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1. 发明申请

US20050002012A1 Stage apparatus, static pressure bearing apparatus, positioning method, exposure apparatus and method for manufacturing device 审中-公开
标题翻译：平台装置，静压轴承装置，定位方法，曝光装置及制造装置的方法
公开(公告)号：US20050002012A1
公开(公告)日：2005-01-06
申请号：US10845206
申请日：2004-05-14
申请人： Shigeo Sakino , Yoshimasa Fukushima
发明人： Shigeo Sakino , Yoshimasa Fukushima
IPC分类号： F16C32/06 , G03F7/20 , G11B5/31 , H01L21/027 , H01L21/68 , G11B5/027
CPC分类号： F16C29/025 , F16C32/0603 , F16C33/748 , F16C39/02 , F16C2300/62 , G03F7/70716 , G03F7/70816 , G03F7/7095 , G11B5/3163
摘要： Using a conductive material having volume resistance of approximately 1E−3 Ω·cm or above for a movable guide 3 axially supported by a static pressure bearing 10 makes it possible to sufficiently reduce deflection of beams caused by eddy current generated due to a leaked magnetic field from an electron lens of an electron beam exposure apparatus or deflection of beams due to the influences from increased charge by secondary electrons.
摘要翻译：对于由静压轴承10轴向支撑的可动引导件3，使用体积电阻大约为1E -3Ω·cm以上的导电材料，可以充分减少由于泄漏而产生的涡流引起的光束偏转来自电子束曝光装置的电子透镜的磁场或由于二次电子增加的电荷的影响而导致的光束的偏转。

2. 发明授权

US07535552B2 Moving/guiding apparatus and exposure apparatus using the same 有权
标题翻译：移动/引导装置和使用其的曝光装置
公开(公告)号：US07535552B2
公开(公告)日：2009-05-19
申请号：US10090163
申请日：2002-03-05
申请人： Shigeo Sakino
发明人： Shigeo Sakino
IPC分类号： G03B27/58 , G03B27/62 , G05G11/00
CPC分类号： G03F7/70816 , G03F7/70716 , G03F7/70841 , Y10T74/20354
摘要： A moving apparatus including a first movable body which moves in a first direction in a horizontal plane, a second movable body arranged in a location different from a location of the first movable body in a vertical direction, which moves in a second direction intersecting with the first direction in the horizontal plane, a first linear motor which moves the first movable body in the first direction, a second linear motor which moves the second movable body in the second direction, a third movable body which is moved in the first direction and is moved in the second direction, a vacuum container which puts the first, second and third movable bodies in a vacuum, driving force transmission rods, and a sealing mechanism for sealing the driving force transmission rods and the vacuum container.
摘要翻译：一种移动装置，包括：在水平面上沿第一方向移动的第一移动体;沿与第一移动体垂直方向交叉的第二方向移动的第二移动体，在第一方向上移动第一可移动体的第一线性马达，沿第二方向移动第二可移动体的第二线性马达，沿第一方向移动的第三可移动体，并且是第一方向沿第二方向移动的真空容器，其将第一，第二和第三移动体放置在真空中，驱动力传递杆和用于密封驱动力传递杆和真空容器的密封机构。

3. 发明申请

US20070076310A1 OPTICAL ELEMENT HOLDING APPARATUS, EXPOSURE APPARATUS AND DEVICE MANUFACTURING METHOD 有权
标题翻译：光学元件保持装置，曝光装置和装置制造方法
公开(公告)号：US20070076310A1
公开(公告)日：2007-04-05
申请号：US11532957
申请日：2006-09-19
申请人： Shigeo Sakino , Hirohito Ito , Shinji Uchida , Choshoku Sai , Katsumi Asada
发明人： Shigeo Sakino , Hirohito Ito , Shinji Uchida , Choshoku Sai , Katsumi Asada
IPC分类号： G02B7/02
CPC分类号： G02B7/183 , G03F7/70266 , G03F7/70825
摘要： At least one exemplary embodiment is directed to an optical element holding apparatus including a force generating actuator configured to deform the optical element, a measuring device configured to measure a position of the optical element, and a displacement causing actuator configured to position the optical element based on the measured position.
摘要翻译：至少一个示例性实施例涉及一种光学元件保持设备，该光学元件保持设备包括被配置为使光学元件变形的力产生致动器，被配置为测量光学元件的位置的测量装置以及被配置为基于光学元件定位的位移致动致动器在测量位置。

4. 发明授权

US06644855B2 Stage device, exposure apparatus, device manufacturing method and movement guidance method 有权
公开(公告)号：US06644855B2
公开(公告)日：2003-11-11
申请号：US10073594
申请日：2002-02-12
申请人： Shigeo Sakino , Mitsuru Inoue , Tadayuki Kubo
发明人： Shigeo Sakino , Mitsuru Inoue , Tadayuki Kubo
IPC分类号： F16C1700
CPC分类号： G03F7/70841 , F16C29/025 , F16C32/0614 , F16C33/748 , F16C2300/62 , G03F7/70716 , G03F7/70816 , H01J37/20 , H01L21/682
摘要： A stage device includes a table having a reference plane parallel to first and second directions; a driving body movable along the first direction; a moving body movable along the second direction with respect to the driving body; a static pressure bearing provided on the moving body; an exhaust groove provided surrounding the static pressure bearing; and a mechanism for delivering a gas of the static pressure bearing recovered by the exhaust groove between the moving body and the driving body. The adverse affects of piping on the moving body can be reduced and it is possible to position the moving body with high precision.

5. 发明授权

US5040431A Movement guiding mechanism 失效
标题翻译：运动引导机制
公开(公告)号：US5040431A
公开(公告)日：1991-08-20
申请号：US299340
申请日：1989-01-23
申请人： Shigeo Sakino , Eiji Osanai , Mahito Negishi , Michio Horikoshi , Mitsuru Inoue , Kazuya Ono
发明人： Shigeo Sakino , Eiji Osanai , Mahito Negishi , Michio Horikoshi , Mitsuru Inoue , Kazuya Ono
IPC分类号： F16C29/02 , G03F7/20 , H01L21/68
CPC分类号： F16C29/025 , F16C32/06 , G03F7/70716 , H01L21/68 , Y10S248/913 , Y10T74/20354
摘要： In a movement guiding device, two parallel stationary guides are fixed to a surface plate and plural hydrostatic gas or bearing members are provided for the surface plate and the stationary guides. A Y stage is moved in a Y-axis direction under the influence of these bearing members. Additional hydrostatic gas or air bearing members are provided in relation to the surface plate and the Y stage so as to support an X stage for movement in an X-axis direction orthogonal to the Y-axis direction. Guide of the Y stage in the X-axis direction is made by the stationary guides on the surface plate, while guide thereof in a Z-axis direction perpendicular to an X-Y plane is made by the surface plate. Guide of the X stage in the Y-axis direction is made by the Y stage, while the guide thereof in the Z-axis direction is made by the surface plate, similar to the Y stage. With such structure, any vibration, rolling, or otherwise, of the Y stage is not transmitted to the X stage. Thus, high-precision guide is attainable. Linear motors are used as drive sources for the X and Y stages, so that all movable portions are provided by non-contact structures. Further, suitable brake members are used, which members are operable at a time of an accident of the stage. By this, accidental collision of the stage and/or derailment of the stage from the guide can be prevented.
摘要翻译：在运动导向装置中，两个平行的固定导轨固定在一个表面板上，为表面板和固定导轨提供多个静压气体或轴承部件。在这些轴承部件的影响下，Y台架沿Y轴方向移动。相对于表面板和Y平台设置有额外的静液压气体或空气轴承构件，以支撑X平台在与Y轴方向正交的X轴方向上移动。通过表面板上的固定引导件在X轴方向上引导Y台的引导，而通过表面板在与X-Y平面垂直的Z轴方向上的引导。 X平台的Y轴方向的引导由Y台进行，其Z轴方向的引导部由表面板制成，与Y台相同。利用这种结构，Y阶段的任何振动，滚动或其他方式不会传递到X级。因此，可以实现高精度的引导。线性电动机用作X和Y级的驱动源，使得所有可移动部分由非接触结构提供。此外，使用合适的制动构件，这些构件在阶段事故发生时可操作。由此，可以防止舞台的意外碰撞和/或舞台从导轨脱轨。

6. 发明申请

US20060245035A1 Reflecting mirror and exposure apparatus using the same 失效
标题翻译：反射镜和使用其的曝光装置
公开(公告)号：US20060245035A1
公开(公告)日：2006-11-02
申请号：US11408881
申请日：2006-04-21
申请人： Shinji Uchida , Choshoku Sai , Katsumi Asada , Hirohito Ito , Shigeo Sakino
发明人： Shinji Uchida , Choshoku Sai , Katsumi Asada , Hirohito Ito , Shigeo Sakino
IPC分类号： G02B26/00
CPC分类号： G02B26/0825 , G03F7/70266
摘要： A mirror apparatus including a reflecting mirror reflecting light, partition walls, the walls and the reflecting mirror defining a plurality of air chambers, and a regulator regulating air pressure in at least one of the air chambers. With this configuration, the front surface of the reflecting mirror is deformed into a smooth shape so as to correct optical aberration.
摘要翻译：一种镜装置，包括反射光的反射镜，分隔壁，壁和反射镜，其限定多个空气室，以及调节器，其调节至少一个空气室中的空气压力。利用这种结构，反射镜的前表面变形为平滑的形状，以校正光学像差。

7. 发明授权

US5984470A Apparatus for producing color filter with alignment error detection 失效
标题翻译：用于生产带对准误差检测的滤色片的设备
公开(公告)号：US5984470A
公开(公告)日：1999-11-16
申请号：US634409
申请日：1996-04-18
申请人： Shigeo Sakino , Kazuaki Masuda , Shinsuke Tsuruoka , Toshikazu Sakai
发明人： Shigeo Sakino , Kazuaki Masuda , Shinsuke Tsuruoka , Toshikazu Sakai
IPC分类号： B41J2/01 , B41J2/14 , G02B5/20 , B41J3/407 , B41J23/00
CPC分类号： B41J2/14016 , B41J2/01 , G02B5/201 , B41J2202/09
摘要： This invention relates to a highly precise and efficient color filter producing apparatus, which is provided with at least a set of drawing heads for respectively generating ink jets of red, green and blue colors, movement device for moving, with a substrate on which a color filter is to be formed by drawing with said ink jets, in a plane having a predetermined distance from the drawing heads, displacement detection device for detecting relative displacement between the substrate and the drawing heads in directions of six degrees of freedom, device for detecting the reaching position on the substrate of the ink jet discharged from the drawing head, and alignment device for effecting alignment between the substrate and the drawing heads in directions of six degrees of freedom, based on the results of detection of the reaching position and of the relative displacement between the substrate and the drawing head in directions of six degrees of freedom.
摘要翻译：本发明涉及一种高精度和高效率的滤色器制造装置，其具有至少一组用于分别产生红色，绿色和蓝色的喷墨的绘图头，用于移动的移动装置，基底上具有颜色过滤器将通过用所述喷墨头在距离绘图头具有预定距离的平面中绘制而形成，位移检测装置用于检测基板和绘图头之间在六自由度方向上的相对位移的位移检测装置，用于检测基于从绘图头排出的喷墨基板上的到达位置，以及基于达到位置和相对位置的检测结果，在六个自由度的方向上实现基板和绘图头之间的对准的对准装置在六个自由度的方向上在基板和绘图头之间的位移。

8. 发明授权

US07443619B2 Optical element holding apparatus, exposure apparatus and device manufacturing method 有权
标题翻译：光学元件保持装置，曝光装置及装置的制造方法
公开(公告)号：US07443619B2
公开(公告)日：2008-10-28
申请号：US11532957
申请日：2006-09-19
申请人： Shigeo Sakino , Hirohito Ito , Shinji Uchida , Choshoku Sai , Katsumi Asada
发明人： Shigeo Sakino , Hirohito Ito , Shinji Uchida , Choshoku Sai , Katsumi Asada
IPC分类号： G02B7/02 , G02B7/182
CPC分类号： G02B7/183 , G03F7/70266 , G03F7/70825
摘要： At least one exemplary embodiment is directed to an optical element holding apparatus including a force generating actuator configured to deform the optical element, a measuring device configured to measure a position of the optical element, and a displacement causing actuator configured to position the optical element based on the measured position.
摘要翻译：至少一个示例性实施例涉及一种光学元件保持设备，该光学元件保持设备包括被配置为使光学元件变形的力产生致动器，被配置为测量光学元件的位置的测量装置以及被配置为基于光学元件定位的位移致动致动器在测量位置。

9. 发明授权

US06244702B1 Method and apparatus for producing color filter, color filter, liquid crystal display device and apparatus having the liquid crystal display device 有权
标题翻译：用于制造具有液晶显示装置的滤色器，滤色器，液晶显示装置和装置的方法和装置
公开(公告)号：US06244702B1
公开(公告)日：2001-06-12
申请号：US09394323
申请日：1999-09-13
申请人： Shigeo Sakino , Kazuaki Masuda , Shinsuke Tsuruoka , Toshikazu Sakai
发明人： Shigeo Sakino , Kazuaki Masuda , Shinsuke Tsuruoka , Toshikazu Sakai
IPC分类号： B41J3407
CPC分类号： B41J2/14016 , B41J2/01 , B41J2202/09 , G02B5/201
摘要： This invention relates to a highly precise and efficient color filter producing apparatus, which is provided with at least a set of drawing heads for respectively generating ink jets of red, green and blue colors, movement means for moving, with a substrate on which a color filter is to be formed by drawing with said ink jets, in a plane having a predetermined distance from the drawing heads, displacement detection means for detecting relative displacement between the substrate and the drawing heads in directions of six freedoms, means for detecting the reaching position on the substrate of the ink jet discharged from the drawing head, and alignment means for effecting alignment between the substrate and the drawing heads in directions of six freedoms, based on the results of detection of the reaching position and of the relative displacement between the substrate and the drawing head in directions of six freedoms.
摘要翻译：本发明涉及一种高精度和高效率的滤色器制造装置，其具有至少一组用于分别产生红色，绿色和蓝色墨水的绘图头的移动装置，该装置用于移动具有颜色过滤器将通过用与所述喷墨头有预定距离的平面中的所述喷墨喷嘴形成，位移检测装置，用于检测所述基板和所述拉伸头之间在六个自由度方向上的相对位移，用于检测到达位置的装置在从绘图头排出的喷墨基板上，以及对准装置，用于基于到达位置的检测结果和基板之间的相对位移的结果，在六个自由度的方向上实现基板和绘图头之间的对准绘图头在六个自由方向。

10. 发明授权

US5228358A Motion guiding device 失效
标题翻译：运动引导装置
公开(公告)号：US5228358A
公开(公告)日：1993-07-20
申请号：US991711
申请日：1992-12-16
申请人： Shigeo Sakino , Eiji Osanai
发明人： Shigeo Sakino , Eiji Osanai
IPC分类号： B23Q1/38 , B23Q1/62 , B23Q5/10 , H02K41/03
CPC分类号： F16C32/0674 , B23Q1/38 , B23Q1/621 , B23Q5/10 , H02K41/03 , B26D2007/0043 , Y10S384/902 , Y10T74/20207
摘要： A motion guiding device includes a first movable member movable in a first direction, a second movable member movable in a second direction different from the first direction and for guiding motion of the first movable member in the first direction through a gas pressure, a base for supporting the first and second movable members independently of each other, with respect to a vertical direction through cooperation of a gas pressure. In addition, a guide is fixed to the base for guiding motion of the second movable member in the second direction through cooperation of a gas pressure and a magnetic force of a permanent magnet, a first linear motor moves the first movable member in the first direction, relative to the second movable member, and a second linear motor moves the second movable member with the first movable member in the second direction.
摘要翻译：运动引导装置包括可沿第一方向移动的第一可移动部件，可沿与第一方向不同的第二方向移动的第二可移动部件，并且用于通过气体压力引导第一可动部件沿第一方向的运动，通过气体压力的协调，相对于垂直方向彼此独立地支撑第一和第二可动构件。此外，引导件固定到基座，用于通过气体压力和永磁体的磁力的协作来引导第二可动构件沿第二方向的运动，第一线性电动机沿第一方向移动第一可动构件相对于第二可动构件，第二线性马达使第二可动构件与第一可动构件沿第二方向移动。

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