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1. 发明授权

US08502163B2 Charged particle beam device, vacuum valve therefor and operation thereof 有权
标题翻译：带电粒子束装置，真空阀及其操作
公开(公告)号：US08502163B2
公开(公告)日：2013-08-06
申请号：US13296885
申请日：2011-11-15
申请人： Thomas Jasinski
发明人： Thomas Jasinski
IPC分类号： H01J37/301 , H01J49/24 , F16K51/02 , F16K3/00
CPC分类号： F16K3/188 , F16K51/02 , Y10T137/0318
摘要： A valve unit configured for a charged particle beam device having a beam path 2 is described. The valve unit includes a vacuum sealed valve housing 102 configured for a pressure difference between the inside of the valve housing and the outside of the valve housing, wherein the housing provides a beam path portion 103 for having a charged particle beam pass therethrough along the beam path, a valve positioning unit adapted for selectively providing a first movement of the valve housing such that the beam path portion is selectively moved into and out of the beam path, and at least one sealing element 122 configured for a second movement, wherein the second movement is different from the first movement.
摘要翻译：描述了构造成具有光束路径2的带电粒子束装置的阀单元。阀单元包括真空密封阀壳体102，该真空密封阀壳体构造用于在阀壳体的内部和阀壳体的外部之间的压力差，其中壳体提供用于使带电粒子束沿着光束通过的光束路径部分103 阀门定位单元，其适于选择性地提供阀壳体的第一运动，使得光束路径部分被选择性地移入和移出光束路径;以及至少一个构造成用于第二运动的密封元件122，其中第二运动与第一动作不同。

2. 发明授权

US07355186B2 Charged particle beam device with cleaning unit and method of operation thereof 有权
标题翻译：具有清洁单元的带电粒子束装置及其操作方法
公开(公告)号：US07355186B2
公开(公告)日：2008-04-08
申请号：US10547865
申请日：2004-03-03
申请人： Thomas Jasinski
发明人： Thomas Jasinski
IPC分类号： G21G5/00 , A61N5/00
CPC分类号： H01J3/026 , H01J37/065 , H01J2237/022
摘要： The invention provides a charged particle beam device, an emitter module for emitting charged particle beams and a method of operation thereof. Thereby, a charged particle beam emitter (15) emitting charged particles along an optical axis (1) is realized. On the same carrier body (32), a cleaning emitter (16) for emitting charged particles approximately along the optical axis (1) is realized. Thus, an improved cleaning can be provided.
摘要翻译：本发明提供一种带电粒子束装置，用于发射带电粒子束的发射器模块及其操作方法。由此，实现了沿光轴（1）发射带电粒子的带电粒子束发射器（15）。在相同的载体（32）上，实现了用于沿着光轴（1）近似地发射带电粒子的清洁发射器（16）。因此，可以提供改进的清洁。

3. 发明申请

US20090057566A1 GAS ION SOURCE WITH HIGH MECHANICAL STABILITY 有权
标题翻译：具有高机械稳定性的气体源
公开(公告)号：US20090057566A1
公开(公告)日：2009-03-05
申请号：US12199574
申请日：2008-08-27
申请人： Dieter WINKLER , Thomas JASINSKI
发明人： Dieter WINKLER , Thomas JASINSKI
IPC分类号： H01J27/00 , H01T23/00
CPC分类号： F25D19/006 , F25B2500/13 , H01J27/26 , H01J37/08 , H01J37/28 , H01J2237/002 , H01J2237/0216 , H01J2237/061 , H01J2237/0807 , Y10T29/49826
摘要： A gas field ion source is described for a charged particle beam device having a charged particle beam column. The gas field ion source includes an emitter unit, a cooling unit, and a thermal conductivity unit for thermal conductivity from the cooling unit to the emitter unit, wherein the thermal conductivity unit is adapted for reduction of vibration transfer from the cooling unit to the emitter unit.
摘要翻译：对具有带电粒子束柱的带电粒子束装置描述了气体场离子源。气体离子源包括发射器单元，冷却单元和用于从冷却单元到发射器单元的导热性的导热单元，其中导热单元适于减少从冷却单元到发射极的振动传递单元。

4. 发明申请

US20110315890A1 GAS ION SOURCE WITH HIGH MECHANICAL STABILITY 审中-公开
标题翻译：具有高机械稳定性的气体源
公开(公告)号：US20110315890A1
公开(公告)日：2011-12-29
申请号：US13226931
申请日：2011-09-07
申请人： DIETER WINKLER , Thomas Jasinski
发明人： DIETER WINKLER , Thomas Jasinski
IPC分类号： H01J27/02 , B23P11/00
CPC分类号： F25D19/006 , F25B2500/13 , H01J27/26 , H01J37/08 , H01J37/28 , H01J2237/002 , H01J2237/0216 , H01J2237/061 , H01J2237/0807 , Y10T29/49826
摘要： A gas field ion source is described for a charged particle beam device having a charged particle beam column. The gas field ion source includes an emitter unit, a cooling unit, and a thermal conductivity unit for thermal conductivity from the cooling unit to the emitter unit, wherein the thermal conductivity unit is adapted for reduction of vibration transfer from the cooling unit to the emitter unit.
摘要翻译：对具有带电粒子束柱的带电粒子束装置描述了气体场离子源。气体离子源包括发射器单元，冷却单元和用于从冷却单元到发射器单元的导热性的导热单元，其中导热单元适于减少从冷却单元到发射极的振动传递单元。

5. 发明申请

US20080073583A1 ION BEAM APPARATUS AND METHOD FOR ALIGNING SAME 审中-公开
标题翻译：离子束装置及其对准方法
公开(公告)号：US20080073583A1
公开(公告)日：2008-03-27
申请号：US11675689
申请日：2007-02-16
申请人： Thomas JASINSKI , Helmut BANZHOF , Jurgen FROSIEN
发明人： Thomas JASINSKI , Helmut BANZHOF , Jurgen FROSIEN
IPC分类号： H01J37/08
CPC分类号： H01J37/304 , H01J2237/1532 , H01J2237/31755
摘要： An ion beam apparatus is provided, the ion beam apparatus comprising a movable ion source, a condenser lens, an aperture, and a scanning unit disposed between the condenser lens and the aperture, said scanning unit being adapted to scan an ion beam across the aperture. Furthermore, a method for aligning components of an ion beam apparatus is provided, comprising the steps of: producing an ion beam by means of an ion source, producing a first image of a beam cross section of the ion beam at a first voltage of a condenser lens, producing a second image of the beam cross section of the ion beam at a second voltage of the condenser lens, and positioning the ion source so that the centers of the first and second images coincide.
摘要翻译：提供离子束装置，离子束装置包括可移动离子源，聚光透镜，孔径和设置在聚光透镜和孔之间的扫描单元，所述扫描单元适于扫过离子束穿过孔。此外，提供了一种用于对准离子束装置的部件的方法，包括以下步骤：通过离子源产生离子束，产生离子束的束截面的第一图像，其中第一电压为聚光透镜，在聚光透镜的第二电压下产生离子束的束横截面的第二图像，并且定位离子源使得第一和第二图像的中心重合。

6. 发明申请

US20070138404A1 Chamber with low electron stimulated desorption 审中-公开
标题翻译：具有低电子刺激解吸的室
公开(公告)号：US20070138404A1
公开(公告)日：2007-06-21
申请号：US10571519
申请日：2004-09-09
申请人： Juergen Frosien , Thomas Jasinski , Dieter Winkler
发明人： Juergen Frosien , Thomas Jasinski , Dieter Winkler
IPC分类号： G01K1/08
CPC分类号： H01J37/16 , H01J5/02 , H01J2237/188
摘要： The present invention provides a charged particle emission component (100) for providing a charged particle beam (17) to a chamber of a charged particle beam column. The device comprises a gun chamber for housing the charged particle emission component; an emitter (16) for emitting a beam of charged particles; at least one beam shaping element (109; 18; 108; 402); and a residual gas diffusion barrier (106; 206) directly subsequent the emitter.
摘要翻译：本发明提供了一种用于向带电粒子束柱的腔室提供带电粒子束（17）的带电粒子发射部件（100）。该装置包括用于容纳带电粒子发射部件的枪室; 用于发射带电粒子束的发射器（16）; 至少一个光束成形元件（109; 18; 108; 402）; 和直接在发射器之后的残留气体扩散阻挡层（106; 206）。

7. 发明申请

US20070085019A1 Cooling module for charged particle beam column elements 有权
标题翻译：用于带电粒子束柱元件的冷却模块
公开(公告)号：US20070085019A1
公开(公告)日：2007-04-19
申请号：US11240279
申请日：2005-09-30
申请人： Thomas Jasinski , Dieter Winkler , William Eckes
发明人： Thomas Jasinski , Dieter Winkler , William Eckes
IPC分类号： H01J1/50
CPC分类号： H01J37/141 , H01J2237/002
摘要： We have developed a method and apparatus for cooling electromagnetic lens coils of the kind used in charged particle beams. The method and apparatus provide not only a symmetrical cooling effect around the optical axis of the charged particle beam, but also provide improved uniformity of heat transfer. This improved uniformity enables control over the optical axis of the charged particle beam within about 1 nm for high current charged particle beam columns, wherein the current ranges from about 100 nanoamps to about 1000 nanoamps. The use of a squat and wide electromagnetic lens coil in combination with an essentially flat modular cooling panel, which provides uniform cooling to the electromagnetic lens coil, not only enables control over the optical axis of the charged particle beam, but also provides mechanical stability for the charged particle beam column.
摘要翻译：我们开发了一种用于冷却带电粒子束中使用的电磁透镜线圈的方法和装置。该方法和装置不仅提供了带电粒子束的光轴周围的对称冷却效果，而且提供了改善的传热均匀性。这种改进的均匀性使得能够对高电流带电粒子束柱控制带电粒子束的光轴在约1nm内，其中电流范围为约100纳安 - 约1000纳帕。使用蹲式和宽电磁透镜线圈与基本上平坦的模块化冷却面板组合，其提供对电磁透镜线圈的均匀冷却，不仅能够控制带电粒子束的光轴，而且还提供机械稳定性带电粒子束柱。

8. 发明申请

US20130118586A1 CHARGED PARTICLE BEAM DEVICE, VACUUM VALVE THEREFOR AND OPERATION THEREOF 有权
标题翻译：充电颗粒光束装置，真空阀及其操作
公开(公告)号：US20130118586A1
公开(公告)日：2013-05-16
申请号：US13296885
申请日：2011-11-15
申请人： Thomas JASINSKI
发明人： Thomas JASINSKI
IPC分类号： F15D1/00 , F16K27/00 , F16K31/00
CPC分类号： F16K3/188 , F16K51/02 , Y10T137/0318
摘要： A valve unit configured for a charged particle beam device having a beam path 2 is described. The valve unit includes a vacuum sealed valve housing 102 configured for a pressure difference between the inside of the valve housing and the outside of the valve housing, wherein the housing provides a beam path portion 103 for having a charged particle beam pass therethrough along the beam path, a valve positioning unit adapted for selectively providing a first movement of the valve housing such that the beam path portion is selectively moved into and out of the beam path, and at least one sealing element 122 configured for a second movement, wherein the second movement is different from the first movement.
摘要翻译：描述了构造成具有光束路径2的带电粒子束装置的阀单元。阀单元包括真空密封阀壳体102，该真空密封阀壳体构造用于在阀壳体的内部和阀壳体的外部之间的压力差，其中壳体提供用于使带电粒子束沿着光束通过的光束路径部分103 阀门定位单元，其适于选择性地提供阀壳体的第一运动，使得光束路径部分被选择性地移入和移出光束路径;以及至少一个构造成用于第二运动的密封元件122，其中第二运动与第一动作不同。

9. 发明授权

US08101922B2 Modular gas ion source 有权
标题翻译：模块化气体离子源
公开(公告)号：US08101922B2
公开(公告)日：2012-01-24
申请号：US12167734
申请日：2008-07-03
申请人： Dieter Winkler , Thomas Jasinski , Udo Weigel
发明人： Dieter Winkler , Thomas Jasinski , Udo Weigel
IPC分类号： H01T23/00
CPC分类号： H01J37/08 , H01J27/26 , H01J2237/006 , H01J2237/03 , H01J2237/0807
摘要： A gas field ion source is described. The gas field ion source includes an emitter module. The emitter module includes an emitter holder, an emitter structure, a detachably connectable electrical connection assembly of the emitter module, and a detachably connectable gas supply connection assembly of the emitter module. The gas field ion source further includes a supply module, wherein the supply module includes an electrical conductor for providing voltage and/or current, a gas supply conduit, a thermal conductor, a detachably connectable electrical connection assembly of the supply module, and a detachably connectable gas supply connection assembly of the supply module. The emitter module and the supply module are detachably connectable by the detachably connectable connection assemblies of the emitter module and the detachably connectable connection assemblies of the supply module.
摘要翻译：描述了气体场离子源。气体离子源包括发射器模块。发射器模块包括发射器支架，发射器结构，发射器模块的可拆卸连接的电连接组件以及发射器模块的可拆卸地连接的气体供应连接组件。所述气体离子源还包括供电模块，其中所述供应模块包括用于提供电压和/或电流的电导体，气体供应导管，热导体，所述供应模块的可拆卸地连接的电连接组件，供电模块的可连接气体供应连接组件。发射器模块和供电模块可通过发射器模块的可拆卸连接的连接组件和供应模块的可拆卸连接的连接组件可拆卸地连接。

10. 发明授权

US08044370B2 Gas ion source with high mechanical stability 有权
标题翻译：气体离子源具有较高的机械稳定性
公开(公告)号：US08044370B2
公开(公告)日：2011-10-25
申请号：US12199574
申请日：2008-08-27
申请人： Dieter Winkler , Thomas Jasinski
发明人： Dieter Winkler , Thomas Jasinski
IPC分类号： H01T23/00
CPC分类号： F25D19/006 , F25B2500/13 , H01J27/26 , H01J37/08 , H01J37/28 , H01J2237/002 , H01J2237/0216 , H01J2237/061 , H01J2237/0807 , Y10T29/49826
摘要： A gas field ion source is described for a charged particle beam device having a charged particle beam column. The gas field ion source includes an emitter unit, a cooling unit, and a thermal conductivity unit for thermal conductivity from the cooling unit to the emitter unit, wherein the thermal conductivity unit is adapted for reduction of vibration transfer from the cooling unit to the emitter unit.
摘要翻译：对具有带电粒子束柱的带电粒子束装置描述了气体场离子源。气体离子源包括发射器单元，冷却单元和用于从冷却单元到发射器单元的导热性的导热单元，其中导热单元适于减少从冷却单元到发射极的振动传递单元。

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