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    • 2. 发明授权
    • Thin film transistor array panel for display and manufacturing method thereof
    • 薄膜晶体管阵列面板及其制造方法
    • US07659130B2
    • 2010-02-09
    • US11486274
    • 2006-07-12
    • Young-Joon RheeJong-Soo Yoon
    • Young-Joon RheeJong-Soo Yoon
    • H01L21/00
    • H01L27/1288G02F1/136227G02F2001/136222H01L27/1214H01L27/1248H01L27/1255H01L29/78669
    • A gate conductor including a gate line, a gate pad and a gate electrode is formed on a substrate. A gate insulating layer, a semiconductor layer, a doped amorphous silicon layer and a conductive layer are deposited in sequence, and then a photoresist film pattern is formed thereon. The photoresist film pattern includes a first portion positioned between the to be formed source electrode and drain electrode, a second portion thicker than the first portion, and the third portion with no photoresist. A data conductor including a data line, a data pad, a source electrode, a drain electrode and a conductor pattern for a storage capacitor, an ohmic contact layer pattern and a semiconductor pattern are formed by etching the conductive layer, the doped amorphous silicon layer and the semiconductor layer using the photoresist film pattern. A plurality of color filters of red, green and blue having apertures exposing part of the drain electrode are formed thereon. A passivation layer made of acryl-based organic material having excellent planarization characteristic is formed thereon. A pixel electrode, an auxiliary gate pad and an auxiliary data pad connected to the drain electrode, the gate pad and the data pad via contact holes, respectively, are formed on the passivation layer. The contact hole exposing the drain electrode is located within the aperture.
    • 在基板上形成包括栅极线,栅极焊盘和栅电极的栅极导体。 依次沉积栅绝缘层,半导体层,掺杂非晶硅层和导电层,然后在其上形成光刻胶膜图案。 光致抗蚀剂膜图案包括位于待形成的源电极和漏电极之间的第一部分,比第一部分厚的第二部分,以及没有光致抗蚀剂的第三部分。 通过蚀刻导电层,形成包括数据线,数据焊盘,源电极,漏电极和用于存储电容器的导体图案,欧姆接触层图案和半导体图案的数据导体,掺杂非晶硅层 以及使用光致抗蚀剂膜图案的半导体层。 在其上形成多个具有暴露部分漏电极的孔的红色,绿色和蓝色的滤色器。 在其上形成由具有优异的平坦化特性的丙烯酸类有机材料制成的钝化层。 在钝化层上分别形成有像素电极,辅助栅极焊盘和辅助数据焊盘,其分别通过接触孔连接到漏电极,栅极焊盘和数据焊盘。 露出漏电极的接触孔位于孔内。