专利快速检索-快速检索全球专利，免费商用专利数据库-IPRDB

1. 发明授权

US07369004B2 Microelectromechanical oscillator and method of operating same 有权
标题翻译：微机电振荡器及其操作方法
公开(公告)号：US07369004B2
公开(公告)日：2008-05-06
申请号：US11493704
申请日：2006-07-26
申请人： Aaron Partridge , Bernhard E. Boser , Crist Y. Lu , Markus Lutz , Paul Merritt Hagelin
发明人： Aaron Partridge , Bernhard E. Boser , Crist Y. Lu , Markus Lutz , Paul Merritt Hagelin
IPC分类号： H03B5/30 , H03B5/40
CPC分类号： H03L1/022 , G01K7/32 , H03B5/04 , H03B5/30 , H03H9/02448 , H03H9/2405 , H03H2009/02527
摘要： There are many inventions described and illustrated herein. In one aspect, the present inventions relate to a temperature measurement system comprising (1) a first microelectromechanical resonator to generate a first output signal having a frequency that varies with operating temperature, wherein the first microelectromechanical resonator includes a frequency function of temperature; (2) a second microelectromechanical resonator to generate a second output signal having a frequency that varies with operating temperature, wherein the second microelectromechanical resonator includes a frequency function of temperature; and (3) frequency division circuitry, coupled to the first and second microelectromechanical resonators, to determine data which is representative of the operating temperature of the first and/or second microelectromechanical resonator using (i) data which is representative of the frequency of the first output signal and (ii) data which is representative of the frequency of the second output signal. The frequency division circuitry may include circuitry to divide the frequency of the first output signal by the frequency of the second output signal (whether in digital or analog domain).
摘要翻译：这里描述和说明了许多发明。一方面，本发明涉及一种温度测量系统，包括：（1）第一微机电谐振器，用于产生具有随工作温度变化的频率的第一输出信号，其中第一微机电谐振器包括温度的频率函数; （2）第二微机电谐振器，以产生具有随着工作温度变化的频率的第二输出信号，其中所述第二微机电谐振器包括温度的频率函数; 以及（3）耦合到第一和第二微机电谐振器的分频电路，以使用（i）表示第一和/或第二微机电谐振器的频率的数据来确定代表第一和/或第二微机电谐振器的工作温度的数据输出信号和（ii）表示第二输出信号的频率的数据。分频电路可以包括将第一输出信号的频率除以第二输出信号的频率（无论是在数字还是模拟域）的电路。

2. 发明申请

US20070290764A1 Microelectromechanical Oscillator and method of operating same 有权
标题翻译：微机电振荡器及其操作方法
公开(公告)号：US20070290764A1
公开(公告)日：2007-12-20
申请号：US11493704
申请日：2006-07-26
申请人： Aaron Partridge , Bernhard E. Boser , Crist Y. Lu , Markus Lutz , Paul Merritt Hagelin
发明人： Aaron Partridge , Bernhard E. Boser , Crist Y. Lu , Markus Lutz , Paul Merritt Hagelin
IPC分类号： H03L1/00 , H03B5/30
CPC分类号： H03L1/022 , G01K7/32 , H03B5/04 , H03B5/30 , H03H9/02448 , H03H9/2405 , H03H2009/02527
摘要： There are many inventions described and illustrated herein. In one aspect, the present inventions relate to a temperature measurement system comprising (1) a first microelectromechanical resonator to generate a first output signal having a frequency that varies with operating temperature, wherein the first microelectromechanical resonator includes a frequency function of temperature; (2) a second microelectromechanical resonator to generate a second output signal having a frequency that varies with operating temperature, wherein the second microelectromechanical resonator includes a frequency function of temperature; and (3) frequency division circuitry, coupled to the first and second microelectromechanical resonators, to determine data which is representative of the operating temperature of the first and/or second microelectromechanical resonator using (i) data which is representative of the frequency of the first output signal and (ii) data which is representative of the frequency of the second output signal. The frequency division circuitry may include circuitry to divide the frequency of the first output signal by the frequency of the second output signal (whether in digital or analog domain).
摘要翻译：这里描述和说明了许多发明。一方面，本发明涉及一种温度测量系统，包括：（1）第一微机电谐振器，用于产生具有随工作温度变化的频率的第一输出信号，其中第一微机电谐振器包括温度的频率函数; （2）第二微机电谐振器，以产生具有随着工作温度变化的频率的第二输出信号，其中所述第二微机电谐振器包括温度的频率函数; 以及（3）耦合到第一和第二微机电谐振器的分频电路，以使用（i）表示第一和/或第二微机电谐振器的频率的数据来确定代表第一和/或第二微机电谐振器的工作温度的数据输出信号和（ii）表示第二输出信号的频率的数据。分频电路可以包括将第一输出信号的频率除以第二输出信号的频率（无论是在数字还是模拟域）的电路。

3. 发明申请

US20080290494A1 Backside release and/or encapsulation of microelectromechanical structures and method of manufacturing same 审中-公开
标题翻译：微机电结构的背面释放和/或封装及其制造方法
公开(公告)号：US20080290494A1
公开(公告)日：2008-11-27
申请号：US11804912
申请日：2007-05-21
申请人： Markus Lutz , Aaron Partridge , Paul Merritt Hagelin
发明人： Markus Lutz , Aaron Partridge , Paul Merritt Hagelin
IPC分类号： H01L23/12 , H01L21/64
CPC分类号： B81B7/0041 , B81B3/0005 , B81B2201/0235 , B81C1/00476 , B81C1/0096 , B81C2203/0145
摘要： There are many inventions described and illustrated herein. In one aspect, the present inventions relate to devices, systems and/or methods of encapsulating and fabricating electromechanical structures or elements, for example, accelerometer, gyroscope or other transducer (for example, pressure sensor, strain sensor, tactile sensor, magnetic sensor and/or temperature sensor), filter or resonator. The fabricating or manufacturing microelectromechanical systems of the present invention, and the systems manufactured thereby, employ backside substrate release and/or seal or encapsulation techniques.
摘要翻译：这里描述和说明了许多发明。一方面，本发明涉及包封和制造机电结构或元件的装置，系统和/或方法，例如加速度计，陀螺仪或其他换能器（例如，压力传感器，应变传感器，触觉传感器，磁传感器和 /或温度传感器），滤波器或谐振器。本发明的制造或制造微机电系统及其制造的系统采用背面基板释放和/或密封或封装技术。

4. 发明授权

US08667665B2 Method of manufacturing a microelectromechanical system (MEMS) resonator 有权
标题翻译：制造微机电系统（MEMS）谐振器的方法
公开(公告)号：US08667665B2
公开(公告)日：2014-03-11
申请号：US13562684
申请日：2012-07-31
申请人： Paul Merritt Hagelin , Charles Grosjean
发明人： Paul Merritt Hagelin , Charles Grosjean
IPC分类号： H04R31/00
CPC分类号： H03H9/02448 , H01L41/22 , H01L41/253 , H02N1/00 , H03B5/30 , H03B5/32 , H03H3/0072 , H03H3/0073 , H03H3/0076 , H03H9/02244 , H03H9/02433 , H03H9/125 , H03H9/21 , H03H9/2405 , H03H9/2468 , H03H9/2484 , H03H2009/02251 , H03H2009/02283 , H03H2009/02291 , H03H2009/02299 , H03H2009/02322 , H03H2009/0233 , H03H2009/02496 , H03H2009/155 , Y10T29/42 , Y10T29/49002 , Y10T29/49005 , Y10T29/4902 , Y10T29/4908
摘要： One embodiment of the present inventions sets forth a method for decreasing a temperature coefficient of frequency (TCF) of a MEMS resonator. The method comprises lithographically defining slots in the MEMS resonator beams and filling the slots with a compensating material (for example, an oxide) wherein the temperature coefficient of Young's Modulus (TCE) of the compensating material has a sign opposite to a TCE of the material of the resonating element.
摘要翻译：本发明的一个实施例提出了降低MEMS谐振器的频率（TCF）的温度系数的方法。该方法包括光刻地限定MEMS谐振器光束中的狭缝并用补偿材料（例如，氧化物）填充槽，其中补偿材料的杨氏模量（TCE）的温度系数具有与材料的TCE相反的符号的谐振元件。

5. 发明授权

US06598985B2 Optical mirror system with multi-axis rotational control 失效
公开(公告)号：US06598985B2
公开(公告)日：2003-07-29
申请号：US10122885
申请日：2002-04-15
申请人： Paul Merritt Hagelin , John J. Fling
发明人： Paul Merritt Hagelin , John J. Fling
IPC分类号： G02B7182
CPC分类号： G02B26/0841
摘要： An optical mirror system with multi-axis rotational control is disclosed. The mirror system includes an optical surface assembly, and at least one leg assembly coupled to the optical surface assembly. The at least one leg assembly supports the optical surface above a substrate. A system and method in accordance with the present invention can operate with many different actuator mechanisms, including but not limited to, electrostatic, thermal, piezoelectric, and magnetic. An optical mirror system in accordance with the present invention accommodates large mirrors and rotation angles. Scanning mirrors can be made with this technique using standard surface-micromachining processes, or a deep RIE etch process. A device in accordance with the present invention meets the requirements for a directly scalable, high port count optical switch, utilizing a two mirror per optical I/O port configuration. An optical mirror in accordance with the present invention can be utilized in, but is not limited to, the following applications: optical add-drop multiplexers, wavelength routers, free-space optical interconnects, chip-level optical I/O, optical scanning displays, optical scanner (bar-codes, micro cameras), optical storage read/write heads, laser printers, medical replacement for glasses (incorporated with adaptive optics), medical diagnostic equipment, optical scanning for security applications.

6. 发明授权

US06430330B1 Modular approach to substrate population in a fiber optic cross connect 失效
标题翻译：光纤交叉连接中基质群的模块化方法
公开(公告)号：US06430330B1
公开(公告)日：2002-08-06
申请号：US09549799
申请日：2000-04-14
申请人： Paul Merritt Hagelin
发明人： Paul Merritt Hagelin
IPC分类号： G02B626
CPC分类号： G02B6/3512 , G02B6/3556 , G02B6/356 , G02B6/3582 , H04Q11/0003 , H04Q2011/0024 , H04Q2011/0026
摘要： The present invention provides a fiber optic cross connect (OXC) package which utilizes a modular approach to substrate population. The OXC includes a slab, where the slab comprises a first surface and a second surface, and a micromirror array coupled to the second surface of the slab, where the micromirror array comprises a plurality of clusters, where each of the plurality of clusters includes at least one micromirror of the micromirror array. In the preferred embodiment, the slab is a substrate. Chips containing micromirrors are fabricated in clusters so that groups of micromirrors can be separately placed onto the substrate. This provides flexibility in how the substrate is populated. In the preferred embodiment, the clusters are in the form of strips. Only strips with known good micromirrors are placed onto the substrate, thus improving the device yield. Also, if any of the micromirrors become damaged after placement, its chip may be replaced without disturbing the other chips. Using a substrate through which light may travel in combination with a modular approach to substrate population allows for a single substrate switch with a higher device yield and scalability. Integrated circuits may be placed on the same substrate as the micromirrors, and the complexity of the assembly process is reduced.
摘要翻译：本发明提供一种光纤交叉连接（OXC）封装，其利用对基板群的模块化方法。 OXC包括板坯，其中板坯包括第一表面和第二表面，以及耦合到板的第二表面的微镜阵列，其中微镜阵列包括多个簇，其中多个簇中的每一个包括在至少一个微镜阵列的微镜。在优选实施例中，板坯是基板。包含微反射镜的芯片以簇形成，使得可以将一组微镜分离地放置在基底上。这提供了如何填充衬底的灵活性。在优选实施例中，簇是条带的形式。只有具有已知的良好微镜的条带放置在基板上，从而提高了器件的产量。此外，如果任何一个微镜在放置之后变得损坏，则其芯片可以被更换而不会干扰其他芯片。使用光可以与基板群体的模块化方法一起行进的基板允许具有更高的器件产量和可扩展性的单个衬底开关。集成电路可以放置在与微反射镜相同的衬底上，并且组装过程的复杂性降低。

7. 发明授权

US07545239B2 Serrated MEMS resonators 有权
标题翻译：锯齿型MEMS谐振器
公开(公告)号：US07545239B2
公开(公告)日：2009-06-09
申请号：US11613910
申请日：2006-12-20
申请人： Paul Merritt Hagelin , David Raymond Pedersen
发明人： Paul Merritt Hagelin , David Raymond Pedersen
IPC分类号： H03H9/125 , H03H9/24 , H03B5/30 , H03H9/46
CPC分类号： H03H9/02259 , H03H9/02244 , H03H9/02433 , H03H9/2405 , H03H9/2484 , H03H2009/0248 , H03H2009/02496
摘要： One embodiment of the present invention sets forth a serrated tooth actuator for driving MEMS resonator structures. The actuator includes a fixed drive electrode having a serrated tooth surface opposing a MEMS resonator arm also having a serrated tooth surface, where the MEMS resonator arm is configured to rotate towards the drive electrode when an AC signal is applied to the drive electrode. Such a configuration permits higher amplitude signals to be applied to the drive electrode without the performance of the actuator being compromised by nonlinear effects. In addition, the serrated tooth configuration enables a sufficiently high actuating force to be maintained even though the distance traversed by the MEMS resonator arm during operation is quite small. Further, the serrated configuration allows a MEMS resonator system to withstand larger fluctuations in voltage and larger substrate stresses without experiencing a substantial shift in resonant frequency.
摘要翻译：本发明的一个实施例提出了用于驱动MEMS谐振器结构的锯齿状致动器。致动器包括固定的驱动电极，其具有与具有锯齿状齿表面的MEMS谐振器臂相对的锯齿状齿表面，其中，当将CCP信号施加到驱动电极时，MEMS谐振臂被配置为朝向驱动电极旋转。这种配置允许将更高幅度的信号施加到驱动电极，而不会使致动器的性能受到非线性效应的影响。此外，即使在操作期间由MEMS谐振器臂穿过的距离相当小，锯齿形齿构造也能够保持足够高的致动力。此外，锯齿形配置允许MEMS谐振器系统承受较大的电压波动和较大的衬底应力，而不会发生谐振频率的实质性偏移。

8. 发明申请

US20080116534A1 Substrate contact for a MEMS device 审中-公开
标题翻译： MEMS器件的基板接触
公开(公告)号：US20080116534A1
公开(公告)日：2008-05-22
申请号：US11941053
申请日：2007-11-15
申请人： Charles Grosjean , Paul Merritt Hagelin , Nicholas Ian Buchan
发明人： Charles Grosjean , Paul Merritt Hagelin , Nicholas Ian Buchan
IPC分类号： H01L29/84
CPC分类号： B81C1/00301 , B81B2207/092
摘要： One embodiment of the present invention sets forth a substrate contact for a MEMS device die, where the substrate contact is formed through an electrically insulative layer in the device die that is positioned between a handle wafer layer and a MEMS device layer formed on the handle wafer layer. The substrate contact serves as a path to ground for the MEMS handle wafer layer and is formed during the fabrication process of the MEMS device. One advantage of the disclosed invention is that a robust, low-impedance path to ground is provided for the MEMS handle wafer layer, with minimal impact on the process of fabricating a MEMS device.
摘要翻译：本发明的一个实施例提出了用于MEMS器件裸片的衬底接触，其中衬底接触通过器件管芯中的电绝缘层形成，该电绝缘层位于处理晶片层和形成在处理晶片上的MEMS器件层之间层。衬底接触件用作MEMS处理晶片层的接地路径，并且在MEMS器件的制造过程期间形成。所公开的发明的一个优点是为MEMS处理晶片层提供了坚固的，低阻抗的接地路径，对制造MEMS器件的过程的影响最小。

9. 发明授权

US06347167B1 Fiber optic cross connect with uniform redirection length and folding of light beams 失效
标题翻译：光纤交叉连接具有均匀的重定向长度和折射光束
公开(公告)号：US06347167B1
公开(公告)日：2002-02-12
申请号：US09549388
申请日：2000-04-14
申请人： Paul Merritt Hagelin
发明人： Paul Merritt Hagelin
IPC分类号： G02B626
CPC分类号： H04Q11/0005 , H04Q2011/0024 , H04Q2011/0026 , H04Q2011/0039 , H04Q2011/0049 , H04Q2011/0058
摘要： The present invention provides a method and an optical cross connect (OXC) package which minimizes optical loss and crosstalk while also reducing the size of the package. The method includes directing a light beam from a first collimator of a plurality of collimators to a first micromirror of a plurality of micromirrors; folding the light beam from the first micromirror onto a second micromirror of the plurality of micromirrors; and directing the light beam from the second micromirror to a second collimator of the plurality of collimators, wherein a uniform redirection length is provided between each of the plurality of collimators and each of the plurality of micromirror. In the preferred embodiment, the OXC package comprises a first cap with reflecting surfaces and a second cap. With the first cap, only a short distance is used in redirecting the light. This allows for the major portion of the light to be available for scanning. With the second cap, the light beam is folded during the switching operation, resulting in a smaller switch package.
摘要翻译：本发明提供了一种方法和光交叉连接（OXC）封装，其最小化了光损耗和串扰，同时也减小了封装的尺寸。该方法包括将来自多个准直仪的第一准直仪的光束引导到多个微镜的第一微反射镜; 将来自第一微镜的光束折叠到多个微镜的第二微镜上; 以及将来自所述第二微镜的光束引导到所述多个准直器的第二准直器，其中在所述多个准直器和所述多个微反射镜中的每一个之间设置均匀的重定向长度。在优选实施例中，OXC封装包括具有反射表面的第一盖和第二盖。使用第一个帽子，只有很短的距离用于重定向灯。这允许主要部分的光可用于扫描。在第二个盖子的开关操作期间，光束被折叠，导致开关封装更小。

10. 发明申请

US20080150390A1 Serrated MEMS Resonators 审中-公开
标题翻译：锯齿型MEMS谐振器
公开(公告)号：US20080150390A1
公开(公告)日：2008-06-26
申请号：US11929438
申请日：2007-10-30
申请人： Paul Merritt Hagelin , David Raymond Pedersen
发明人： Paul Merritt Hagelin , David Raymond Pedersen
IPC分类号： H02N11/00
CPC分类号： H02N1/008 , H03H9/02275 , H03H9/2468 , H03H2009/02496
摘要： One embodiment of the present invention sets forth a serrated tooth actuator for driving MEMS resonator structures. The actuator includes a fixed drive electrode having a serrated tooth surface opposing a MEMS resonator arm also having a serrated tooth surface, where the MEMS resonator arm is configured to rotate towards the drive electrode when an AC signal is applied to the drive electrode. Such a configuration permits higher amplitude signals to be applied to the drive electrode without the performance of the actuator being compromised by nonlinear effects. In addition, the serrated tooth configuration enables a sufficiently high actuating force to be maintained even though the distance traversed by the MEMS resonator arm during operation is quite small. Further, the serrated configuration allows a MEMS resonator system to withstand larger fluctuations in voltage and larger substrate stresses without experiencing a substantial shift in resonant frequency.
摘要翻译：本发明的一个实施例提出了用于驱动MEMS谐振器结构的锯齿状致动器。致动器包括固定的驱动电极，其具有与具有锯齿状齿表面的MEMS谐振器臂相对的锯齿状齿表面，其中，当将CCP信号施加到驱动电极时，MEMS谐振臂被配置为朝向驱动电极旋转。这种配置允许将更高幅度的信号施加到驱动电极，而不会使致动器的性能受到非线性效应的影响。此外，即使在操作期间由MEMS谐振器臂穿过的距离相当小，锯齿形齿构造也能够保持足够高的致动力。此外，锯齿形配置允许MEMS谐振器系统承受较大的电压波动和较大的衬底应力，而不会发生谐振频率的实质性偏移。

你已经成功收藏专利！

检索式保存成功!

IPRDB

热门服务

关于我们

友情链接

联系方式