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    • 7. 发明授权
    • Remote combustion deposition burner and/or related methods
    • 远程燃烧沉积燃烧器和/或相关方法
    • US08563097B2
    • 2013-10-22
    • US12591168
    • 2009-11-10
    • David D. McLean
    • David D. McLean
    • C23C8/00B05D5/06
    • C23C16/453C03C17/002C03C17/245C03C2217/732C03C2218/15C23C16/402C23C16/45504F23D14/12F23D14/125F23D14/14F23D14/56F23D91/02
    • Certain example embodiments relate to a burner for use in combustion deposition depositing a coating on a substrate. An infrared (IR) burner generates radiant energy in an area between the burner and the substrate. A delivery device (1) provides a stream comprising a substantially vaporized precursor and a carrier gas from a location remote from the radiant energy generated by the IR burner, and (2) causes the stream to flow between the substrate and the IR burner. The stream is substantially laminar when exiting the delivery device. The radiant energy is sufficient to cause the precursor in the stream to be combusted and to heat the substrate to allow at least a portion of the combusted precursor to form the coating, directly or indirectly, on the substrate. The burners of certain example embodiments may be used, for example, to combustion deposition deposit metal oxide coatings onto glass substrates.
    • 某些示例性实施例涉及用于在基板上沉积涂层的燃烧沉积中使用的燃烧器。 红外(IR)燃烧器在燃烧器和基板之间的区域中产生辐射能。 输送装置(1)从远离由IR燃烧器产生的辐射能量的位置提供包含基本蒸发的前体和载气的流,和(2)使流在基板和IR燃烧器之间流动。 当离开输送装置时,流体基本上是层流的。 辐射能量足以使流中的前体燃烧并加热基底,以允许至少一部分燃烧的前体直接或间接地在基底上形成涂层。 某些示例性实施例的燃烧器可以用于例如在玻璃基板上的燃烧沉积金属氧化物涂层。