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    • 1. 发明授权
    • Angle detecting device with complex self-calibration function
    • 具有复杂自校准功能的角度检测装置
    • US09354085B2
    • 2016-05-31
    • US13508701
    • 2010-10-27
    • Tsukasa Watanabe
    • Tsukasa Watanabe
    • G01C17/38G01D5/244
    • G01D5/24452
    • An angle detecting device with a self-calibration function has sensor heads for reading a scale of a scale disc fixed to a rotating shaft, has first sensor heads and a second sensor head at a position of one of the first sensor heads, in which the first and second sensor heads are calibrated with a first group including L sensor heads and a second group including M sensor heads, respectively arranged with a different equiangular interval, and in which phases of the calibration values obtained from the second group, are shifted by j*P/L(j=1 to L−1), where P is the total number of scale marks, and average values of the calibration values from the second group and the shifted calibration values are obtained, the average values are added to the calibration values from the first group, and the added values are output as calibration values.
    • 具有自校正功能的角度检测装置具有用于读取固定到旋转轴的刻度盘的刻度的传感器头,在第一传感器头之一的位置具有第一传感器头和第二传感器头,其中 第一和第二传感器头用包括L个传感器头的第一组和包括分别以不同的等角度间隔布置的M个传感器头的第二组进行校准,并且从第二组获得的校准值的相位偏移j * P / L(j = 1〜L-1),其中P是刻度标记的总数,并且获得来自第二组的校正值和偏移的校准值的平均值,将平均值加到 来自第一组的校准值,并且添加的值作为校准值输出。
    • 2. 发明授权
    • Axis run-out measuring method and angle detecting device with self-calibration function having axis run-out measuring function
    • 具有轴向跳动测量功能的自校准功能的轴跳动测量方法和角度检测装置
    • US09146136B2
    • 2015-09-29
    • US13508686
    • 2010-10-27
    • Tsukasa Watanabe
    • Tsukasa Watanabe
    • G01R33/10G01D5/244G01D5/347
    • G01D5/24476G01D5/24452G01D5/2448G01D5/2449G01D5/3473
    • An angle detecting device with self-calibration function, in which sensor heads are provided with an equiangular interval on a scale disc fixed to a rotating shaft, one sensor head is selected as reference, a sum of measurement differences between the reference and another sensor head is divided by the number of sensor heads, to determine an average, whereby a self-calibration value is obtained, in which a sensor head of the reference is changed to another in order, and the respective self-calibration value is obtained, which value is deviated by an angle of arrangement with respect to a particular sensor head, and a phase is aligned to a self-calibration value of the particular one as the reference, to determine an average for calculations of this phase conversion, which average is subtracted from the respective calculation subjected to the phase conversion, to obtain only asynchronous angular errors.
    • 一种具有自校准功能的角度检测装置,其中传感器头在固定在旋转轴上的刻度盘上设置有等角度间隔,选择一个传感器头作为参考,参考和另一个传感器头之间的测量差之和 被传感器头的数量除以确定平均值,从而获得其中参考的传感器头按顺序改变为另一个的自校准值,并且获得相应的自校准值,该值 偏离相对于特定传感器头的布置角度,并且将相位与特定一个的自校准值对准作为参考,以确定该相位转换的计算的平均值,该平均值从 进行相位转换的相应计算,仅获得异步角度误差。
    • 5. 发明授权
    • Substrate cleaning method, substrate cleaning system and program storage medium
    • 基板清洗方法,基板清洗系统和程序存储介质
    • US08449684B2
    • 2013-05-28
    • US11783748
    • 2007-04-11
    • Tsukasa WatanabeNaoki Shindo
    • Tsukasa WatanabeNaoki Shindo
    • B08B7/00B08B7/04B08B3/00
    • H01L21/67057B08B3/048B08B3/12
    • The present invention provides a substrate cleaning method capable of removing particles from the entire surface of a substrate to be processed at a high removing efficiency. In the substrate cleaning method according to the present invention, a substrate to be processed W is immersed in a cleaning liquid in a cleaning tank 12. Then, ultrasonic waves are generated in the cleaning liquid contained in the cleaning tank 12, so that the substrate W is subjected to an ultrasonic cleaning process. The step of generating ultrasonic waves includes a step of generating ultrasonic waves in the cleaning tank while the cleaning liquid is being supplied into the cleaning tank. A supply rate at which the cleaning liquid is supplied into the cleaning tank at a certain timing in the step of generating ultrasonic waves differs from a supply rate at which the cleaning liquid is supplied into the cleaning tank at another timing in the step of generating ultrasonic waves.
    • 本发明提供一种能够以高去除效率从待处理基板的整个表面去除颗粒的基板清洗方法。 在本发明的基板清洗方法中,将待处理基板W浸入清洗槽12内的清洗液中。然后,在包含在清洗槽12内的清洗液中产生超声波,使基板 W进行超声波清洗处理。 产生超声波的步骤包括在将清洁液供给到清洗槽中时在清洗槽中产生超声波的步骤。 在产生超声波的步骤中的某个时刻将清洗液供给到清洗槽中的供给速度与在生成超声波的步骤中的另一定时将清洗液供给到清洗槽中的供给速度不同 波浪。
    • 6. 发明申请
    • Substrate cleaning method, substrate cleaning system and program storage medium
    • 基板清洗方法,基板清洗系统和程序存储介质
    • US20070240736A1
    • 2007-10-18
    • US11783748
    • 2007-04-11
    • Tsukasa WatanabeNaoki Shindo
    • Tsukasa WatanabeNaoki Shindo
    • B08B7/04B08B3/00B08B3/12
    • H01L21/67057B08B3/048B08B3/12
    • The present invention provides a substrate cleaning method capable of removing particles from the entire surface of a substrate to be processed at a high removing efficiency. In the substrate cleaning method according to the present invention, a substrate to be processed W is immersed in a cleaning liquid in a cleaning tank 12. Then, ultrasonic waves are generated in the cleaning liquid contained in the cleaning tank 12, so that the substrate W is subjected to an ultrasonic cleaning process. The step of generating ultrasonic waves includes a step of generating ultrasonic waves in the cleaning tank while the cleaning liquid is being supplied into the cleaning tank. A supply rate at which the cleaning liquid is supplied into the cleaning tank at a certain timing in the step of generating ultrasonic waves differs from a supply rate at which the cleaning liquid is supplied into the cleaning tank at another timing in the step of generating ultrasonic waves.
    • 本发明提供一种能够以高去除效率从待处理基板的整个表面去除颗粒的基板清洗方法。 在本发明的基板清洗方法中,将被处理基板W浸渍在清洗槽12内的清洗液中。 然后,在包含在清洗槽12中的清洗液中产生超声波,从而对基板W进行超声波清洗处理。 产生超声波的步骤包括在将清洁液供给到清洗槽中时在清洗槽中产生超声波的步骤。 在产生超声波的步骤中的某个时刻将清洗液供给到清洗槽中的供给速度与在生成超声波的步骤中的另一定时将清洗液供给到清洗槽中的供给速度不同 波浪。
    • 7. 发明授权
    • Inspection device for mouth of container
    • 容器口检查装置
    • US07238930B2
    • 2007-07-03
    • US10542098
    • 2004-01-21
    • Tsukasa Watanabe
    • Tsukasa Watanabe
    • B07C5/12B07C5/34G01N21/90G01N9/04G01N7/00G01N40/14
    • G01B11/24G01B11/12
    • A container mouth inspection device which can produce an ideal optical image that reliably provides information on the inner contour of the container mouth, and which enables accurate and speedy measurement of the inside diameter or the like of the container mouth. The container mouth inspection device includes a light source (2) for emitting diffused light to the bottom (99b) of the container (99) having a mouth (99a), and an optical system (1) in which a lens (10) and a diaphragm (11) are arranged along an optical axis (5) extending through the center of the mouth (99a) of the container (99) such that the diaphragm (11) is positioned behind the lens (10). The diaphragm (11) is offset backward from a back focus of the lens (10) along the optical axis (5) by a predetermined distance d so as to form an optical image of the mouth (99a) in a position behind the diaphragm (11).
    • 一种容器口检查装置,其可以产生可靠地提供关于容器口的内轮廓的信息的理想光学图像,并且能够准确且快速地测量容器口的内径等。 容器口检查装置包括用于向具有口部(99a)的容器(99)的底部(99b)发射漫射光的光源(2),以及光学系统(1),其中透镜 )和沿着延伸穿过容器(99)的口(99a)的中心的光轴(5))布置的隔膜(11),使得隔膜(11)位于透镜(10)后面。 光阑(11)从透镜(10)的后焦点向后偏离预定距离d,以在光阑后面形成口(99a)的光学图像 (11)。
    • 8. 发明申请
    • Inspection device for mouth of container
    • 容器口检查装置
    • US20060140470A1
    • 2006-06-29
    • US10542098
    • 2004-01-21
    • Tsukasa Watanabe
    • Tsukasa Watanabe
    • G06K9/00
    • G01B11/24G01B11/12
    • A container mouth inspection device which can produce an ideal optical image that reliably provides information on the inner contour of the container mouth, and which enables accurate and speedy measurement of the inside diameter or the like of the container mouth. The container mouth inspection device includes a light source (2) for emitting diffused light to the bottom (99b) of the container (99) having a mouth (99a), and an optical system (1) in which a lens (10) and a diaphragm (11) are arranged along an optical axis (5) extending through the center of the mouth (99a) of the container (99) such that the diaphragm (11) is positioned behind the lens (10). The diaphragm (11) is offset backward from a back focus of the lens (10) along the optical axis (5) by a predetermined distance d so as to form an optical image of the mouth (99a) in a position behind the diaphragm (11).
    • 一种容器口检查装置,其可以产生可靠地提供关于容器口的内轮廓的信息的理想光学图像,并且能够准确且快速地测量容器口的内径等。 容器口检查装置包括用于向具有口部(99a)的容器(99)的底部(99b)发射漫射光的光源(2),以及光学系统(1),其中透镜 )和沿着延伸穿过容器(99)的口(99a)的中心的光轴(5))布置的隔膜(11),使得隔膜(11)位于透镜(10)后面。 光阑(11)从透镜(10)的后焦点向后偏离预定距离d,以在光阑后面形成口(99a)的光学图像 (11)。
    • 10. 发明授权
    • Rear wheel steering apparatus for vehicles
    • 车辆后轮转向装置
    • US5099938A
    • 1992-03-31
    • US603629
    • 1990-10-25
    • Tsukasa WatanabeAkiya Taneda
    • Tsukasa WatanabeAkiya Taneda
    • B62D6/00B62D7/14B62D7/15B62D101/00B62D113/00
    • B62D7/1572
    • The invention is directed to an apparatus for steering rear wheels of a vehicle. A vehicle speed sensor detects a speed of the vehicle, and a steering angle sensor detects a steering angle of front wheels of the vehicle and provides a first steering signal. A control device is provided for receiving the first steering signal and providing a second steering signal representing a desired steering angle of rear wheels of the vehicle which is determined in response to the first steering signal. A drive device is arranged to receive the second steering signal and steer the rear wheels to reach the desired steering angle. Then, a limit mechanism is provided for reducing the range of variation of steering angle of the rear wheels steered by the drive device to a predetermined range when the vehicle speed exceeds a predetermined speed, or the steering angle of the front wheels is less than a predetermined angle. Accordingly, when the vehicle is traveling at high speed, or when the vehicle turns with a large turning radius, the steering angle of the rear wheels is prevented from being unnecessarily varied.
    • 本发明涉及一种用于转向车辆后轮的装置。 车速传感器检测车辆的速度,转向角传感器检测车辆前轮的转向角并提供第一转向信号。 提供控制装置用于接收第一转向信号并提供表示响应于第一转向信号确定的车辆后轮的期望转向角的第二转向信号。 驱动装置被布置成接收第二转向信号并转向后轮以达到期望的转向角。 然后,提供限制机构,用于当车速超过预定速度或者前轮的转向角小于一个预定速度时,将由驱动装置转向的后轮的转向角的变化范围减小到预定范围 预定角度。 因此,当车辆高速行驶时,或者当车辆以大的转弯半径转动时,防止后轮的转向角度被不必要地变化。