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    • 4. 发明申请
    • Inertial Sensor
    • 惯性传感器
    • US20120272734A1
    • 2012-11-01
    • US13227305
    • 2011-09-07
    • Won Kyu JeungHo Seop Jeong
    • Won Kyu JeungHo Seop Jeong
    • G01P15/00
    • G01C19/5755G01P15/0802G01P15/09G01P2015/0837
    • Disclosed herein is an inertial sensor. An inertial sensor 100 according to a preferred embodiment of the present invention is configured to include a plate-shaped membrane 110 on which a hole 200 penetrating in a thickness direction is formed, a mass body 120 disposed on a bottom of a central portion 113 of the membrane 110, and a post 130 disposed on a bottom of an edge 115 of the membrane 110 to support the membrane 110 and surrounding the mass body 120. By the configuration, the preferred embodiment of the present invention reduces damping force due to viscosity of air at the time of vibration by forming the hole 200 on the membrane 110 to increase displacement or amplitude of the mass body 120, thereby increasing sensitivity of the inertial sensor 100.
    • 这里公开了惯性传感器。 根据本发明的优选实施例的惯性传感器100被构造成包括在其上形成有沿厚度方向穿透的孔200的板状膜110,设置在中心部113的底部的质量体120 膜110和设置在膜110的边缘115的底部上的柱130,以支撑膜110并围绕质量体120.通过这种构造,本发明的优选实施例减少了由于粘度而引起的阻尼力 通过在膜110上形成孔200来振动时的空气,以增加质量体120的位移或振幅,由此增加惯性传感器100的灵敏度。
    • 9. 发明申请
    • METHOD OF MANUFACTURING INERTIAL SENSOR
    • 制造传感器的方法
    • US20120267825A1
    • 2012-10-25
    • US13184564
    • 2011-07-17
    • Sung Jun LEEWon Kyu JEUNG
    • Sung Jun LEEWon Kyu JEUNG
    • B29C70/00
    • G01C19/56B81B2201/025B81C1/00182B81C2201/0108B81C2201/0187G01P15/0802G01P15/09
    • The method of manufacturing an inertial sensor includes: (A) disposing a first mold 120 and a second mold 125 on both surfaces of a predetermined region R in a plate-shaped membrane 110, (B) forming a mass body 130, a post 140, and an upper cap 150 through a plating process or a filling process, (C) disposing a third mold 160 on an exposed surface of the first mold 120 and the mass body 130, and (D) forming a lower cap 170 through the plating process or the filling process. Since the mass body 130 is made of metal by a plating process or a filling process, the density of the mass body 130 may be increased and the mass body 130 may be formed to have a structure of a high aspect ratio, thereby improving the sensitivity of the inertial sensor 100.
    • 惯性传感器的制造方法包括:(A)在板状膜110中的规定区域R的两面上设置第一模具120和第二模具125,(B)形成质量体130,柱140 ,以及通过电镀处理或填充处理的上盖150,(C)在第一模具120和质量体130的暴露表面上设置第三模具160,以及(D)通过电镀形成下盖170 过程或填充过程。 由于质量体130通过电镀处理或填充处理由金属制成,因此可以增加质量体130的密度,并且可以将质量体130形成为具有高纵横比的结构,从而提高灵敏度 的惯性传感器100。