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    • 4. 发明授权
    • Epitaxial thin films
    • 外延薄膜
    • US07033637B1
    • 2006-04-25
    • US09889237
    • 2000-01-12
    • Andrew Tye HuntGirish DeshpandeWen-Yi LinTzyy-Jiuan Jan
    • Andrew Tye HuntGirish DeshpandeWen-Yi LinTzyy-Jiuan Jan
    • B05D5/12
    • H01M8/124B01D53/228B01D67/0072B01D71/024B01D2256/12B01D2325/22B01D2325/26C23C16/453H01G4/1209H01G4/33H01M8/0687H01M8/1253Y02E60/525Y02P70/56Y10T29/49115Y10T29/5313Y10T29/53135Y10T29/532Y10T29/53204
    • Epitatial thin films for use as buffer layers for high temperature superconductors, electrolytes in solid oxide fuel cells (SOFC), gas separation membranes or dielectric material in electronic devices, are disclosed. By using CCVD, CACVD or any other suitable deposition process, epitaxial films having pore-free, ideal grain boundaries, and dense structure can be formed. Several different types of materials are disclosed for use as buffer layers in high temperature superconductors. In addition, the use of epitaxial thin films for electrolytes and electrode formation in SOFCs results in densification for pore-free and ideal gain boundary/interface microstructure. Gas separation membranes for the production of oxygen and hydrogen are also disclosed. These semipermeable membranes are formed by high-quality, dense, gas-tight, pinhole free sub-micro scale layers of mixed-conducting oxides on porous ceramic substrates. Epitaxial thin films as dielectric material in capacitors are also taught herein. Capacitors are utilized according to their capacitance values which are dependent on their physical structure and dielectric permittivity. The epitaxial thin films of the current invention form low-loss dielectric layers with extremely high permittivity. This high permittivity allows for the formation of capacitors that can have their capacitance adjusted by applying a DC bias between their electrodes.
    • 公开了用作高温超导体的缓冲层的外延薄膜,固体氧化物燃料电池(SOFC)中的电解质,电子装置中的气体分离膜或电介质材料。 通过使用CCVD,CACVD或任何其它合适的沉积工艺,可以形成具有无孔,理想晶界和致密结构的外延膜。 公开了几种不同类型的材料用作高温超导体中的缓冲层。 此外,在SOFC中使用外延薄膜用于电解质和电极形成导致无孔和理想的增益边界/界面微结构的致密化。 还公开了用于生产氧气和氢气的气体分离膜。 这些半透膜由多孔陶瓷基板上的高质量,致密,气密,无针孔的微小尺度的混合导电氧化物层形成。 本文还介绍了作为电容器中的介电材料的外延薄膜。 根据电容值的物理结构和介电常数,使用电容器。 本发明的外延薄膜形成具有极高介电常数的低损耗介电层。 这种高介电常数允许形成可以通过在它们的电极之间施加直流偏压来调整其电容的电容器。