专利快速检索-快速检索全球专利，免费商用专利数据库-IPRDB

1. 发明授权

US08522890B2 Power tool having lubricant leakage preventing structure 有权
标题翻译：电动工具具有防漏油结构
公开(公告)号：US08522890B2
公开(公告)日：2013-09-03
申请号：US12973589
申请日：2010-12-20
申请人： Satoshi Abe , Takahiro Okubo
发明人： Satoshi Abe , Takahiro Okubo
IPC分类号： B25D17/26
CPC分类号： B25D17/26 , B25D2250/185
摘要： A power tool includes a housing, an electric motor, a speed change mechanism, and a protrusion member. The housing defines therein a mechanism chamber. A lubricant is inserted in an interior of the mechanical chamber. The electric motor is accommodated in the housing. The speed change mechanism is disposed in the mechanism chamber and connected to the motor for shift-transmitting rotation of the motor. The protrusion member protrudes to the mechanism chamber from the housing in a protrusion direction. The protrusion member provides a communication passage that has one opening open at a leading end side of the protrusion member in the protrusion direction and another opening open to an exterior of the mechanical chamber. At least a part of the protrusion member provides the communication passage and is made from a resilient material.
摘要翻译：电动工具包括壳体，电动机，变速机构和突出部件。壳体中限定有机构室。将润滑剂插入机械室的内部。电动机容纳在壳体中。变速机构设置在机构室中并连接到电动机用于电动机的换档转动。突出部件在突出方向上从壳体突出到机构室。突出部件提供一个连通通道，该连通通道在突出方向的突出部件的前端侧具有一个开口，另一个开口通向机械室的外部。突起构件的至少一部分提供连通通道并且由弹性材料制成。

2. 发明申请

US20100116293A1 SUBSTRATE PROCESSING SYSTEM AND METHOD OF CONTROLLING THE SAME 有权
标题翻译：基板处理系统及其控制方法
公开(公告)号：US20100116293A1
公开(公告)日：2010-05-13
申请号：US12690747
申请日：2010-01-20
申请人： Yoshio Kimura , Takahiro Okubo
发明人： Yoshio Kimura , Takahiro Okubo
IPC分类号： B08B3/02
CPC分类号： H01L21/67178 , H01L21/67184 , H01L21/6719
摘要： A process system includes a plurality of processing modules each processing a substrate with a process liquid. There is disposed a dispensing mechanism that dispenses the process liquid to the vertically arranged modules. The dispensing mechanism is provided with a process liquid supply source, and pumps corresponding to the respective processing modules. Each pump temporarily stores therein the process liquid which has been pressure-fed through a riser piping from the process liquid supply source by a pressing apparatus, and delivers the process liquid from an outlet. There are disposed nozzles each having a discharge port and discharging the process liquid to the corresponding processing module. Delivery pipings connecting the outlets of the pumps with the discharge ports of the corresponding nozzles have identical length to each other.
摘要翻译：处理系统包括多个处理模块，每个处理模块用处理液处理衬底。设置了将处理液体分配给垂直排列的模块的分配机构。分配机构设置有处理液体供应源和对应于各个处理模块的泵。每个泵临时存储已经通过加压装置从处理液体供给源通过提升管道进给的处理液体，并且从出口输送处理液体。设有各自具有排出口并且将处理液体排出到相应的处理模块的喷嘴。将泵的出口与相应喷嘴的排出口连接的输送管道彼此具有相同的长度。

3. 发明授权

US07323063B2 Apparatus for changing concentration of treatment solution and treatment solution supply apparatus 失效
标题翻译：用于改变处理溶液浓度和处理溶液供应装置的装置
公开(公告)号：US07323063B2
公开(公告)日：2008-01-29
申请号：US10134509
申请日：2002-04-30
申请人： Takahiro Okubo , Hiroyuki Miyamoto
发明人： Takahiro Okubo , Hiroyuki Miyamoto
IPC分类号： B05D1/00
CPC分类号： H01L21/67253 , G03F7/3057 , H01L21/6715
摘要： According to the present invention, in changing the concentration of a treatment solution supplied to a substrate, a volume of an existing treatment solution in a tank connected to a treatment solution supply section for supplying the treatment solution to the substrate is first measured. Based on this measured value, a minimum drain volume of the existing treatment solution to be drained out from the tank and a supply volume of either a treatment solution with a predetermined concentration or a diluting fluid to be supplied into the tank is calculated respectively in order to change the treatment solution in the tank to be in an intended volume and to have an intended concentration. Then, the calculated drain volume of the existing treatment solution is drained out from the tank. Meanwhile, the calculated supply volume of either the treatment solution with the predetermined concentration or the diluting fluid is supplied into the tank. According to the present invention, since the drain volume in changing the concentration of the treatment solution can be reduced, a wasteful consumption volume of the treatment solution is reduced accordingly so that cost reduction can be realized. Moreover, the time required for the concentration change can be shortened.
摘要翻译：根据本发明，在改变供给到基板的处理液的浓度时，首先测量与将处理液供给到基板的处理液供给部连接的槽中的现有处理液的体积。基于该测量值，分别按顺序计算待从罐中排出的现有处理溶液的最小排出体积和要供给到罐中的预定浓度的处理溶液或稀释液的供应体积，将罐中的处理溶液改变成预期体积并具有预期浓度。然后，从罐中排出现有处理溶液的排出量。同时，将计算出的具有预定浓度的处理溶液的供应量或稀释液供给到罐中。根据本发明，由于可以减少改变处理液浓度的排水容积，相应地减少了处理液的浪费的消耗体积，能够实现成本降低。此外，可以缩短浓度变化所需的时间。

4. 发明申请

US20050223980A1 Substrate processing device, substrate processing method, and developing device 有权
标题翻译：基板加工装置，基板加工方法及显影装置
公开(公告)号：US20050223980A1
公开(公告)日：2005-10-13
申请号：US10515635
申请日：2003-05-16
申请人： Tetsutoshi Awamura , Yukio Kiba , Keiichi Tanaka , Takahiro Okubo , Shuuichi Nishikido
发明人： Tetsutoshi Awamura , Yukio Kiba , Keiichi Tanaka , Takahiro Okubo , Shuuichi Nishikido
IPC分类号： G03F7/30 , H01L21/00 , B05C5/00 , B05B7/00 , B05B9/06
CPC分类号： H01L21/67178 , G03F7/30 , G03F7/3021 , H01L21/6715 , H01L21/67184 , H01L21/67225
摘要： Rinsing nozzles 310a to 310e are moved on a wafer W while they are discharging rinsing solution 326. At that point, discharging openings 317a to 317e are contacted to developing solution 350 coated on the wafer W or rinsing solution 326 on the wafer W. Thus, the impact against the wafer W can be suppressed. As a result, pattern collapse can be prevented. In addition, a front portion of the developing solution 350 can push away the developing solution 350.
摘要翻译：冲洗喷嘴310a至310e在排出冲洗溶液326时在晶片W上移动。此时，排出口317a至317e与涂覆在晶片W上的显影液350或晶片W上的漂洗溶液326接触。因此，能够抑制对晶片W的冲击。结果，可以防止图案倒塌。此外，显影液350的前面部分可以推开显影液350。

5. 发明授权

US06183147B2 Process solution supply system, substrate processing apparatus employing the system, and intermediate storage mechanism employed in the system 有权
标题翻译：工艺溶液供给系统，采用该系统的基板处理装置以及在该系统中采用的中间储存机构
公开(公告)号：US06183147B2
公开(公告)日：2001-02-06
申请号：US09312581
申请日：1999-05-14
申请人： Yoshio Kimura , Takahiro Okubo
发明人： Yoshio Kimura , Takahiro Okubo
IPC分类号： G03D500
CPC分类号： G03D5/00
摘要： A process solution supply system, comprising a process solution supply source from which a process solution is supplied, an intermediate storage mechanism for temporarily storing the process solution supplied from the process solution supply source and for supplying the process solution with predetermined pressure applied thereto, and a fluid supply mechanism for supplying the intermediate storage mechanism with a fluid which applies pressure to the process solution stored in the intermediate storage mechanism, the intermediate storage mechanism including a vessel which has an introduction port and a discharge port for the process solution, stores the process solution supplied through the introduction port and can discharge the process solution, and a compressing member, arranged inside the vessel to be located between the process solution and the fluid supplied from the fluid supply mechanism, for permitting pressure of the fluid to act on the process solution.
摘要翻译：一种处理溶液供应系统，包括从其提供处理溶液的处理溶液供应源，用于临时存储从处理溶液供应源提供的处理溶液并用于向施加到其上施加预定压力的处理溶液供应的中间储存机构，以及用于向中间存储机构供应向存储在中间存储机构中的处理溶液施加压力的流体的流体供给机构，包括具有用于处理液的引入口和排出口的容器的中间储存机构，通过引入口提供的处理溶液并且可以排出处理溶液;以及压缩构件，布置在容器内部，以位于处理溶液和从流体供应机构供应的流体之间，以允许流体作用在流体供应机构上的压力过程解决方案。

6. 发明申请

US20130186661A1 Power Tool 审中-公开
标题翻译：电动工具
公开(公告)号：US20130186661A1
公开(公告)日：2013-07-25
申请号：US13639150
申请日：2011-09-13
申请人： Takahiro Okubo , Kazutaka Iwata
发明人： Takahiro Okubo , Kazutaka Iwata
IPC分类号： B25F5/00
CPC分类号： B25F5/00 , B25D11/005 , B25D2211/006 , B25D2211/061 , B25D2250/095 , B25D2250/131 , B25D2250/221
摘要： A power tool including: a housing configured to support an end bit, a motor accommodated in the housing, a transmission mechanism, a trigger switch, a load judging unit, and a motor stop control unit. The transmission mechanism transmits a rotational force of the motor to the end bit. The trigger switch is configured to switch between instructions to the motor. The instructions include a rotation instruction for providing a rotation state of the motor and a stopping instruction for providing a stopping state of the motor. The load judging unit judges whether or not a load is applied to the end bit during rotation of the motor. The motor stop control unit stops the rotation of the motor irrespective of the instructions of the trigger switch when the load judging unit judges that no load is applied to the end bit and a period of a non-load state exceeds a predetermined time period.
摘要翻译：一种电动工具，包括：构造成支撑端头的壳体，容纳在壳体中的电动机，变速机构，触发开关，负载判定单元和电动机停止控制单元。传动机构将电动机的旋转力传递到终点。触发开关配置为在电机指令之间切换。指令包括用于提供电动机的旋转状态的旋转指令和用于提供电动机的停止状态的停止指令。负载判断单元判断在电动机旋转期间是否向端部位施加负载。当负载判断单元判断没有负载施加到结束位并且非负载状态的周期超过预定时间段时，电动机停止控制单元停止电动机的旋转，而不管触发开关的指令如何。

7. 发明申请

US20110155402A1 Power Tool Having Lubricant Leakage Preventing Structure 有权
标题翻译：具有润滑剂泄漏防止结构的电动工具
公开(公告)号：US20110155402A1
公开(公告)日：2011-06-30
申请号：US12973589
申请日：2010-12-20
申请人： Satoshi Abe , Takahiro Okubo
发明人： Satoshi Abe , Takahiro Okubo
IPC分类号： B25D17/26 , B25D11/00
CPC分类号： B25D17/26 , B25D2250/185
摘要： A power tool includes a housing, an electric motor, a speed change mechanism, and a protrusion member. The housing defines therein a mechanism chamber. A lubricant is inserted in an interior of the mechanical chamber. The electric motor is accommodated in the housing. The speed change mechanism is disposed in the mechanism chamber and connected to the motor for shift-transmitting rotation of the motor. The protrusion member protrudes to the mechanism chamber from the housing in a protrusion direction. The protrusion member provides a communication passage that has one opening open at a leading end side of the protrusion member in the protrusion direction and another opening open to an exterior of the mechanical chamber. At least a part of the protrusion member provides the communication passage and is made from a resilient material.
摘要翻译：电动工具包括壳体，电动机，变速机构和突出部件。壳体中限定有机构室。将润滑剂插入机械室的内部。电动机容纳在壳体中。变速机构设置在机构室中并连接到电动机用于电动机的换档转动。突出部件在突出方向上从壳体突出到机构室。突出部件提供一个连通通道，该连通通道在突出方向的突出部件的前端侧具有一个开口，另一个开口通向机械室的外部。突起构件的至少一部分提供连通通道并且由弹性材料制成。

8. 发明授权

US07918242B2 Processing solution supply system, processing solution supply method and recording medium for storing processing solution supply control program 有权
标题翻译：处理液供应系统，处理液供应方式和存储处理液供应控制程序的记录介质
公开(公告)号：US07918242B2
公开(公告)日：2011-04-05
申请号：US11798597
申请日：2007-05-15
申请人： Junya Minamida , Takahiro Okubo
发明人： Junya Minamida , Takahiro Okubo
IPC分类号： F04F1/10
CPC分类号： G03D3/02 , Y10T137/3127
摘要： A processing solution pressurized at a constant pressure is supplied to improve processing accuracy. A controller receives a pressure signal indicating a measured pressure exerted on a processing solution from a pressure sensor, and controls an electropneumatic regulator on the basis of the pressure signal so that pressure on the discharge side of the electropneumatic regulator is constant. The controller decides whether the processing solution contained in a processing solution tank has been depleted on the basis of a difference between a desired pressure and the pressure measured by the pressure sensor, and switches pressurizing shut-off valves accordingly.
摘要翻译：提供以恒定压力加压的处理溶液以提高加工精度。控制器从压力传感器接收指示施加在处理溶液上的测量压力的压力信号，并且基于压力信号控制电动气动调节器，使得电动气动调节器的排出侧的压力恒定。控制器基于期望压力和由压力传感器测量的压力之间的差异来决定处理溶液罐中包含的处理溶液是否已经耗尽，并且相应地切换加压切断阀。

9. 发明申请

US20080063786A1 METHOD FOR CHANGING CONCENTRATION OF TREATMENT SOLUTION AND TREATMENT SOLUTION SUPPLY APPARATUS 审中-公开
标题翻译：改善治疗方案和治疗方案供应设备的方法
公开(公告)号：US20080063786A1
公开(公告)日：2008-03-13
申请号：US11926873
申请日：2007-10-29
申请人： Takahiro OKUBO , Hiroyuki MIYAMOTO
发明人： Takahiro OKUBO , Hiroyuki MIYAMOTO
IPC分类号： B05D1/00
CPC分类号： H01L21/67253 , G03F7/3057 , H01L21/6715
摘要： According to the present invention, in changing the concentration of a treatment solution supplied to a substrate, a volume of an existing treatment solution in a tank connected to a treatment solution supply section for supplying the treatment solution to the substrate is first measured. Based on this measured value, a minimum drain volume of the existing treatment solution to be drained out from the tank and a supply volume of either a treatment solution with a predetermined concentration or a diluting fluid to be supplied into the tank is calculated respectively in order to change the treatment solution in the tank to be in an intended volume and to have an intended concentration. Then, the calculated drain volume of the existing treatment solution is drained out from the tank. Meanwhile, the calculated supply volume of either the treatment solution with the predetermined concentration or the diluting fluid is supplied into the tank. According to the present invention, since the drain volume in changing the concentration of the treatment solution can be reduced, a wasteful consumption volume of the treatment solution is reduced accordingly so that cost reduction can be realized. Moreover, the time required for the concentration change can be shortened.
摘要翻译：根据本发明，在改变供给到基板的处理液的浓度时，首先测量与将处理液供给到基板的处理液供给部连接的槽中的现有处理液的体积。基于该测量值，分别按顺序计算待从罐中排出的现有处理溶液的最小排出体积和要供给到罐中的具有预定浓度的处理溶液或稀释液的供应体积将罐中的处理溶液改变成预期体积并具有预期浓度。然后，从罐中排出现有处理溶液的排出量。同时，将计算出的具有预定浓度的处理溶液的供应量或稀释液供给到罐中。根据本发明，由于可以减少改变处理液浓度的排水容积，相应地减少了处理液的浪费的消耗体积，能够实现成本降低。此外，可以缩短浓度变化所需的时间。

10. 发明授权

US08892023B2 Image forming apparatus with width-wise sheet shifting mechanism 有权
标题翻译：具有宽度方向的纸张移动机构的图像形成装置
公开(公告)号：US08892023B2
公开(公告)日：2014-11-18
申请号：US13659339
申请日：2012-10-24
申请人： Yusuke Kawanago , Takahiro Okubo , Masahiro Matsuo , Yoshiteru Kawakami , Haruki Motegi , Osamu Yoshimura , Kunihiro Kawachi , Ken Nonaka
发明人： Yusuke Kawanago , Takahiro Okubo , Masahiro Matsuo , Yoshiteru Kawakami , Haruki Motegi , Osamu Yoshimura , Kunihiro Kawachi , Ken Nonaka
IPC分类号： G03G15/00 , B65H7/02 , G03G15/01
CPC分类号： G03G15/0189 , G03G15/6561
摘要： An image forming apparatus acquires an amount of deflection of the transporting sheet from a reference position thereof and calculates a required shift amount of the sheet. It determines whether or not the sheet is shifted frontward. If so, the image forming apparatus acquires a second specified shift value which is determined based on an urging force and the required shift amount using a second correction equation. Alternatively, if the sheet is shifted backward, the image forming apparatus acquires a first specified shift value which is determined based on the urging force and the required shift amount using a first correction equation. The image forming apparatus performs a registration roller shift correction based on the acquired first or second specified shift value.
摘要翻译：图像形成装置从基准位置获取运送纸张的偏转量，并计算纸张的所需移动量。它确定纸张是否向前移动。如果是这样，图像形成装置获取基于使用第二校正方程的推动力和所需移动量确定的第二指定移位值。或者，如果片材向后移动，则图像形成装置使用第一校正方程获取基于推动力和所需移动量确定的第一指定移位值。图像形成装置基于获取的第一或第二指定移位值执行对位辊移位校正。

你已经成功收藏专利！

检索式保存成功!

IPRDB

热门服务

关于我们

友情链接

联系方式