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    • 6. 发明申请
    • Mask manufacturing system, mask data creating method and manufacturing method of semiconductor device
    • 掩模制造系统,掩模数据创建方法和半导体器件的制造方法
    • US20070124718A1
    • 2007-05-31
    • US11440086
    • 2006-05-25
    • Sachiko KobayashiToshiya Kotani
    • Sachiko KobayashiToshiya Kotani
    • G06F17/50
    • G03F1/68G03F1/36
    • A mask manufacturing system and a mask data creating method reusing data for processing information and environment in the past to reduce a photomask developing period, and a manufacturing method of a semiconductor device are disclosed. According to one aspect of the present invention, it is provided a mask manufacturing system comprising a storage device storing processing data for semiconductor integrated circuits processed in the past, a plurality of operation processing modules, a module selecting section selecting at least one operation processing modules, an optical proximity effect correction section executing optical proximity effect correction to a processing object data and generating a correction data by utilizing past correction information applied for a stored data equivalent to the processing object data, a converting section converting the processing object data into mask data, and a drawing system drawing a mask pattern based on the mask data.
    • 掩模制造系统和掩模数据创建方法重复利用用于处理信息和环境的数据以减少光掩模生长期,以及半导体器件的制造方法。 根据本发明的一个方面,提供了一种掩模制造系统,包括存储用于过去处理的半导体集成电路的处理数据的存储装置,多个操作处理模块,模块选择部分,其选择至少一个操作处理模块 光学接近效应校正部分,对处理对象数据执行光学邻近效应校正,并通过利用应用于与处理对象数据相当的存储数据的过去校正信息产生校正数据;转换部分,将处理对象数据转换成掩模数据 以及基于掩模数据绘制掩模图案的绘图系统。
    • 9. 发明授权
    • Method and program for pattern data generation using a modification guide
    • 使用修改指南生成图形数据的方法和程序
    • US07917871B2
    • 2011-03-29
    • US12180244
    • 2008-07-25
    • Sachiko KobayashiSuigen KyohShimon Maeda
    • Sachiko KobayashiSuigen KyohShimon Maeda
    • G06F17/50
    • G06F17/5081
    • A pattern data generation method of an aspect of the present invention, the method includes creating at least one modification guide to modify a modification target point contained in pattern data, evaluating the modification guides on the basis of an evaluation item, the evaluation item being a change in the shape of the pattern data for the modification target point caused by the modification based on the modification guides or a change in electric characteristics of a pattern formed in accordance with the pattern data, selecting a predetermined modification guide from among the modification guides on the basis of the evaluation result of the modification guides, and modifying the modification target point in accordance with the selected modification guide.
    • 本发明的一个方式的图形数据生成方法,该方法包括创建至少一个修改指南,以修改包含在图案数据中的修改目标点,基于评估项目评估修改指南,评估项目是 基于修改引导引起的修改目标点的图案数据的形状的改变或根据图案数据形成的图案的电特性的变化,从修改引导件中选择预定的修改指南 修改指南的评估结果的基础,以及根据所选择的修改指南修改修改目标点。
    • 10. 发明申请
    • MASK DATA PROCESSING METHOD FOR OPTIMIZING HIERARCHICAL STRUCTURE
    • 用于优化分层结构的掩模数据处理方法
    • US20080216045A1
    • 2008-09-04
    • US11945697
    • 2007-11-27
    • Sachiko KOBAYASHIToshiya KotaniShinichiroh OhkiHirotaka Ichikawa
    • Sachiko KOBAYASHIToshiya KotaniShinichiroh OhkiHirotaka Ichikawa
    • G06F17/50
    • G06F17/5068
    • Disclosed is a mask data processing method of correcting a hierarchical structure. In the case that in design data having a hierarchical structure including a plurality of cells each having a design pattern, when the total number of graphic forms or the total edge length of a design pattern on which the calculation of mask data processing is to be executed, the amount of calculation to be executed, or the expansion degree presumably becomes equal to or larger than a predetermined threshold value if the calculation of the mask data processing is executed on the design data having the initial hierarchical structure, the hierarchical structure is corrected. This correction is performed to reduce the total number of graphic forms or the total edge length of the design pattern on which the calculation is to be executed, the amount of calculation to be executed, of the expansion degree.
    • 公开了一种校正层次结构的掩模数据处理方法。 在具有包括多个单元的设计数据的设计数据中,每个单元均具有设计图案时,当要执行掩模数据处理的计算的设计图案的总数或总边缘长度时 如果对具有初始层次结构的设计数据执行掩模数据处理的计算,则修正了要执行的计算量或扩展度等于或大于预定阈值等于或大于预定阈值。 执行该校正以减少要执行计算的设计模式的总数或总边缘长度,即要执行的计算量,扩展度。