An adaptor is configured to be coupled between the transfer chamber and the load lock chamber. The adaptor has an adaptor housing with an interior space including an entrance with a first valve and an exit with a second valve. The adaptor housing forms a substrate path through the interior space. The first valve connects the interior space and the load lock chamber. The second valve connects the interior space and the transfer chamber. A cryogenic surface is associated with the adaptor. Other pumps can be associated with the adaptor, such as, for example, a turbo pump, or water vapor pump. The cryogenic surface is configured to selectively evacuate the interior space. A wafer is adapted to be moved through the first valve and through the adaptor housing along the path. The wafer is moved through the exit and into the transfer chamber once the second valve is opened. This adaptor can be applied to the process chamber as well as the load lock.
摘要翻译：集群工具具有传送室和负载锁定室。适配器被配置为联接在传送室和装载锁定室之间。适配器具有适配器壳体，其具有包括具有第一阀的入口和具有第二阀的出口的内部空间。适配器外壳形成通过内部空间的基板路径。第一个阀连接内部空间和负载锁定室。第二个阀连接内部空间和传送室。低温表面与适配器相关联。其他泵可以与适配器相关联，例如涡轮泵或水蒸气泵。低温表面构造成有选择地排空内部空间。晶片适于沿着路径移动通过第一阀并通过适配器壳体。一旦第二个阀打开，晶片就会通过出口移动到传送室中。该适配器可以应用于处理室以及加载锁定。

7. 发明申请

US20080282710A1 Integral facet cryopump, water vapor pump, or high vacuum pump 有权
标题翻译：积分小面积低温泵，水蒸气泵或高真空泵
公开(公告)号：US20080282710A1
公开(公告)日：2008-11-20
申请号：US11803420
申请日：2007-05-15
申请人： Allen J. Bartlett , Joseph A. Kraus , Michael J. Eacobacci, JR.
发明人： Allen J. Bartlett , Joseph A. Kraus , Michael J. Eacobacci, JR.
IPC分类号： F04B37/08
CPC分类号： H01L21/67173 , H01L21/6719
摘要： A cluster tool has a transfer chamber, and a load lock chamber. An adaptor is configured to be coupled between the transfer chamber and the load lock chamber. The adaptor has an adaptor housing with an interior space including an entrance with a first valve and an exit with a second valve. The adaptor housing forms a substrate path through the interior space. The first valve connects the interior space and the load lock chamber. The second valve connects the interior space and the transfer chamber. A cryogenic surface is associated with the adaptor. Other pumps can be associated with the adaptor, such as, for example, a turbo pump, or water vapor pump. The cryogenic surface is configured to selectively evacuate the interior space. A wafer is adapted to be moved through the first valve and through the adaptor housing along the path. The wafer is moved through the exit and into the transfer chamber once the second valve is opened. This adaptor can be applied to the process chamber as well as the load lock.
摘要翻译：集群工具具有传送室和负载锁定室。适配器被配置为联接在传送室和装载锁定室之间。适配器具有适配器壳体，其具有包括具有第一阀的入口和具有第二阀的出口的内部空间。适配器外壳形成通过内部空间的基板路径。第一个阀连接内部空间和负载锁定室。第二个阀连接内部空间和传送室。低温表面与适配器相关联。其他泵可以与适配器相关联，例如涡轮泵或水蒸气泵。低温表面构造成有选择地排空内部空间。晶片适于沿着路径移动通过第一阀并通过适配器壳体。一旦第二个阀打开，晶片就会通过出口移动到传送室中。该适配器可以应用于处理室以及加载锁定。

8. 发明授权

US5906102A Cryopump with gas heated exhaust valve and method of warming surfaces of an exhaust valve 失效
标题翻译：带燃气加热排气阀的冷冻库和排气阀表面加热方法
公开(公告)号：US5906102A
公开(公告)日：1999-05-25
申请号：US631532
申请日：1996-04-12
申请人： Allen J. Bartlett , Michael J. Eacobacci, Jr. , Joseph P. Johnson
发明人： Allen J. Bartlett , Michael J. Eacobacci, Jr. , Joseph P. Johnson
IPC分类号： F04B37/08 , B01D8/00
CPC分类号： F04B37/08
摘要： A cryopump having a cryopump chamber includes a purge gas valve coupled to the cryopump chamber for supplying a first quantity of warm gas to the cryopump chamber in order to purge the cryopump chamber during regeneration. A roughing valve couples the cryopump chamber to a roughing pump enabling the cryopump chamber to be roughed. An exhaust valve is coupled to the cryopump chamber for exhausting gases from the cryopump chamber during purge. A delivery valve is coupled to the exhaust valve for delivering a second quantity of warm gas directly onto surfaces of the exhaust valve for warming the surfaces of the exhaust valve.
摘要翻译：具有低温泵室的低温泵包括连接到低温泵室的吹扫气阀，用于向低温泵室提供第一量的暖气，以便在再生期间吹扫低温泵室。粗抽阀将低温泵室耦合到粗抽泵，使得低温泵室能够被粗糙化。排气阀连接到低温泵室，以在吹扫期间从低温泵室排出气体。输送阀联接到排气阀，用于将第二数量的暖气直接输送到排气门的表面上，以加热排气阀的表面。

9. 发明授权

US5782096A Cryopump with improved shielding 失效
标题翻译：冷冻库具有改进的屏蔽
公开(公告)号：US5782096A
公开(公告)日：1998-07-21
申请号：US795981
申请日：1997-02-05
申请人： Allen J. Bartlett , John J. Casello
发明人： Allen J. Bartlett , John J. Casello
IPC分类号： F04B37/08 , B01D8/00
CPC分类号： F04B37/08 , Y10S417/901
摘要： A cryopump includes a two-stage refrigerator, a primary pumping surface, and a radiation shield. The radiation shield is in thermal contact with the first stage of the refrigerator. The primary pumping surface is surrounded by the radiation shield and is in thermal contact, through a direct conductive link, with the second stage of the refrigerator. The refrigerator, however, is external to the radiation shield.
摘要翻译：低温泵包括两级冰箱，初级泵送表面和辐射屏蔽。辐射屏蔽与冰箱的第一级热接触。初级泵送表面被辐射屏蔽包围，并通过直接导电连接与冰箱的第二级热接触。然而，冰箱在辐射屏蔽外部。

10. 发明申请

US20080168778A1 Pressure burst free high capacity cryopump 审中-公开
标题翻译：无爆破高容量低压泵
公开(公告)号：US20080168778A1
公开(公告)日：2008-07-17
申请号：US12008985
申请日：2008-01-15
申请人： Allen J. Bartlett , Michael A. Driscoll , Michael J. Eacobacci , William L. Johnson , Robert P. Sullivan , Sergei Syssoev , Mark A. Stira , John J. Casello
发明人： Allen J. Bartlett , Michael A. Driscoll , Michael J. Eacobacci , William L. Johnson , Robert P. Sullivan , Sergei Syssoev , Mark A. Stira , John J. Casello
IPC分类号： B01D8/00
摘要： A cryopump includes a refrigerator with at least first and second stages. A radiation shield surrounds the second stage and is in thermal contact with the first stage. The radiation shield includes a drain hole to permit cryogenic fluid to traverse through the drain hole during regeneration. The cryopump also includes a primary pumping surface supporting adsorbent in thermal contact with the second stage. The second stage array assembly includes a primary condensing surface, protected surfaces having adsorbent, and non-primary condensing surfaces. A baffle is disposed over the drain hole. The baffle redirects gas from an annular space disposed between the radiation shield and the vacuum vessel that attempts to traverse through the drain hole to prevent the gas from condensing on a non-primary condensing surface. The baffle directs gas to condense on the primary condensing surface.
摘要翻译：低温泵包括至少具有第一和第二阶段的冰箱。辐射屏蔽围绕第二级并与第一级热接触。辐射屏蔽包括排水孔，以允许低温流体在再生期间穿过排水孔。低温泵还包括支撑与第二级热接触的吸附剂的初级泵送表面。第二级阵列组件包括主冷凝表面，具有吸附剂的保护表面和非初级冷凝表面。挡板设置在排水孔的上方。挡板将气体从设置在辐射屏蔽和真空容器之间的环形空间重新引导，试图穿过排水孔，以防止气体在非主冷凝表面上冷凝。挡板引导气体冷凝在主冷凝表面上。

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