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    • 5. 发明授权
    • Phase-shift photo mask blank, phase-shift photo mask and method for fabricating semiconductor devices
    • 相移光掩模空白,相移光掩模和用于制造半导体器件的方法
    • US06569577B1
    • 2003-05-27
    • US09704697
    • 2000-11-03
    • Akihiko IsaoSusumu KawadaShuichiro KanaiNobuyuki YoshiokaKazuyuki Maetoko
    • Akihiko IsaoSusumu KawadaShuichiro KanaiNobuyuki YoshiokaKazuyuki Maetoko
    • G03F900
    • G03F1/32
    • A phase-shift photo mask blank comprises a half tone phase-shift film, wherein the half tone phase-shift film consists of at least two layers and in the case of two layers, the refractive index of the upper layer of the film is smaller than that of the lower layer thereof; in the case of three layers, the refractive index of the intermediate layer is smaller than those observed for the upper and lower layers or the refractive index of the upper layer is smaller than that of an intermediate layer; in the case of at least 4 layers, the refractive index of the upper most layer is smaller than that of the layer immediately below the upper most layer. The photo mask blank permits the production of a phase-shift photo mask having a high transmittance at an exposure wavelength and a low reflectance as well as a low transmittance at a defect-inspection wavelength. The photo mask in turn permits the fabrication of a semiconductor device having a fine pattern.
    • 相移光掩模坯料包括半色调相移膜,其中半色调相移膜由至少两层组成,并且在两层的情况下,膜的上层的折射率较小 比其下层的; 在三层的情况下,中间层的折射率小于上层和下层观察到的折射率,或者上层的折射率小于中间层的折射率; 在至少4层的情况下,最上层的折射率小于最上层的层的折射率。 光掩模空白允许制造在曝光波长和低反射率下具有高透射率以及在缺陷检查波长处的低透射率的相移光掩模。 光掩模又允许制造具有精细图案的半导体器件。