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    • 2. 发明授权
    • Apparatus for producing color filter with alignment error detection
    • 用于生产带对准误差检测的滤色片的设备
    • US5984470A
    • 1999-11-16
    • US634409
    • 1996-04-18
    • Shigeo SakinoKazuaki MasudaShinsuke TsuruokaToshikazu Sakai
    • Shigeo SakinoKazuaki MasudaShinsuke TsuruokaToshikazu Sakai
    • B41J2/01B41J2/14G02B5/20B41J3/407B41J23/00
    • B41J2/14016B41J2/01G02B5/201B41J2202/09
    • This invention relates to a highly precise and efficient color filter producing apparatus, which is provided with at least a set of drawing heads for respectively generating ink jets of red, green and blue colors, movement device for moving, with a substrate on which a color filter is to be formed by drawing with said ink jets, in a plane having a predetermined distance from the drawing heads, displacement detection device for detecting relative displacement between the substrate and the drawing heads in directions of six degrees of freedom, device for detecting the reaching position on the substrate of the ink jet discharged from the drawing head, and alignment device for effecting alignment between the substrate and the drawing heads in directions of six degrees of freedom, based on the results of detection of the reaching position and of the relative displacement between the substrate and the drawing head in directions of six degrees of freedom.
    • 本发明涉及一种高精度和高效率的滤色器制造装置,其具有至少一组用于分别产生红色,绿色和蓝色的喷墨的绘图头,用于移动的移动装置,基底上具有颜色 过滤器将通过用所述喷墨头在距离绘图头具有预定距离的平面中绘制而形成,位移检测装置用于检测基板和绘图头之间在六自由度方向上的相对位移的位移检测装置,用于检测 基于从绘图头排出的喷墨基板上的到达位置,以及基于达到位置和相对位置的检测结果,在六个自由度的方向上实现基板和绘图头之间的对准的对准装置 在六个自由度的方向上在基板和绘图头之间的位移。