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    • 7. 发明授权
    • Visual inspection and verification system
    • 目视检查和验证系统
    • US07523027B2
    • 2009-04-21
    • US10878847
    • 2004-06-28
    • Fang-Cheng ChangYao-Ting WangYagyensh C. PatiLinard N. Karklin
    • Fang-Cheng ChangYao-Ting WangYagyensh C. PatiLinard N. Karklin
    • G06F17/50
    • G06T7/0004G03F1/26G03F1/36G03F1/84G03F7/70441G03F7/705G06F17/5068G06T2207/30148
    • A method and apparatus for inspecting a photolithography mask for defects is provided. The inspection method comprises providing a defect area image to an image simulator wherein the defect area image is an image of a portion of a photolithography mask, and providing a set of lithography parameters as a second input to the image simulator. The defect area image may be provided by an inspection tool which scans the photolithography mask for defects using a high resolution microscope and captures images of areas of the mask around identified potential defects. The image simulator generates a first simulated image in response to the defect area image and the set of lithography parameters. The first simulated image is a simulation of an image which would be printed on a wafer if the wafer were to be exposed to an illumination source directed through the portion of the mask. The method may also include providing a second simulated image which is a simulation of the wafer print of the portion of the design mask which corresponds to the portion represented by the defect area image. The method also provides for the comparison of the first and second simulated images in order to determine the printability of any identified potential defects on the photolithography mask. A method of determining the process window effect of any identified potential defects is also provided for.
    • 提供了一种用于检查用于缺陷的光刻掩模的方法和装置。 检查方法包括向图像模拟器提供缺陷区域图像,其中缺陷区域图像是光刻掩模的一部分的图像,并且提供一组光刻参数作为图像模拟器的第二输入。 缺陷区域图像可以由检查工具提供,该检查工具使用高分辨率显微镜扫描光刻掩模以获得缺陷,并捕获围绕所识别的潜在缺陷的掩模区域的图像。 图像模拟器响应于缺陷区域图像和光刻参数集合而生成第一模拟图像。 第一模拟图像是如果将晶片暴露于通过该掩模的该部分的照明源而将被印刷在晶片上的图像的模拟。 该方法还可以包括提供第二模拟图像,其是对应于由缺陷区域图像表示的部分的设计掩模的部分的晶片印刷的模拟。 该方法还提供了第一和第二模拟图像的比较,以便确定光刻掩模上任何识别的潜在缺陷的可印刷性。 还提供了确定任何识别的潜在缺陷的过程窗口效应的方法。