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    • 3. 发明授权
    • Method and apparatus for thermal profiling of flip-chip packages
    • 倒装芯片封装的热分析方法和装置
    • US06962437B1
    • 2005-11-08
    • US09465131
    • 1999-12-16
    • Sarathy RajagopalanMinh Vuong
    • Sarathy RajagopalanMinh Vuong
    • G01K7/00G01K7/02
    • G01K7/02
    • A thermal measurement device for obtaining accurate thermal profiles during flip-chip semiconductor packaging and methodologies for making such devices is disclosed. Particularly, a measurement device comprised of a thermocouple sandwiched between a semiconductor packaging substrate and a semiconductor die. Such a device providing increased accuracy in temperature measurement. The present invention also teaches a packaging substrate assembled with a semiconductor die having an opening in the substrate enabling the placement of a thermocouple such that it is in contact with the die and secured in place. Additionally, methods of constructing the devices of the present invention are disclosed.
    • 公开了一种用于在倒装芯片半导体封装期间获得精确热分布的热测量装置以及用于制造这种装置的方法。 特别地,包括夹在半导体封装基板和半导体管芯之间的热电偶的测量装置。 这种装置提供了更高的温度测量精度。 本发明还教导了组装有半导体管芯的封装衬底,该半导体管芯具有在衬底中的开口,使得能够放置热电偶,使得其与管芯接触并固定到位。 另外,公开了构成本发明的装置的方法。