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    • 1. 发明授权
    • Gas sensor
    • 气体传感器
    • US09151728B2
    • 2015-10-06
    • US13575494
    • 2011-12-06
    • Hidekazu KatoTatsuya OkumuraMasahiro AsaiTomoyuki Miyashita
    • Hidekazu KatoTatsuya OkumuraMasahiro AsaiTomoyuki Miyashita
    • G01N7/00G01N27/406
    • G01N27/4062
    • Provided is a gas sensor in which a connection terminal can be favorably fitted onto a cylindrical sensor element without causing a breakage of the connection terminal. An oxygen sensor (1) includes an outer connection terminal (29) having an outer fitting portion (53), an extension portion (55) extending inwardly from an axially intermediate point of the outer fitting portion (53) and pulling prevention portions (75) and (77) formed on rear end parts of the outer fitting portion (53) at positions adjacent to the extension portion (55). When the extension portion (55) of the outer connection terminal (29) is inserted in and pulled out from a through hole (23) of a separator (27), the extension portion (55) can be prevented from further pulling in the through hole (23) by contact of the pulling prevention portions (75) and (77) with a front end surface of the separator (27).
    • 提供一种气体传感器,其中连接端子可以有利地安装在圆柱形传感器元件上,而不会导致连接端子的断裂。 氧传感器(1)包括具有外装配部分(53)的外连接端子(29),从外装配部分(53)的轴向中间点向内延伸的延伸部分(55)和防脱部分(75) )和(77)形成在外装配部分(53)的后端部分上。 当外部连接端子(29)的延伸部分(55)插入并从分离器(27)的通孔(23)中拔出时,可以防止延伸部分(55)进一步拉动通孔 (75)和(77)与分离器(27)的前端表面接触的孔(23)。
    • 2. 发明申请
    • SHAPE MEASURING APPARATUS, EXPOSURE APPARATUS, AND COMPUTER
    • 形状测量装置,曝光装置和计算机
    • US20080285052A1
    • 2008-11-20
    • US12032205
    • 2008-02-15
    • Tomoyuki MiyashitaTakahiro MatsumotoHideki Ina
    • Tomoyuki MiyashitaTakahiro MatsumotoHideki Ina
    • G01B11/24
    • G01B11/2441G03F7/70641
    • A shape measuring apparatus for measuring the shape of a measurement target surface includes an interferometer and computer. The interferometer senses interference light formed by measurement light from the measurement target surface and reference light by a photoelectric converter, while changing the light path length of the measurement light or the reference light. The computer Fourier-transforms a first interference signal sensed by the photoelectric converter to obtain a phase distribution and an amplitude distribution, shapes the amplitude distribution, inversely Fourier-transforms the phase distribution and the shaped amplitude distribution to obtain a second interference signal, and determines the shape of the measurement target surface based on the second interference signal.
    • 用于测量测量对象表面的形状的形状测量装置包括干涉仪和计算机。 在改变测量光或参考光的光路长度的同时,干涉仪通过光电转换器感测来自测量对象表面的测量光和参考光所形成的干涉光。 计算机对由光电转换器感测到的第一干涉信号进行傅立叶变换以获得相位分布和幅度分布,对幅度分布进行整形,对相位分布和形状振幅分布进行逆傅立叶变换,以获得第二干涉信号,并确定 基于第二干涉信号的测量对象表面的形状。
    • 5. 发明申请
    • GAS SENSOR
    • 气体传感器
    • US20120304735A1
    • 2012-12-06
    • US13575494
    • 2011-12-06
    • Hidekazu KatoTatsuya OkumuraMasahiro AsaiTomoyuki Miyashita
    • Hidekazu KatoTatsuya OkumuraMasahiro AsaiTomoyuki Miyashita
    • G01N37/00
    • G01N27/4062
    • Provided is a gas sensor in which a connection terminal can be favorably fitted onto a cylindrical sensor element without causing a breakage of the connection terminal. An oxygen sensor (1) includes an outer connection terminal (29) having an outer fitting portion (53), an extension portion (55) extending inwardly from an axially intermediate point of the outer fitting portion (53) and pulling prevention portions (75) and (77) formed on rear end parts of the outer fitting portion (53) at positions adjacent to the extension portion (55). When the extension portion (55) of the outer connection terminal (29) is inserted in and pulled out from a through hole (23) of a separator (27), the extension portion (55) can be prevented from further pulling in the through hole (23) by contact of the pulling prevention portions (75) and (77) with a front end surface of the separator (27).
    • 提供一种气体传感器,其中连接端子可以有利地安装在圆柱形传感器元件上,而不会导致连接端子的断裂。 氧传感器(1)包括具有外装配部分(53)的外连接端子(29),从外装配部分(53)的轴向中间点向内延伸的延伸部分(55)和防脱部分(75) )和(77)形成在外装配部分(53)的后端部分上。 当外部连接端子(29)的延伸部分(55)插入并从分离器(27)的通孔(23)中拔出时,可以防止延伸部分(55)进一步拉动通孔 (75)和(77)与分离器(27)的前端表面接触的孔(23)。
    • 7. 发明授权
    • Information processing apparatus for interference signal processing
    • 用于干扰信号处理的信息处理装置
    • US07924426B2
    • 2011-04-12
    • US12032205
    • 2008-02-15
    • Tomoyuki MiyashitaTakahiro MatsumotoHideki Ina
    • Tomoyuki MiyashitaTakahiro MatsumotoHideki Ina
    • G01B11/02G01B9/02
    • G01B11/2441G03F7/70641
    • A shape measuring apparatus for measuring the shape of a measurement target surface includes an interferometer and computer. The interferometer senses interference light formed by measurement light from the measurement target surface and reference light by a photoelectric converter, while changing the light path length of the measurement light or the reference light. The computer Fourier-transforms a first interference signal sensed by the photoelectric converter to obtain a phase distribution and an amplitude distribution, shapes the amplitude distribution, inversely Fourier-transforms the phase distribution and the shaped amplitude distribution to obtain a second interference signal, and determines the shape of the measurement target surface based on the second interference signal.
    • 用于测量测量对象表面的形状的形状测量装置包括干涉仪和计算机。 在改变测量光或参考光的光路长度的同时,干涉仪通过光电转换器感测来自测量对象表面的测量光和参考光所形成的干涉光。 计算机对由光电转换器感测到的第一干涉信号进行傅立叶变换以获得相位分布和幅度分布,对幅度分布进行整形,对相位分布和形状振幅分布进行逆傅立叶变换,以获得第二干涉信号,并确定 基于第二干涉信号的测量对象表面的形状。
    • 8. 发明申请
    • CALCULATION METHOD AND APPARATUS OF EXPOSURE CONDITION, AND EXPOSURE APPARATUS
    • 计算方法和暴露条件的装置和曝光装置
    • US20070275313A1
    • 2007-11-29
    • US11753721
    • 2007-05-25
    • Tomoyuki MIYASHITA
    • Tomoyuki MIYASHITA
    • G03C5/00G03B27/42
    • G03F7/70641G03F7/70558
    • A method for calculating a correction amount to a focus amount or an exposure dose in exposing a substrate with an exposure apparatus includes a storing step of storing plural sets, each of which is a combination of a set focus amount, a set exposure dose, and first image information of a pattern formed on the substrate through an exposure with the set focus amount and the set exposure dose, the plural sets having different focus amounts and/or different exposure doses, an obtaining step of obtaining second image information of a pattern formed on the substrate through another exposure, and a selecting step of finding a correlation value between the second image information obtained in the obtaining step and the first image information in the plural sets stored in the storing step, and of selecting at least two sets having two highest correlation values among the plural sets.
    • 用曝光装置曝光基板时的校正量或曝光剂量的校正​​量的计算方法包括存储多个组合的存储步骤,每个组合是设定的焦点量,设定的曝光量和 通过具有设定聚焦量和设定曝光剂量的曝光在基板上形成的图案的第一图像信息,具有不同聚焦量和/或不同曝光剂量的多组,获得形成的图案的第二图像信息的获取步骤 通过另一次曝光在基板上,以及选择步骤,找到在获取步骤中获得的第二图像信息和存储在存储步骤中的多组中的第一图像信息之间的相关值,以及选择至少两个具有两个 多组之间的最高相关值。
    • 10. 发明申请
    • Image processing apparatus, image processing method, exposure apparatus, and device manufacturing method
    • 图像处理装置,图像处理方法,曝光装置和装置制造方法
    • US20050281454A1
    • 2005-12-22
    • US11153344
    • 2005-06-16
    • Tomoyuki Miyashita
    • Tomoyuki Miyashita
    • G03F9/00G06K9/00G06K9/64
    • G06K9/6211G03F9/7088G03F9/7092G06K2009/3225
    • An apparatus includes a first calculation unit to calculate the similarity between first image data of a first partial region in object image data and reference image data with respect to each pair of a second partial region of the first image data and a third partial region of the reference image data corresponding to each other, a second calculation unit to calculate the statistic of a plurality of similarities calculated by the first calculation unit with respect to a plurality of the pair, and a recognition unit to recognize, as the position of an object region in the object image data, the position of the first partial region in the object image data which has the highest statistic of a plurality of the statistic calculated by the second calculation unit.
    • 一种装置包括:第一计算单元,用于计算对象图像数据中的第一部分区域的第一图像数据与参考图像数据相对于第一图像数据的每对第二部分区域的相似度;以及第三部分区域 相对应的参考图像数据,第二计算单元,用于计算由第一计算单元针对多个对计算的多个相似度的统计量;以及识别单元,用于识别作为对象区域的位置 在对象图像数据中,在由第二计算单元计算的具有多个统计量的最高统计量的对象图像数据中的第一部分区域的位置。