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    • 3. 发明申请
    • CONTACT STRUCTURE OF A WIRES AND METHOD MANUFACTURING THE SAME, AND THIN FILM TRANSISTOR SUBSTRATE INCLUDING THE CONTACT STRUCTURE AND METHOD MANUFACTURING THE SAME
    • 一种线的接触结构及其制造方法,以及包括接触结构的薄膜晶体管基板及其制造方法
    • US20080090404A1
    • 2008-04-17
    • US11947204
    • 2007-11-29
    • Seung-Taek LimMun-Pyo HongNam-Seok RohYoung-Joo SongSang-Ki KwakKwon-Young ChoiKeun-kyu Song
    • Seung-Taek LimMun-Pyo HongNam-Seok RohYoung-Joo SongSang-Ki KwakKwon-Young ChoiKeun-kyu Song
    • H01L21/4763
    • G02F1/13458G02F1/136227G02F1/136286G02F2001/13629H01L21/76805H01L21/76816H01L23/53223H01L27/124H01L2924/0002H01L2924/00
    • In a method of fabricating a thin film transistor array substrate for a liquid crystal display, a gate line assembly is formed on a substrate with a chrome-based under-layer and an aluminum alloy-based over-layer while proceeding in the horizontal direction. The gate line assembly has gate lines, and gate electrodes, and gate pads. A gate insulating layer is deposited onto the insulating substrate such that the gate insulating layer covers the gate line assembly. A semiconductor layer and an ohmic contact layer are sequentially formed on the gate insulating layer. A data line assembly is formed on the ohmic contact layer with a chrome-based under-layer and an aluminum alloy-based over-layer. The data line assembly has data lines crossing over the gate lines, source electrodes, drain electrodes, and data pads. A protective layer is deposited onto the substrate, and patterned to thereby form contact holes exposing the drain electrodes, the gate pads, and the data pads. The sidewall of the under-layers for the gate line assembly and the data line assembly is exposed through the contact holes. An IZO-based layer is deposited onto the substrate, and patterned to thereby form pixel electrodes, subsidiary gate pads, and subsidiary data pads. The pixel electrodes are connected to the sidewall of the drain electrodes, and the subsidiary gate and data pads are connected to the sidewall of the gate and the data pads.
    • 在制造用于液晶显示器的薄膜晶体管阵列基板的方法中,栅极线组件在沿水平方向前进的基底上形成有铬基底层和基于铝合金的超层。 栅极线组件具有栅极线,栅电极和栅极焊盘。 栅极绝缘层沉积在绝缘基板上,使得栅极绝缘层覆盖栅极线组件。 在栅极绝缘层上依次形成半导体层和欧姆接触层。 数据线组件在欧姆接触层上形成有铬基底层和基于铝合金的超层。 数据线组件具有跨越栅极线,源电极,漏电极和数据焊盘的数据线。 保护层沉积到衬底上,并被图案化,从而形成露出漏电极,栅极焊盘和数据焊盘的接触孔。 用于栅极线组件和数据线组件的下层的侧壁通过接触孔暴露。 将基于IZO的层沉积到衬底上并构图,从而形成像素电极,辅助栅极焊盘和辅助数据焊盘。 像素电极连接到漏电极的侧壁,辅助栅极和数据焊盘连接到栅极和数据焊盘的侧壁。
    • 7. 发明授权
    • Thin film transistor array panel and manufacturing method thereof
    • 薄膜晶体管阵列面板及其制造方法
    • US07742118B2
    • 2010-06-22
    • US11690563
    • 2007-03-23
    • Jun-Hyung SoukJeong-Young LeeJong-Soo YoonKwon-Young ChoiBum-Ki Baek
    • Jun-Hyung SoukJeong-Young LeeJong-Soo YoonKwon-Young ChoiBum-Ki Baek
    • G02F1/136
    • G02F1/13458G02F1/136227G02F1/136286H01L27/12H01L27/124H01L27/1288
    • A method of manufacturing a thin film transistor array panel is provided, the method includes: forming a gate line on an insulating substrate; forming a gate insulating layer; forming a semiconductor layer; forming a data conductive layer including a data line and a drain electrode; depositing a passivation layer; forming a photoresist including a first portion located on an end portion of the gate line, a second portion thicker than the first portion and located on the drain electrode, and a third portion thicker than the second portion; exposing a portion of the passivation layer under the second portion of the photoresist and a portion of the gate insulating layer under the first portion of the photoresist by etching using the photoresist as an etch mask; forming first and second contact holes exposing the drain electrode and the end portions of the gate line, respectively; and forming a pixel electrode connected to the drain electrode through the first contact hole.
    • 提供一种制造薄膜晶体管阵列面板的方法,该方法包括:在绝缘基板上形成栅极线; 形成栅极绝缘层; 形成半导体层; 形成包括数据线和漏电极的数据导电层; 沉积钝化层; 形成包括位于所述栅极线的端部的第一部分的光致抗蚀剂,比所述第一部分更厚且位于所述漏极上的第二部分,以及比所述第二部分更厚的第三部分; 通过使用光致抗蚀剂作为蚀刻掩模,将光致抗蚀剂的第二部分下的钝化层的一部分暴露在光致抗蚀剂的第一部分下方的栅绝缘层的一部分; 形成分别露出所述漏电极和所述栅极线的端部的第一和第二接触孔; 以及通过所述第一接触孔形成连接到所述漏电极的像素电极。
    • 8. 发明申请
    • CONTACT STRUCTURE OF A WIRES AND METHOD MANUFACTURING THE SAME, AND THIN FILM TRANSISTOR SUBSTRATE INCLUDING THE CONTACT STRUCTURE AND METHOD MANUFACTURING THE SAME
    • 一种线的接触结构及其制造方法,以及包括接触结构的薄膜晶体管基板及其制造方法
    • US20100096176A1
    • 2010-04-22
    • US12645458
    • 2009-12-22
    • Seung-Taek LIMMun-Pyo HongNam-Seok RohYoung-Joo SongSang-Ki KwakKwon-Young ChoiKeun-Kyu Song
    • Seung-Taek LIMMun-Pyo HongNam-Seok RohYoung-Joo SongSang-Ki KwakKwon-Young ChoiKeun-Kyu Song
    • H05K1/11
    • G02F1/13458G02F1/136227G02F1/136286G02F2001/13629H01L21/76805H01L21/76816H01L23/53223H01L27/124H01L2924/0002H01L2924/00
    • In a method of fabricating a thin film transistor array substrate for a liquid crystal display, a gate line assembly is formed on a substrate with a chrome-based under-layer and an aluminum alloy-based over-layer while proceeding in the horizontal direction. The gate line assembly has gate lines, and gate electrodes, and gate pads. A gate insulating layer is deposited onto the insulating substrate such that the gate insulating layer covers the gate line assembly. A semiconductor layer and an ohmic contact layer are sequentially formed on the gate insulating layer. A data line assembly is formed on the ohmic contact layer with a chrome-based under-layer and an aluminum alloy-based over-layer. The data line assembly has data lines crossing over the gate lines, source electrodes, drain electrodes, and data pads. A protective layer is deposited onto the substrate, and patterned to thereby form contact holes exposing the drain electrodes, the gate pads, and the data pads. The sidewall of the under-layers for the gate line assembly and the data line assembly is exposed through the contact holes. An IZO-based layer is deposited onto the substrate, and patterned to thereby form pixel electrodes, subsidiary gate pads, and subsidiary data pads. The pixel electrodes are connected to the sidewall of the drain electrodes, and the subsidiary gate and data pads are connected to the sidewall of the gate and the data pads.
    • 在制造用于液晶显示器的薄膜晶体管阵列基板的方法中,栅极线组件在沿水平方向前进的基底上形成有铬基底层和基于铝合金的超层。 栅极线组件具有栅极线,栅电极和栅极焊盘。 栅极绝缘层沉积在绝缘基板上,使得栅极绝缘层覆盖栅极线组件。 在栅极绝缘层上依次形成半导体层和欧姆接触层。 数据线组件在欧姆接触层上形成有铬基底层和基于铝合金的超层。 数据线组件具有跨越栅极线,源电极,漏电极和数据焊盘的数据线。 保护层沉积到衬底上,并被图案化,从而形成露出漏电极,栅极焊盘和数据焊盘的接触孔。 用于栅极线组件和数据线组件的下层的侧壁通过接触孔暴露。 将基于IZO的层沉积到衬底上并构图,从而形成像素电极,辅助栅极焊盘和辅助数据焊盘。 像素电极连接到漏电极的侧壁,辅助栅极和数据焊盘连接到栅极和数据焊盘的侧壁。
    • 9. 发明申请
    • CONTACT STRUCTURE OF A WIRES AND METHOD MANUFACTURING THE SAME, AND THIN FILM TRANSISTOR SUBSTRATE INCLUDING THE CONTACT STRUCTURE AND METHOD MANUFACTURING THE SAME
    • 一种线的接触结构及其制造方法,以及包括接触结构的薄膜晶体管基板及其制造方法
    • US20090096105A1
    • 2009-04-16
    • US12333973
    • 2008-12-12
    • Seung-Taek LIMMun-Pyo HongNam-Seok RohYoung-Joo SongSang-Ki KwakKwon-Young ChoiKeun-Kyu Song
    • Seung-Taek LIMMun-Pyo HongNam-Seok RohYoung-Joo SongSang-Ki KwakKwon-Young ChoiKeun-Kyu Song
    • H01L23/48H01L23/52
    • G02F1/13458G02F1/136227G02F1/136286G02F2001/13629H01L21/76805H01L21/76816H01L23/53223H01L27/124H01L2924/0002H01L2924/00
    • In a method of fabricating a thin film transistor array substrate for a liquid crystal display, a gate line assembly is formed on a substrate with a chrome-based under-layer and an aluminum alloy-based over-layer while proceeding in the horizontal direction. The gate line assembly has gate lines, and gate electrodes, and gate pads. A gate insulating layer is deposited onto the insulating substrate such that the gate insulating layer covers the gate line assembly. A semiconductor layer and an ohmic contact layer are sequentially formed on the gate insulating layer. A data line assembly is formed on the ohmic contact layer with a chrome-based under-layer and an aluminum alloy-based over-layer. The data line assembly has data lines crossing over the gate lines, source electrodes, drain electrodes, and data pads. A protective layer is deposited onto the substrate, and patterned to thereby form contact holes exposing the drain electrodes, the gate pads, and the data pads. The sidewall of the under-layers for the gate line assembly and the data line assembly is exposed through the contact holes. An IZO-based layer is deposited onto the substrate, and patterned to thereby form pixel electrodes, subsidiary gate pads, and subsidiary data pads. The pixel electrodes are connected to the sidewall of the drain electrodes, and the subsidiary gate and data pads are connected to the sidewall of the gate and the data pads.
    • 在制造用于液晶显示器的薄膜晶体管阵列基板的方法中,栅极线组件在沿水平方向前进的基底上形成有铬基底层和基于铝合金的超层。 栅极线组件具有栅极线,栅电极和栅极焊盘。 栅极绝缘层沉积在绝缘基板上,使得栅极绝缘层覆盖栅极线组件。 在栅极绝缘层上依次形成半导体层和欧姆接触层。 数据线组件在欧姆接触层上形成有铬基底层和基于铝合金的超层。 数据线组件具有跨越栅极线,源电极,漏电极和数据焊盘的数据线。 保护层沉积到衬底上,并被图案化,从而形成露出漏电极,栅极焊盘和数据焊盘的接触孔。 用于栅极线组件和数据线组件的下层的侧壁通过接触孔暴露。 将基于IZO的层沉积到衬底上并构图,从而形成像素电极,辅助栅极焊盘和辅助数据焊盘。 像素电极连接到漏电极的侧壁,辅助栅极和数据焊盘连接到栅极和数据焊盘的侧壁。
    • 10. 发明申请
    • THIN FILM TRANSISTOR ARRAY PANEL AND MANUFACTURING METHOD THEREOF
    • 薄膜晶体管阵列及其制造方法
    • US20080252806A1
    • 2008-10-16
    • US12141623
    • 2008-06-18
    • Jun-Hyung SOUKJeong-Young LeeJong-Soo YoonKwon-Young ChoiBum-Ki Baek
    • Jun-Hyung SOUKJeong-Young LeeJong-Soo YoonKwon-Young ChoiBum-Ki Baek
    • G02F1/136
    • G02F1/13458G02F1/136227G02F1/136286H01L27/12H01L27/124H01L27/1288
    • A method of manufacturing a thin film transistor array panel is provided, the method includes: forming a gate line on an insulating substrate; forming a gate insulating layer; forming a semiconductor layer; forming a data conductive layer including a data line and a drain electrode; depositing a passivation layer; forming a photoresist including a first portion located on an end portion of the gate line, a second portion thicker than the first portion and located on the drain electrode, and a third portion thicker than the second portion; exposing a portion of the passivation layer under the second portion of the photoresist and a portion of the gate insulating layer under the first portion of the photoresist by etching using the photoresist as an etch mask; forming first and second contact holes exposing the drain electrode and the end portions of the gate line, respectively; and forming a pixel electrode connected to the drain electrode through the first contact hole.
    • 提供一种制造薄膜晶体管阵列面板的方法,该方法包括:在绝缘基板上形成栅极线; 形成栅极绝缘层; 形成半导体层; 形成包括数据线和漏电极的数据导电层; 沉积钝化层; 形成包括位于所述栅极线的端部的第一部分的光致抗蚀剂,比所述第一部分更厚且位于所述漏极上的第二部分,以及比所述第二部分更厚的第三部分; 通过使用光致抗蚀剂作为蚀刻掩模,将光致抗蚀剂的第二部分下的钝化层的一部分暴露在光致抗蚀剂的第一部分下方的栅绝缘层的一部分; 形成分别露出所述漏电极和所述栅极线的端部的第一和第二接触孔; 以及通过所述第一接触孔形成连接到所述漏电极的像素电极。