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    • 1. 发明授权
    • Infrared multilayer film thickness measuring method and apparatus
    • 红外多层膜厚度测量方法和装置
    • US4243882A
    • 1981-01-06
    • US16754
    • 1979-03-02
    • Akitaka YasujimaNaoyuki ShiratoriShingo Ishikawa
    • Akitaka YasujimaNaoyuki ShiratoriShingo Ishikawa
    • G01B11/06G01N21/31G01J1/00
    • G01B11/0625G01B11/0633G01N21/314
    • A method and an apparatus for measuring the thicknesses of film layers of different synthetic resins forming a composite multilayer film or sheet by utilizing infrared rays. Infrared rays of sample wavelengths, each equal to the infrared absorption wavelength of each film layer, and at least one reference wavelength different from the infrared absorption wavelength of each film layer are projected onto the multilayer film to be measured. Ratios are obtained between the amounts of infrared lights of the sample and reference wavelengths transmitted through the multilayer film. An operation is achieved for solving a simultaneous equation including the ratios and the infrared absorption coefficients of the film layers at the sample and reference wavelengths as coefficients and the thicknesses of the film layers as unknowns, thereby obtaining the thicknesses of the film layers.
    • 一种用于通过利用红外线测量形成复合多层膜或片的不同合成树脂的膜层的厚度的方法和装置。 每个等于每个膜层的红外吸收波长的样品波长的红外线和与每个膜层的红外吸收波长不同的至少一个参考波长投射到要测量的多层膜上。 在样品的红外光量和通过多层膜透射的参考波长的量之间获得比率。 实现了用于解决包括样品和参考波长处的膜层的比率和红外吸收系数的共同方程的操作,作为未知值的膜层的系数和厚度,从而获得膜层的厚度。