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    • 3. 发明授权
    • Probing device and system for testing an integrated circuit
    • 用于测试集成电路的探测装置和系统
    • US5331275A
    • 1994-07-19
    • US987959
    • 1992-12-09
    • Kazuyuki OzakiShinichi WakanaYoshiro GotoAkio ItoKazuo OkuboSoichi HamaAkira FujiiYoko Sato
    • Kazuyuki OzakiShinichi WakanaYoshiro GotoAkio ItoKazuo OkuboSoichi HamaAkira FujiiYoko Sato
    • G01R1/067G01R31/26G01R1/073G01R31/02
    • G01Q20/04B82Y35/00G01Q60/30G01R1/067G01R1/06705G01R1/06711G01R1/06727Y10S977/852
    • A probing device includes a minute probe in which at least an end portion is formed by conductive material, a cantilever having one end to which the probe is attached, and another end fixed to a moving member movable relatively to a sample in each direction of X, Y and Z, a unit for moving the moving member relatively to the sample, a transducing unit for generating information of voltage or current by means of light, a connecting unit having a low electric resistance, for connecting the transducing unit and the end portion of the probe, a detecting unit for detecting a change in a physical amount occurring in the cantilever by a force caused between the probe and the sample by a relative proximity of the moving member to the sample, and a voltage measuring unit for measuring a voltage at a measurement point on the sample, which is determined based on an output of the detecting unit, by way of the transducing unit when the probe is contacted with the measurement point. By the constitution, it is possible to realize a voltage measurement with both an enhanced space resolution and an enhanced time resolution. Also, by using the probing device in an integrated circuit testing apparatus or system, it is possible to realize a stable probing to a minute wiring without increasing an electrical load with respect to the minute wiring and thus contribute to an improvement in the precision of a voltage measurement.
    • 探测装置包括微小探针,其中至少一个端部由导电材料形成,悬臂具有一个连接有探针的端部,另一端固定在可沿着X方向移动相对于样品的移动部件 ,Y和Z,用于相对于样品移动移动部件的单元,用于通过光产生电压或电流的信息的转换单元,具有低电阻的连接单元,用于连接换能单元和端部 的检测单元,用于通过所述移动构件与所述样本的相对接近来检测由所述探针和所述样本之间产生的力而在所述悬臂中产生的物理量的变化的检测单元,以及用于测量所述电极的电压的电压测量单元 在探针与测量点接触时,通过换能单元,基于检测单元的输出确定样本上的测量点。 通过该结构,可以实现具有增强的空间分辨率和增强的时间分辨率的电压测量。 此外,通过在集成电路检测装置或系统中使用探测装置,可以在不增加相对于微小布线的电负载的情况下实现对微小布线的稳定探测,并且因此有助于提高 电压测量。
    • 4. 发明授权
    • Electrooptic voltage waveform measuring method and apparatus
    • 电光电压波形测量装置,具有电光效应的电光元件
    • US6057677A
    • 2000-05-02
    • US844995
    • 1997-04-23
    • Shin-ichi WakanaAkinori MiyamotoSoichi HamaKazuyuki OzakiToshiaki Nagai
    • Shin-ichi WakanaAkinori MiyamotoSoichi HamaKazuyuki OzakiToshiaki Nagai
    • G01R13/34G01R31/308
    • G01R31/308G01R13/347
    • An electrooptic voltage waveform measuring apparatus, which includes an electrooptic element having an electrooptic effect; a first electrode mounted on the electrooptic element and electrically coupled to an object to be measured; and a first light source irradiating a light on the electrooptic element. The electrooptic voltage waveform measuring apparatus further includes a polarization analyzer for analyzing a polarization state of the light passed through the electrooptic element and detecting a voltage waveform of the object; a second electrode mounted on the electrooptic element and separated from the first electrode; and an amplifier having an input terminal coupled to the second electrode and outputting a low-frequency component of the voltage waveform of the object. The electrooptic voltage waveform measuring apparatus further includes a voltage waveform combining processor obtaining a measured voltage waveform of the object by combining a high-frequency component of the voltage waveform of the object obtained from an output of the polarization analyzer and the low-frequency component of the voltage waveform of the object output from the amplifier.
    • 一种电光电压波形测量装置,其包括具有电光效应的电光元件; 安装在电光元件上并电耦合到待测量物体的第一电极; 以及将光照射在电光元件上的第一光源。 电波电压波形测量装置还包括:偏振分析器,用于分析通过电光元件的光的偏振态,并检测物体的电压波形; 安装在电光元件上并与第一电极分离的第二电极; 以及放大器,其具有耦合到所述第二电极的输入端子并输出所述对象的电压波形的低频分量。 电波电压波形测量装置还包括电压波形组合处理器,通过将从偏振分析器的输出获得的对象的电压波形的高频分量与低频分量的低频分量相组合,获得对象的测量电压波形 从放大器输出的物体的电压波形。
    • 5. 发明授权
    • Electrooptic voltage waveform measuring method employing light sampling technique using Pockels effect
    • 电波电压波形测量方法采用光采样技术,采用Pockels效应
    • US06259244B1
    • 2001-07-10
    • US09487897
    • 2000-01-19
    • Shin-ichi WakanaAkinori MiyamotoSoichi HamaKazuyuki OzakiToshiaki Nagai
    • Shin-ichi WakanaAkinori MiyamotoSoichi HamaKazuyuki OzakiToshiaki Nagai
    • G01R31308
    • G01R31/308G01R13/347
    • An electrooptic voltage waveform measuring apparatus, which includes an electrooptic element having an electrooptic effect; a first electrode mounted on the electrooptic element and electrically coupled to an object to be measured; and a first light source irradiating a light on the electrooptic element. The electrooptic voltage waveform measuring apparatus further includes a polarization analyzer for analyzing a polarization state of the light passed through the electrooptic element and detecting a voltage waveform of the object; a second electrode mounted on the electrooptic element and separated from the first electrode; and an amplifier having an input terminal coupled to the second electrode and outputting a low-frequency component of the voltage waveform of the object. The electrooptic voltage waveform measuring apparatus further includes a voltage waveform combining processor obtaining a measured voltage waveform of the object by combining a high-frequency component of the voltage waveform of the object obtained from an output of the polarization analyzer and the low-frequency component of the voltage waveform of the object output from the amplifier.
    • 一种电光电压波形测量装置,其包括具有电光效应的电光元件; 安装在电光元件上并电耦合到待测量物体的第一电极; 以及将光照射在电光元件上的第一光源。 电波电压波形测量装置还包括:偏振分析器,用于分析通过电光元件的光的偏振态,并检测物体的电压波形; 安装在电光元件上并与第一电极分离的第二电极; 以及放大器,其具有耦合到所述第二电极的输入端子并输出所述对象的电压波形的低频分量。 电波电压波形测量装置还包括电压波形组合处理器,通过将从偏振分析器的输出获得的对象的电压波形的高频分量与低频分量的低频分量相组合,获得对象的测量电压波形 从放大器输出的物体的电压波形。
    • 6. 发明授权
    • Ultrasonic length measuring apparatus and method for coordinate input
    • 超声波测长仪和坐标输入法
    • US06944557B2
    • 2005-09-13
    • US10354196
    • 2003-01-30
    • Soichi HamaHidenori SekiguchiAkira Fujii
    • Soichi HamaHidenori SekiguchiAkira Fujii
    • G01S15/08G06F3/0354G06F3/043G08C21/00
    • G06F3/0433G06F3/03545
    • An ultrasonic length measuring apparatus measures the number of times a waveform of an ultrasonic wave signal crosses a threshold value, detects the crossing timing at, for example, a waveform having a maximal amplitude after a predetermined number of times counting from a first crossing point, measures the time period from the transmission start of the ultrasonic wave by the transmission unit to the detected crossing timing and calculates the length based on the time measured. A coordinate inputting apparatus includes a pen for transmitting an ultrasonic wave and a coordinate inputting apparatus for inputting coordinate positions of the pen based on a propagation time of the ultrasonic wave transmitted by the pen and received by a plurality of ultrasonic wave receivers. The receiver includes at least a pair of ultrasonic receivers for receiving the ultrasonic wave transmitted by the pen.
    • 超声波长度测量装置测量超声波信号的波形与阈值相交的次数,检测例如在从第一交叉点计数预定次数之后具有最大振幅的波形的交叉定时, 测量由发送单元从超声波的发送开始到检测到的交叉定时的时间段,并基于测量的时间计算长度。 坐标输入装置包括用于发送超声波的笔和用于根据由笔发送的超声波的传播时间输入笔的坐标位置的坐标输入装置,并由多个超声波接收器接收。 接收器包括至少一对用于接收由笔传输的超声波的超声波接收器。