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1. 发明授权

US08101922B2 Modular gas ion source 有权
标题翻译：模块化气体离子源
公开(公告)号：US08101922B2
公开(公告)日：2012-01-24
申请号：US12167734
申请日：2008-07-03
申请人： Dieter Winkler , Thomas Jasinski , Udo Weigel
发明人： Dieter Winkler , Thomas Jasinski , Udo Weigel
IPC分类号： H01T23/00
CPC分类号： H01J37/08 , H01J27/26 , H01J2237/006 , H01J2237/03 , H01J2237/0807
摘要： A gas field ion source is described. The gas field ion source includes an emitter module. The emitter module includes an emitter holder, an emitter structure, a detachably connectable electrical connection assembly of the emitter module, and a detachably connectable gas supply connection assembly of the emitter module. The gas field ion source further includes a supply module, wherein the supply module includes an electrical conductor for providing voltage and/or current, a gas supply conduit, a thermal conductor, a detachably connectable electrical connection assembly of the supply module, and a detachably connectable gas supply connection assembly of the supply module. The emitter module and the supply module are detachably connectable by the detachably connectable connection assemblies of the emitter module and the detachably connectable connection assemblies of the supply module.
摘要翻译：描述了气体场离子源。气体离子源包括发射器模块。发射器模块包括发射器支架，发射器结构，发射器模块的可拆卸连接的电连接组件以及发射器模块的可拆卸地连接的气体供应连接组件。所述气体离子源还包括供电模块，其中所述供应模块包括用于提供电压和/或电流的电导体，气体供应导管，热导体，所述供应模块的可拆卸地连接的电连接组件，供电模块的可连接气体供应连接组件。发射器模块和供电模块可通过发射器模块的可拆卸连接的连接组件和供应模块的可拆卸连接的连接组件可拆卸地连接。

2. 发明申请

US20090020708A1 MODULAR GAS ION SOURCE 有权
标题翻译：模块化气体源
公开(公告)号：US20090020708A1
公开(公告)日：2009-01-22
申请号：US12167734
申请日：2008-07-03
申请人： Dieter Winkler , Thomas Jasinski , Udo Weigel
发明人： Dieter Winkler , Thomas Jasinski , Udo Weigel
IPC分类号： H01J27/02
CPC分类号： H01J37/08 , H01J27/26 , H01J2237/006 , H01J2237/03 , H01J2237/0807
摘要： A gas field ion source is described. The gas field ion source includes an emitter module. The emitter module includes an emitter holder, an emitter structure, a detachably connectable electrical connection assembly of the emitter module, and a detachably connectable gas supply connection assembly of the emitter module. The gas field ion source further includes a supply module, wherein the supply module includes an electrical conductor for providing voltage and/or current, a gas supply conduit, a thermal conductor, a detachably connectable electrical connection assembly of the supply module, and a detachably connectable gas supply connection assembly of the supply module. The emitter module and the supply module are detachably connectable by the detachably connectable connection assemblies of the emitter module and the detachably connectable connection assemblies of the supply module.
摘要翻译：描述了气体场离子源。气体离子源包括发射器模块。发射器模块包括发射器支架，发射器结构，发射器模块的可拆卸连接的电连接组件以及发射器模块的可拆卸地连接的气体供应连接组件。所述气体离子源还包括供电模块，其中所述供应模块包括用于提供电压和/或电流的电导体，气体供应导管，热导体，所述供应模块的可拆卸地连接的电连接组件，供电模块的可连接气体供应连接组件。发射器模块和供电模块可通过发射器模块的可拆卸连接的连接组件和供应模块的可拆卸连接的连接组件可拆卸地连接。

3. 发明授权

US08785849B2 Ultra high precision measurement tool 有权
标题翻译：超高精度测量工具
公开(公告)号：US08785849B2
公开(公告)日：2014-07-22
申请号：US12133298
申请日：2008-06-04
申请人： Juergen Frosien , Dieter Winkler , Udo Weigel , Stefan Grimm
发明人： Juergen Frosien , Dieter Winkler , Udo Weigel , Stefan Grimm
IPC分类号： G21K5/04
CPC分类号： H01J37/08 , H01J27/26 , H01J37/28 , H01J2237/004 , H01J2237/061 , H01J2237/0807 , H01J2237/244 , H01J2237/24514 , H01J2237/24535 , H01J2237/24564 , H01J2237/24578 , H01J2237/2594 , H01J2237/2623 , H01J2237/2816 , H01J2237/2817
摘要： A focused ion beam device is described comprising a gas field ion source with an analyzer for analyzing and classifying the structure of a specimen, a controller for controlling and/or modifying the structure of the specimen according to the analysis of the analyzer, an emitter tip, the emitter tip has a base tip comprising a first material and a supertip comprising a material different from the first material, wherein the supertip is a single atom tip and the base tip is a single crystal base tip. Furthermore, the focused ion beam device has a probe current control and a sample charge control. A method of operating a focused ion beam device is provided comprising applying a voltage between a single emission center of the supertip and an electrode, supplying gas to the emitter tip, analyzing and classifying the structure of a specimen, and controlling the structure of the specimen.
摘要翻译：描述了一种聚焦离子束装置，其包括气体离子源，其具有用于分析和分类样品结构的分析器，用于根据分析仪的分析来控制和/或改变样品的结构的控制器，发射器尖端发射极尖端具有包括第一材料和超高压头的基座尖端，所述第一材料和第一材料包括不同于所述第一材料的材料，其中所述超高压是单个原子尖端，并且所述基座尖端是单晶基底尖端。此外，聚焦离子束装置具有探针电流控制和样品充电控制。提供了一种操作聚焦离子束装置的方法，包括在超高压的单个发射中心和电极之间施加电压，向发射极尖端供应气体，分析和分类样品的结构，以及控制样品的结构。

4. 发明申请

US20090121160A1 CHARGED PARTICLE SOURCE WITH AUTOMATED TIP FORMATION 有权
标题翻译：充电颗粒源自动提示形成
公开(公告)号：US20090121160A1
公开(公告)日：2009-05-14
申请号：US12253042
申请日：2008-10-16
申请人： Dieter Winkler , Udo Weigel , Stefan Grimm
发明人： Dieter Winkler , Udo Weigel , Stefan Grimm
IPC分类号： G01J1/00
CPC分类号： H01J37/073 , H01J27/26 , H01J37/08 , H01J37/265 , H01J37/304 , H01J2237/06341 , H01J2237/0805 , H01J2237/0807 , H01J2237/30466 , H01J2237/30477 , H01J2237/31749
摘要： A charged particle beam device is described. The device includes an emitter unit including an emitter tip; a voltage supply unit adapted for providing a stable voltage to generate a stable extraction field at the emitter tip; a pulsed voltage supply member adapted for providing a pulsed voltage to generate a pulsed extraction field on top of the stable extraction field; a measuring unit for measuring an emitter characteristic; and a control unit adapted for receiving a signal from the measuring unit and for control of the pulsed voltage supply member.
摘要翻译：描述带电粒子束装置。该装置包括发射器单元，其包括发射极尖端; 电压供应单元，适于提供稳定的电压以在发射极尖端处产生稳定的提取场; 脉冲电压供应构件，其适于提供脉冲电压以在所述稳定提取场的顶部产生脉冲提取场; 用于测量发射极特性的测量单元; 以及控制单元，适于接收来自测量单元的信号并用于控制脉冲电压供应构件。

5. 发明授权

US08330130B2 Charged particle source with automated tip formation 有权
标题翻译：具有自动尖端形成的带电粒子源
公开(公告)号：US08330130B2
公开(公告)日：2012-12-11
申请号：US12253042
申请日：2008-10-16
申请人： Dieter Winkler , Udo Weigel , Stefan Grimm
发明人： Dieter Winkler , Udo Weigel , Stefan Grimm
IPC分类号： G01J1/00
CPC分类号： H01J37/073 , H01J27/26 , H01J37/08 , H01J37/265 , H01J37/304 , H01J2237/06341 , H01J2237/0805 , H01J2237/0807 , H01J2237/30466 , H01J2237/30477 , H01J2237/31749
摘要： A charged particle beam device is described. The device includes an emitter unit including an emitter tip; a voltage supply unit adapted for providing a stable voltage to generate a stable extraction field at the emitter tip; a pulsed voltage supply member adapted for providing a pulsed voltage to generate a pulsed extraction field on top of the stable extraction field; a measuring unit for measuring an emitter characteristic; and a control unit adapted for receiving a signal from the measuring unit and for control of the pulsed voltage supply member.
摘要翻译：描述带电粒子束装置。该装置包括发射器单元，其包括发射极尖端; 电压供应单元，适于提供稳定的电压以在发射极尖端处产生稳定的提取场; 脉冲电压供应构件，其适于提供脉冲电压以在所述稳定提取场的顶部产生脉冲提取场; 用于测量发射极特性的测量单元; 以及控制单元，适于接收来自测量单元的信号并用于控制脉冲电压供应构件。

6. 发明授权

US08143589B2 Stable emission gas ion source and method for operation thereof 有权
标题翻译：稳定的排放气体离子源及其操作方法
公开(公告)号：US08143589B2
公开(公告)日：2012-03-27
申请号：US12420384
申请日：2009-04-08
申请人： Dieter Winkler , Udo Weigel , Stefan Grimm
发明人： Dieter Winkler , Udo Weigel , Stefan Grimm
IPC分类号： H01J37/08
CPC分类号： H01J37/08 , H01J27/26 , H01J2237/006 , H01J2237/022 , H01J2237/0807 , H01J2237/28
摘要： A method of operating a focused ion beam device for emitting during operation a focused ion beam including ions of a gas generated at a first partial pressure, comprising cleaning an emitter tip positioned in an emitter tip region of the focused ion beam device, the cleaning comprises introducing the gas into the emitter tip region such that the gas has a second partial pressure of at least two times the first pressure. Further, a focused ion beam device is provided, comprising a gas field emitter tip (13) in an emitter tip region emitting an ion beam including ions of a gas, a gas inlet for supplying a gas with different pressures (110), a gas outlet (120), a pressure measurement device for measuring the pressure in the emitter tip region and a control unit (130) for controlling switching between an operation mode and a cleaning mode, further controlling the pressures in the emitter tip region and being connected to the pressure measurement device.
摘要翻译：一种操作聚焦离子束装置的方法，用于在操作期间发射包括以第一分压产生的气体的离子的聚焦离子束，包括清洁位于聚焦离子束装置的发射极尖端区域中的发射极尖端，所述清洁包括将气体引入发射极尖端区域，使得气体具有至少两倍于第一压力的第二分压。此外，提供聚焦离子束装置，其包括发射极尖端区域中的气体发射极尖端（13），其发射包括气体离子的离子束，用于供应不同压力的气体的气体入口（110），气体出口（120），用于测量发射极尖端区域中的压力的压力测量装置和用于控制操作模式和清洁模式之间的切换的控制单元（130），进一步控制发射极尖端区域中的压力并连接到压力测量装置。

7. 发明授权

US08044370B2 Gas ion source with high mechanical stability 有权
标题翻译：气体离子源具有较高的机械稳定性
公开(公告)号：US08044370B2
公开(公告)日：2011-10-25
申请号：US12199574
申请日：2008-08-27
申请人： Dieter Winkler , Thomas Jasinski
发明人： Dieter Winkler , Thomas Jasinski
IPC分类号： H01T23/00
CPC分类号： F25D19/006 , F25B2500/13 , H01J27/26 , H01J37/08 , H01J37/28 , H01J2237/002 , H01J2237/0216 , H01J2237/061 , H01J2237/0807 , Y10T29/49826
摘要： A gas field ion source is described for a charged particle beam device having a charged particle beam column. The gas field ion source includes an emitter unit, a cooling unit, and a thermal conductivity unit for thermal conductivity from the cooling unit to the emitter unit, wherein the thermal conductivity unit is adapted for reduction of vibration transfer from the cooling unit to the emitter unit.
摘要翻译：对具有带电粒子束柱的带电粒子束装置描述了气体场离子源。气体离子源包括发射器单元，冷却单元和用于从冷却单元到发射器单元的导热性的导热单元，其中导热单元适于减少从冷却单元到发射极的振动传递单元。

8. 发明申请

US20070138404A1 Chamber with low electron stimulated desorption 审中-公开
标题翻译：具有低电子刺激解吸的室
公开(公告)号：US20070138404A1
公开(公告)日：2007-06-21
申请号：US10571519
申请日：2004-09-09
申请人： Juergen Frosien , Thomas Jasinski , Dieter Winkler
发明人： Juergen Frosien , Thomas Jasinski , Dieter Winkler
IPC分类号： G01K1/08
CPC分类号： H01J37/16 , H01J5/02 , H01J2237/188
摘要： The present invention provides a charged particle emission component (100) for providing a charged particle beam (17) to a chamber of a charged particle beam column. The device comprises a gun chamber for housing the charged particle emission component; an emitter (16) for emitting a beam of charged particles; at least one beam shaping element (109; 18; 108; 402); and a residual gas diffusion barrier (106; 206) directly subsequent the emitter.
摘要翻译：本发明提供了一种用于向带电粒子束柱的腔室提供带电粒子束（17）的带电粒子发射部件（100）。该装置包括用于容纳带电粒子发射部件的枪室; 用于发射带电粒子束的发射器（16）; 至少一个光束成形元件（109; 18; 108; 402）; 和直接在发射器之后的残留气体扩散阻挡层（106; 206）。

9. 发明申请

US20070085019A1 Cooling module for charged particle beam column elements 有权
标题翻译：用于带电粒子束柱元件的冷却模块
公开(公告)号：US20070085019A1
公开(公告)日：2007-04-19
申请号：US11240279
申请日：2005-09-30
申请人： Thomas Jasinski , Dieter Winkler , William Eckes
发明人： Thomas Jasinski , Dieter Winkler , William Eckes
IPC分类号： H01J1/50
CPC分类号： H01J37/141 , H01J2237/002
摘要： We have developed a method and apparatus for cooling electromagnetic lens coils of the kind used in charged particle beams. The method and apparatus provide not only a symmetrical cooling effect around the optical axis of the charged particle beam, but also provide improved uniformity of heat transfer. This improved uniformity enables control over the optical axis of the charged particle beam within about 1 nm for high current charged particle beam columns, wherein the current ranges from about 100 nanoamps to about 1000 nanoamps. The use of a squat and wide electromagnetic lens coil in combination with an essentially flat modular cooling panel, which provides uniform cooling to the electromagnetic lens coil, not only enables control over the optical axis of the charged particle beam, but also provides mechanical stability for the charged particle beam column.
摘要翻译：我们开发了一种用于冷却带电粒子束中使用的电磁透镜线圈的方法和装置。该方法和装置不仅提供了带电粒子束的光轴周围的对称冷却效果，而且提供了改善的传热均匀性。这种改进的均匀性使得能够对高电流带电粒子束柱控制带电粒子束的光轴在约1nm内，其中电流范围为约100纳安 - 约1000纳帕。使用蹲式和宽电磁透镜线圈与基本上平坦的模块化冷却面板组合，其提供对电磁透镜线圈的均匀冷却，不仅能够控制带电粒子束的光轴，而且还提供机械稳定性带电粒子束柱。

10. 发明授权

US07345287B2 Cooling module for charged particle beam column elements 有权
标题翻译：用于带电粒子束柱元件的冷却模块
公开(公告)号：US07345287B2
公开(公告)日：2008-03-18
申请号：US11240279
申请日：2005-09-30
申请人： Thomas Jasinski , Dieter Winkler , William A. Eckes
发明人： Thomas Jasinski , Dieter Winkler , William A. Eckes
IPC分类号： H01J1/50 , F28D15/00
CPC分类号： H01J37/141 , H01J2237/002
摘要： We have developed a method and apparatus for cooling electromagnetic lens coils of the kind used in charged particle beams. The method and apparatus provide not only a symmetrical cooling effect around the optical axis of the charged particle beam, but also provide improved uniformity of heat transfer. This improved uniformity enables control over the optical axis of the charged particle beam within about 1 nm for high current charged particle beam columns, wherein the current ranges from about 100 nanoamps to about 1000 nanoamps. The use of a squat and wide electromagnetic lens coil in combination with an essentially flat modular cooling panel, which provides uniform cooling to the electromagnetic lens coil, not only enables control over the optical axis of the charged particle beam, but also provides mechanical stability for the charged particle beam column.
摘要翻译：我们开发了一种用于冷却带电粒子束中使用的电磁透镜线圈的方法和装置。该方法和装置不仅提供了带电粒子束的光轴周围的对称冷却效果，而且提供了改善的传热均匀性。这种改进的均匀性使得能够对高电流带电粒子束柱控制带电粒子束的光轴在约1nm内，其中电流范围为约100纳安 - 约1000纳帕。使用蹲式和宽电磁透镜线圈与基本上平坦的模块化冷却面板组合，其提供对电磁透镜线圈的均匀冷却，不仅能够控制带电粒子束的光轴，而且还提供机械稳定性带电粒子束柱。

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