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1. 发明申请

US20080063786A1 METHOD FOR CHANGING CONCENTRATION OF TREATMENT SOLUTION AND TREATMENT SOLUTION SUPPLY APPARATUS 审中-公开
标题翻译：改善治疗方案和治疗方案供应设备的方法
公开(公告)号：US20080063786A1
公开(公告)日：2008-03-13
申请号：US11926873
申请日：2007-10-29
申请人： Takahiro OKUBO , Hiroyuki MIYAMOTO
发明人： Takahiro OKUBO , Hiroyuki MIYAMOTO
IPC分类号： B05D1/00
CPC分类号： H01L21/67253 , G03F7/3057 , H01L21/6715
摘要： According to the present invention, in changing the concentration of a treatment solution supplied to a substrate, a volume of an existing treatment solution in a tank connected to a treatment solution supply section for supplying the treatment solution to the substrate is first measured. Based on this measured value, a minimum drain volume of the existing treatment solution to be drained out from the tank and a supply volume of either a treatment solution with a predetermined concentration or a diluting fluid to be supplied into the tank is calculated respectively in order to change the treatment solution in the tank to be in an intended volume and to have an intended concentration. Then, the calculated drain volume of the existing treatment solution is drained out from the tank. Meanwhile, the calculated supply volume of either the treatment solution with the predetermined concentration or the diluting fluid is supplied into the tank. According to the present invention, since the drain volume in changing the concentration of the treatment solution can be reduced, a wasteful consumption volume of the treatment solution is reduced accordingly so that cost reduction can be realized. Moreover, the time required for the concentration change can be shortened.
摘要翻译：根据本发明，在改变供给到基板的处理液的浓度时，首先测量与将处理液供给到基板的处理液供给部连接的槽中的现有处理液的体积。基于该测量值，分别按顺序计算待从罐中排出的现有处理溶液的最小排出体积和要供给到罐中的具有预定浓度的处理溶液或稀释液的供应体积将罐中的处理溶液改变成预期体积并具有预期浓度。然后，从罐中排出现有处理溶液的排出量。同时，将计算出的具有预定浓度的处理溶液的供应量或稀释液供给到罐中。根据本发明，由于可以减少改变处理液浓度的排水容积，相应地减少了处理液的浪费的消耗体积，能够实现成本降低。此外，可以缩短浓度变化所需的时间。

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