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1. 发明授权

US5040431A Movement guiding mechanism 失效
标题翻译：运动引导机制
公开(公告)号：US5040431A
公开(公告)日：1991-08-20
申请号：US299340
申请日：1989-01-23
申请人： Shigeo Sakino , Eiji Osanai , Mahito Negishi , Michio Horikoshi , Mitsuru Inoue , Kazuya Ono
发明人： Shigeo Sakino , Eiji Osanai , Mahito Negishi , Michio Horikoshi , Mitsuru Inoue , Kazuya Ono
IPC分类号： F16C29/02 , G03F7/20 , H01L21/68
CPC分类号： F16C29/025 , F16C32/06 , G03F7/70716 , H01L21/68 , Y10S248/913 , Y10T74/20354
摘要： In a movement guiding device, two parallel stationary guides are fixed to a surface plate and plural hydrostatic gas or bearing members are provided for the surface plate and the stationary guides. A Y stage is moved in a Y-axis direction under the influence of these bearing members. Additional hydrostatic gas or air bearing members are provided in relation to the surface plate and the Y stage so as to support an X stage for movement in an X-axis direction orthogonal to the Y-axis direction. Guide of the Y stage in the X-axis direction is made by the stationary guides on the surface plate, while guide thereof in a Z-axis direction perpendicular to an X-Y plane is made by the surface plate. Guide of the X stage in the Y-axis direction is made by the Y stage, while the guide thereof in the Z-axis direction is made by the surface plate, similar to the Y stage. With such structure, any vibration, rolling, or otherwise, of the Y stage is not transmitted to the X stage. Thus, high-precision guide is attainable. Linear motors are used as drive sources for the X and Y stages, so that all movable portions are provided by non-contact structures. Further, suitable brake members are used, which members are operable at a time of an accident of the stage. By this, accidental collision of the stage and/or derailment of the stage from the guide can be prevented.
摘要翻译：在运动导向装置中，两个平行的固定导轨固定在一个表面板上，为表面板和固定导轨提供多个静压气体或轴承部件。在这些轴承部件的影响下，Y台架沿Y轴方向移动。相对于表面板和Y平台设置有额外的静液压气体或空气轴承构件，以支撑X平台在与Y轴方向正交的X轴方向上移动。通过表面板上的固定引导件在X轴方向上引导Y台的引导，而通过表面板在与X-Y平面垂直的Z轴方向上的引导。 X平台的Y轴方向的引导由Y台进行，其Z轴方向的引导部由表面板制成，与Y台相同。利用这种结构，Y阶段的任何振动，滚动或其他方式不会传递到X级。因此，可以实现高精度的引导。线性电动机用作X和Y级的驱动源，使得所有可移动部分由非接触结构提供。此外，使用合适的制动构件，这些构件在阶段事故发生时可操作。由此，可以防止舞台的意外碰撞和/或舞台从导轨脱轨。

2. 发明授权

US06644855B2 Stage device, exposure apparatus, device manufacturing method and movement guidance method 有权
公开(公告)号：US06644855B2
公开(公告)日：2003-11-11
申请号：US10073594
申请日：2002-02-12
申请人： Shigeo Sakino , Mitsuru Inoue , Tadayuki Kubo
发明人： Shigeo Sakino , Mitsuru Inoue , Tadayuki Kubo
IPC分类号： F16C1700
CPC分类号： G03F7/70841 , F16C29/025 , F16C32/0614 , F16C33/748 , F16C2300/62 , G03F7/70716 , G03F7/70816 , H01J37/20 , H01L21/682
摘要： A stage device includes a table having a reference plane parallel to first and second directions; a driving body movable along the first direction; a moving body movable along the second direction with respect to the driving body; a static pressure bearing provided on the moving body; an exhaust groove provided surrounding the static pressure bearing; and a mechanism for delivering a gas of the static pressure bearing recovered by the exhaust groove between the moving body and the driving body. The adverse affects of piping on the moving body can be reduced and it is possible to position the moving body with high precision.

3. 发明授权

US5909272A Stage and exposure apparatus using same 失效
标题翻译：舞台和曝光装置使用相同
公开(公告)号：US5909272A
公开(公告)日：1999-06-01
申请号：US904305
申请日：1997-07-31
申请人： Eiji Osanai , Mitsuru Inoue , Kazunori Iwamoto , Katsumi Asada , Hiroshi Ito
发明人： Eiji Osanai , Mitsuru Inoue , Kazunori Iwamoto , Katsumi Asada , Hiroshi Ito
IPC分类号： H01L21/68 , G03F7/20 , H01L21/027 , G03B27/42 , G03B27/58
CPC分类号： G03F7/70241 , G03F7/70358 , G03F7/70716
摘要： A stage apparatus has a stationary portion, a movable portion and a linear motor for moving the movable portion in a prescribed direction by applying thrust between the stationary and movable portions. A first supporting member supports the stationary portion with a degree of freedom in the direction of movement, and a second supporting member has an axial supporting member for supporting the stationary portion rigidly in the direction of movement and flexibly in other directions. The second supporting member is isolated from the first supporting member in such a manner that vibration will not be transmitted to the first supporting member. The stage is used to scan a master plate in a scanning-type exposure apparatus, and the first supporting member is joined to a lens barrel table on which a projecting optical system is mounted.
摘要翻译：舞台装置具有静止部分，可移动部分和直线电动机，用于通过在固定部分和可移动部分之间施加推力来使可动部分沿预定方向移动。第一支撑构件在移动方向上具有自由度的支撑固定部分，并且第二支撑构件具有轴向支撑构件，用于沿着运动方向刚性地支撑静止部分并且在其它方向上灵活地支撑。第二支撑构件与第一支撑构件隔离，使得振动不会传递到第一支撑构件。该台用于在扫描式曝光装置中扫描主板，并且将第一支撑构件接合到其上安装有投影光学系统的透镜镜台。

4. 发明授权

US5933215A Exposure apparatus and device manufacturing method using the same 失效
标题翻译：曝光装置及其制造方法
公开(公告)号：US5933215A
公开(公告)日：1999-08-03
申请号：US867355
申请日：1997-06-02
申请人： Mitsuru Inoue , Ryuichi Ebinuma , Kazunori Iwamoto , Eiji Osanai , Hiroaki Takeishi
发明人： Mitsuru Inoue , Ryuichi Ebinuma , Kazunori Iwamoto , Eiji Osanai , Hiroaki Takeishi
IPC分类号： G03F7/20 , H01L21/027 , G03B27/42 , G03B27/58 , G03B27/62
CPC分类号： G03F7/70358 , G03F7/70716 , G03F7/70725 , G03F7/70833 , G03F7/709
摘要： A scanning exposure apparatus wherein a portion of a pattern of an original is projected onto a substrate through a projection optical system and the original and substrate are scanningly moved relative to the projection optical system, whereby the pattern of the original is transferred onto the substrate. The apparatus includes an original stage for holding the original, a base for supporting the original stage, and a supporting device for supporting the base at three positions, through a damper device and a pillar device. The three positions define an approximately isosceles triangle, and the scan direction is parallel to a straight line that connects a point of intersection of isosceles sides of the triangle and a gravity center thereof.
摘要翻译：一种扫描曝光装置，其中通过投影光学系统将原稿的图案的一部分投影到基板上，并且原稿和基板相对于投影光学系统扫描地移动，由此将原稿的图案转印到基板上。该装置包括用于保持原稿的原稿台，用于支撑原稿台的基座和用于通过阻尼器装置和支柱装置在三个位置支撑基座的支撑装置。三个位置限定大致等腰三角形，并且扫描方向平行于连接三角形的等腰面的交点与其重心的直线。

5. 发明申请

US20100315803A1 OPTICAL SHEET, SURFACE LIGHT SOURCE DEVICE AND TRANSMISSION-TYPE DISPLAY DEVICE 有权
标题翻译：光学片，表面光源器件和透射型显示器件
公开(公告)号：US20100315803A1
公开(公告)日：2010-12-16
申请号：US12918834
申请日：2009-07-17
申请人： Mitsuru Inoue , Amane Koike , Akiko Tomita , Hiroshi Kojima , Akinobu Ushiyama , Satoshi Goishihara
发明人： Mitsuru Inoue , Amane Koike , Akiko Tomita , Hiroshi Kojima , Akinobu Ushiyama , Satoshi Goishihara
IPC分类号： G02F1/13357 , F21V5/04 , F21V5/00
CPC分类号： G02B3/0068 , G02B5/0231 , G02B5/0278 , G02F1/1303 , G02F2001/133607
摘要： An optical sheet including a fly-eye lens is provided. This optical sheet can exhibit excellent optical functions, including desired light condensing ability, light diffusing ability and ability for rendering a light source image substantially invisible, as well as can be produced with high reproducibility. In one example, the optical sheet (40) includes: a sheet-like main body (45); first unit shaped elements (50) arranged on one surface (46) of the main body and constituting together the fly-eye lens; and second unit shaped elements (55) arranged on the one surface of the main body and extending in parallel with one direction on the sheet surface of the main body. In this case, the first unit shaped elements are arranged, with a space provided therebetween, on the one surface of the main body, while the second unit shaped elements are arranged, between the first unit shaped elements, on the one surface of the main body.
摘要翻译：提供了包括飞眼镜片的光学片。该光学片可以表现出优异的光学功能，包括期望的聚光能力，光漫射能力和使光源图像基本上不可见的能力，并且可以以高再现性制造。在一个示例中，光学片（40）包括：片状主体（45）; 第一单元形元件（50），布置在主体的一个表面（46）上，并构成飞眼透镜; 以及第二单元形元件（55），其布置在主体的一个表面上并且在主体的片材表面上与一个方向平行地延伸。在这种情况下，第一单元形状元件在主体的一个表面上设置有间隔开的空间，而第二单元形状元件布置在第一单元形状元件之间，主体的一个表面上身体。

6. 发明授权

US07454216B2 in-facility information provision system and in-facility information provision method 失效
标题翻译：设施内信息提供系统和设施信息提供方法
公开(公告)号：US07454216B2
公开(公告)日：2008-11-18
申请号：US11071342
申请日：2005-03-04
申请人： Hiroaki Shikano , Naohiko Irie , Atsushi Ito , Junji Inaba , Mitsuru Inoue , Kazutaka Sakai
发明人： Hiroaki Shikano , Naohiko Irie , Atsushi Ito , Junji Inaba , Mitsuru Inoue , Kazutaka Sakai
IPC分类号： H04Q7/20
CPC分类号： G06Q30/00
摘要： To enable an appropriate change of a path according to a situation of a user and a situation of a target store and the path without having a special terminal when the user of a facility utilizes the target store and an appropriate guidance, spatial recognition nodes respectively provided with a sensor and information processing equipment are installed in each location in the facility and connected via a network. The nodes recognize the position, the action and the behavior of a user of the facility. A server controlling a system manages the recognition result and constantly grasps the situation of the user. The situation of the user is recognized by the node installed at a destination and on a path, and notified to the server. The server displays appropriate path information based on the recognition result on any of plural information displays installed in the facility when the user approaches.
摘要翻译：为了在设施的用户利用目标存储和适当的指导的情况下，根据用户的情况和目标存储的情况以及路径而不具有特殊终端的路径的适当改变，分别提供了空间识别节点传感器和信息处理设备安装在设施的每个位置并通过网络连接。节点识别设施的用户的位置，动作和行为。控制系统的服务器管理识别结果并且不断掌握用户的情况。用户的情况由安装在目的地和路径上的节点识别，并通知给服务器。当用户接近时，服务器基于在设施中安装的多个信息显示器中的任一个上的识别结果来显示适当的路径信息。

7. 发明申请

US20080158530A1 EXPOSURE APPARATUS AND DEVICE MANUFACTURING METHOD 有权
标题翻译：曝光装置和装置制造方法
公开(公告)号：US20080158530A1
公开(公告)日：2008-07-03
申请号：US11959197
申请日：2007-12-18
申请人： Hirofumi Fujii , Hiroshi Ito , Mitsuru Inoue
发明人： Hirofumi Fujii , Hiroshi Ito , Mitsuru Inoue
IPC分类号： G03B27/42
CPC分类号： G03B27/58 , G03F7/70725 , G03F7/709
摘要： An exposure apparatus including a projection optical system and configured to expose a substrate to light via the projection optical system includes a support configured to support the projection optical system, an object supported by the support and movable relative the support, an actuator configured to drive the object, a detector configured to detect a relative position between the object and the support, and a controller configured to perform a control of the actuator based on an output of the detector to cause the object to follow the support. The controller is configured to perform an estimation of a vibration of the support based on an output of the detector in parallel with the control to cause the object to follow the support.
摘要翻译：包括投影光学系统并经配置以经由投影光学系统将基板曝光于光的曝光装置包括：支撑构件，用于支撑投影光学系统;由支撑件支撑并可相对于支撑件移动的物体;致动器，物体，被配置为检测物体和支撑体之间的相对位置的检测器，以及被配置为基于检测器的输出执行致动器的控制以使物体跟随支撑件的控制器。控制器被配置为基于检测器的输出与控制并行地执行对支撑件的振动的估计，以使对象遵循支撑。

8. 发明申请

US20080068603A1 ANTI-VIBRATION APPARATUS, EXPOSURE APPARATUS, AND DEVICE MANUFACTURING METHOD 审中-公开
标题翻译：防振装置，曝光装置和装置制造方法
公开(公告)号：US20080068603A1
公开(公告)日：2008-03-20
申请号：US11846904
申请日：2007-08-29
申请人： Ryo Nawata , Mitsuru Inoue , Hiroshi Ito , Makoto Mizuno
发明人： Ryo Nawata , Mitsuru Inoue , Hiroshi Ito , Makoto Mizuno
IPC分类号： G01N21/01 , G03B27/62 , H01S4/00
CPC分类号： G03B27/53 , G03F7/70833 , G03F7/709 , Y10T29/49002
摘要： An anti-vibration apparatus includes a target object, a reference object, a measuring device which measures the position of the target object relative to the reference object, a driving mechanism to drive the target object based on the measurement result obtained by the measuring device, a Lorentz's force actuator which supports the reference object, and a power supply device which supplies a constant current to the Lorentz's force actuator. The actuator which supports the reference object uses a Lorentz's force actuator or an actuator which supports the reference object by the pressure of a gas.
摘要翻译：防振装置包括目标物体，参考物体，测量目标物体相对于基准物体的位置的测量装置，基于由测量装置获得的测量结果来驱动目标物体的驱动机构，支撑参考对象的洛伦兹力致动器，以及向洛伦兹力致动器提供恒定电流的电源装置。支撑参考对象的致动器使用洛仑兹力致动器或通过气体压力支撑参考对象的致动器。

9. 发明申请

US20060098320A1 Storage control device and method for detecting write errors to storage media 失效
公开(公告)号：US20060098320A1
公开(公告)日：2006-05-11
申请号：US11022781
申请日：2004-12-28
申请人： Tsutomu Koga , Mitsuru Inoue
发明人： Tsutomu Koga , Mitsuru Inoue
IPC分类号： G11B5/09
CPC分类号： G06F11/1004 , G06F12/0866
摘要： There are provided a cache region that stores write data from a host device, storage media, a data storage region for the storage media, and a comparison unit. A first comparison object is generated for N items of write data on the cache region and the N items of write data are transferred to the data storage region. Write data is read from a designated address of the data storage region and this write data is written to the storage media. When N items of write data have been read, a second comparison object is generated in respect of the write data. The comparison unit compares the first comparison object and the second comparison object, and if the result of the comparison is a mismatch, the N items of write data on the cache region are again transferred to the data storage region.

10. 发明授权

US06320645B1 Stage system and exposure apparatus, and device manufacturing method using the same 有权
标题翻译：舞台系统和曝光装置以及使用其的装置制造方法
公开(公告)号：US06320645B1
公开(公告)日：2001-11-20
申请号：US09324652
申请日：1999-06-03
申请人： Mitsuru Inoue , Nobushige Korenaga , Yukio Tokuda
发明人： Mitsuru Inoue , Nobushige Korenaga , Yukio Tokuda
IPC分类号： G03B2742
CPC分类号： G03F7/70691 , G03B27/42 , Y10T74/20354
摘要： A stage system includes a movable stage, a guide mechanism for guiding the stage with respect to a predetermined direction, and a preloading mechanism for producing a magnetic attraction force with which the rigidity of the guide mechanism can be increased, wherein a portion to be attracted by the magnetic attraction force is made of a material having a product of a residual magnetic flux density Br and a holding force Hc in a hysteresis curve, not greater than 100 J/m3, this being very effective to reduce the hysteresis force, which is resistance due to the residual magnetic force, as compared with the preloading attraction force, whereby high precision positioning of the stage is accomplished.
摘要翻译：舞台系统包括可动台，用于相对于预定方向引导舞台的引导机构，以及用于产生引力机构的刚性的磁吸引力的预加载机构，其中吸引的部分通过磁吸引力由具有残余磁通密度Br和滞后曲线中的保持力Hc的乘积的材料制成，不大于100J / m 3，这对减小滞后力是非常有效的，这是非常有效的与预载吸引力相比，由于剩余磁力产生的阻力，从而实现了台的高精度定位。

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