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1. 发明申请

US20090057566A1 GAS ION SOURCE WITH HIGH MECHANICAL STABILITY 有权
标题翻译：具有高机械稳定性的气体源
公开(公告)号：US20090057566A1
公开(公告)日：2009-03-05
申请号：US12199574
申请日：2008-08-27
申请人： Dieter WINKLER , Thomas JASINSKI
发明人： Dieter WINKLER , Thomas JASINSKI
IPC分类号： H01J27/00 , H01T23/00
CPC分类号： F25D19/006 , F25B2500/13 , H01J27/26 , H01J37/08 , H01J37/28 , H01J2237/002 , H01J2237/0216 , H01J2237/061 , H01J2237/0807 , Y10T29/49826
摘要： A gas field ion source is described for a charged particle beam device having a charged particle beam column. The gas field ion source includes an emitter unit, a cooling unit, and a thermal conductivity unit for thermal conductivity from the cooling unit to the emitter unit, wherein the thermal conductivity unit is adapted for reduction of vibration transfer from the cooling unit to the emitter unit.
摘要翻译：对具有带电粒子束柱的带电粒子束装置描述了气体场离子源。气体离子源包括发射器单元，冷却单元和用于从冷却单元到发射器单元的导热性的导热单元，其中导热单元适于减少从冷却单元到发射极的振动传递单元。

2. 发明申请

US20080073583A1 ION BEAM APPARATUS AND METHOD FOR ALIGNING SAME 审中-公开
标题翻译：离子束装置及其对准方法
公开(公告)号：US20080073583A1
公开(公告)日：2008-03-27
申请号：US11675689
申请日：2007-02-16
申请人： Thomas JASINSKI , Helmut BANZHOF , Jurgen FROSIEN
发明人： Thomas JASINSKI , Helmut BANZHOF , Jurgen FROSIEN
IPC分类号： H01J37/08
CPC分类号： H01J37/304 , H01J2237/1532 , H01J2237/31755
摘要： An ion beam apparatus is provided, the ion beam apparatus comprising a movable ion source, a condenser lens, an aperture, and a scanning unit disposed between the condenser lens and the aperture, said scanning unit being adapted to scan an ion beam across the aperture. Furthermore, a method for aligning components of an ion beam apparatus is provided, comprising the steps of: producing an ion beam by means of an ion source, producing a first image of a beam cross section of the ion beam at a first voltage of a condenser lens, producing a second image of the beam cross section of the ion beam at a second voltage of the condenser lens, and positioning the ion source so that the centers of the first and second images coincide.
摘要翻译：提供离子束装置，离子束装置包括可移动离子源，聚光透镜，孔径和设置在聚光透镜和孔之间的扫描单元，所述扫描单元适于扫过离子束穿过孔。此外，提供了一种用于对准离子束装置的部件的方法，包括以下步骤：通过离子源产生离子束，产生离子束的束截面的第一图像，其中第一电压为聚光透镜，在聚光透镜的第二电压下产生离子束的束横截面的第二图像，并且定位离子源使得第一和第二图像的中心重合。

3. 发明申请

US20130118586A1 CHARGED PARTICLE BEAM DEVICE, VACUUM VALVE THEREFOR AND OPERATION THEREOF 有权
标题翻译：充电颗粒光束装置，真空阀及其操作
公开(公告)号：US20130118586A1
公开(公告)日：2013-05-16
申请号：US13296885
申请日：2011-11-15
申请人： Thomas JASINSKI
发明人： Thomas JASINSKI
IPC分类号： F15D1/00 , F16K27/00 , F16K31/00
CPC分类号： F16K3/188 , F16K51/02 , Y10T137/0318
摘要： A valve unit configured for a charged particle beam device having a beam path 2 is described. The valve unit includes a vacuum sealed valve housing 102 configured for a pressure difference between the inside of the valve housing and the outside of the valve housing, wherein the housing provides a beam path portion 103 for having a charged particle beam pass therethrough along the beam path, a valve positioning unit adapted for selectively providing a first movement of the valve housing such that the beam path portion is selectively moved into and out of the beam path, and at least one sealing element 122 configured for a second movement, wherein the second movement is different from the first movement.
摘要翻译：描述了构造成具有光束路径2的带电粒子束装置的阀单元。阀单元包括真空密封阀壳体102，该真空密封阀壳体构造用于在阀壳体的内部和阀壳体的外部之间的压力差，其中壳体提供用于使带电粒子束沿着光束通过的光束路径部分103 阀门定位单元，其适于选择性地提供阀壳体的第一运动，使得光束路径部分被选择性地移入和移出光束路径;以及至少一个构造成用于第二运动的密封元件122，其中第二运动与第一动作不同。

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