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1. 发明授权

US5976260A Semiconductor producing apparatus, and wafer vacuum chucking device, gas cleaning method and nitride film forming method in semiconductor producing apparatus 失效
标题翻译：半导体制造装置，晶片真空夹紧装置，半导体制造装置中的气体净化方法和氮化物膜形成方法
公开(公告)号：US5976260A
公开(公告)日：1999-11-02
申请号：US612445
申请日：1996-03-07
申请人： Yoshimi Kinoshita , Tomoyuki Kanda , Katsuhisa Kitano , Kazuo Yoshida , Hiroshi Ohnishi , Kenichiro Yamanishi , Shigeo Sasaki , Hideki Komori , Taizo Eshima , Kouichirou Tsutahara , Toshihiko Noguchi , Toru Takahama , Yoshihiko Kusakabe , Takeshi Iwamoto , Nobuyuki Kosaka
发明人： Yoshimi Kinoshita , Tomoyuki Kanda , Katsuhisa Kitano , Kazuo Yoshida , Hiroshi Ohnishi , Kenichiro Yamanishi , Shigeo Sasaki , Hideki Komori , Taizo Eshima , Kouichirou Tsutahara , Toshihiko Noguchi , Toru Takahama , Yoshihiko Kusakabe , Takeshi Iwamoto , Nobuyuki Kosaka
IPC分类号： B23Q3/08 , B25B11/00 , C23C16/34 , C23C16/44 , C23C16/455 , C23C16/458 , C23C16/48 , H01L21/683 , C23C16/00
CPC分类号： C23C16/34 , B25B11/005 , C23C16/4405 , C23C16/455 , C23C16/4583 , C23C16/481 , H01L21/6838 , Y10T279/11
摘要： It is an object of the present invention to obtain a vacuum chucking which can vacuum suck a wafer even if dusts attach thereon. The main body of vacuum chuck (101) has a plurality of block grooves (125) on the surface on which the wafer (1) is sucked and fixed, in which vacuum evacuation paths (105) each for vacuum evacuating each block groove (125) are provided for each block groove (125). When the wafer (1) is sucked and fixed under low pressure, even if the degree of vacuum in one of the block grooves (125) decreases due to attachment of dusts on part of the suction surface, or the like, the wafer (1) can surely be sucked and held.
摘要翻译：本发明的目的是获得即使在其上附着有灰尘也能真空吸附晶片的真空吸盘。真空吸盘（101）的主体在其上吸引和固定晶片（1）的表面上具有多个块状凹槽（125），其中各真空抽空路径（105）用于真空抽吸每个块状凹槽（125））被设置用于每个块槽（125）。当晶片（1）在低压下被吸入和固定时，即使一个块状槽（125）中的一个真空度由于吸附表面的一部分上的灰尘等的附着而降低，晶片（1））肯定被吸住了。

2. 发明授权

US5305366A Thin film forming apparatus 失效
标题翻译：薄膜成型装置
公开(公告)号：US5305366A
公开(公告)日：1994-04-19
申请号：US817660
申请日：1992-01-07
申请人： Takehiko Nakahara , Masao Koshinaka , Nobuyuki Kosaka , Toshimasa Tomoda
发明人： Takehiko Nakahara , Masao Koshinaka , Nobuyuki Kosaka , Toshimasa Tomoda
IPC分类号： G01N23/223 , G01N23/225 , H01L21/66
CPC分类号： G01N23/2252 , G01N23/223 , G01N23/2257 , G01N2223/076
摘要： This invention relates to a method and apparatus for analyzing a plurality of elements that are present on the surface of a material of interest or in its neighborhood, as well as a thin-film forming apparatus that is capable of measuring the composition of a sample during thin film formation in the process of semi-conductor fabrication. The apparatus are characterized in that a detector is isolated from the light and heat generated in a sample making mechanism by means of a shield which is not only heat-resistant but also transmissive of fluorescent X-ray containing soft X-rays of 1 Kev and below and that a mirror for total reflection of X-rays which is equipped with slits capable of adjusting the incident and exit angles of fluorescent X-rays from the sample excited with an excitation source as well as the ranges of those angles is provided either at the entrance or exit of said shield or at both.
摘要翻译：本发明涉及一种用于分析存在于感兴趣的材料的表面上或其附近的多个元素的方法和装置，以及能够测量样品组成的薄膜形成装置半导体制造过程中的薄膜形成。该装置的特征在于，检测器借助于不仅耐热而且还透射含有1Kev的软X射线的荧光X射线的屏蔽而与样品制造机构中产生的光和热隔离，并且配备有能够调节来自激发源激发的样品的荧光X射线的入射角和出射角度的狭缝以及这些角度的范围的X射线的全反射镜，可以在所述护罩的入口或出口或两者。

3. 发明授权

US5289260A Pattern defect detection device and a spatial frequency filter used therein 失效
标题翻译：图案缺陷检测装置及其中使用的空间频率滤波器
公开(公告)号：US5289260A
公开(公告)日：1994-02-22
申请号：US787929
申请日：1991-11-06
申请人： Yoko Miyazaki , Toshimasa Tomoda , Hitoshi Tanaka , Nobuyuki Kosaka , Toyomi Ohshige
发明人： Yoko Miyazaki , Toshimasa Tomoda , Hitoshi Tanaka , Nobuyuki Kosaka , Toyomi Ohshige
IPC分类号： G01B11/24 , G01N21/88 , G01N21/94 , G01N21/956 , G06K9/74 , H01L21/66 , G01B9/02
CPC分类号： G06K9/74 , G01N21/95623
摘要： A spatial frequency filter used in a pattern defect detection device, including a pattern which includes a black spot having a diameter expanded by a controlled amount in comparison with the diameter of a black spot on a photosensitive plate obtained by exposure by diffracted light from a pattern on a model specimen
摘要翻译：一种在图案缺陷检测装置中使用的空间频率滤波器，包括图案，该图形包括直径扩大了受控量的黑点，与通过衍射光从图案曝光获得的感光片上的黑点的直径相比较在模型标本上

4. 发明授权

US08205313B2 Structure for attaching vibration insulating member 有权
标题翻译：用于安装防振构件的结构
公开(公告)号：US08205313B2
公开(公告)日：2012-06-26
申请号：US12231990
申请日：2008-09-08
申请人： Yoshikazu Kaneyasu , Taiki Yanase , Nobuyuki Kosaka , Takeshi Chiba
发明人： Yoshikazu Kaneyasu , Taiki Yanase , Nobuyuki Kosaka , Takeshi Chiba
IPC分类号： B23P11/00
CPC分类号： F16F1/376 , B60K15/067 , E05Y2800/422 , Y10T29/49826
摘要： There is provided a structure of a vibration insulating member for firmly fixing the member between a fuel tank mounted on a vehicle body by means of a tank band and the vehicle body. The vibration insulating member includes an engaging protrusion that is fixed to a fixing hole that is made through the vehicle body in a direction orthogonal to a direction in which the tank band is fastened.
摘要翻译：提供了一种隔振构件的结构，用于通过油箱带和车身牢固地将构件固定在安装在车身上的燃料箱之间。所述防振构件包括：接合突起，其固定在与所述车体沿与所述油箱带紧固的方向正交的方向上形成的固定孔。

5. 发明申请

US20070210607A1 Filler pipe assembly 有权
标题翻译：填料管总成
公开(公告)号：US20070210607A1
公开(公告)日：2007-09-13
申请号：US11699259
申请日：2007-01-29
申请人： Shinya Murabayashi , Shoichiro Kumagai , Tsuyoshi Chou , Nobuyuki Kosaka , Keiichiro Tachisako
发明人： Shinya Murabayashi , Shoichiro Kumagai , Tsuyoshi Chou , Nobuyuki Kosaka , Keiichiro Tachisako
IPC分类号： B62D25/00
CPC分类号： B60K15/04 , B60K15/03519 , B60K2015/0451 , B60K2015/048
摘要： In a filler pipe assembly, a holder member (13. 15) secured to an inner wall of a filler pipe (2) is provided with an outer profile of a circular cross section substantially conforming to an inner peripheral wall of the filler pipe and an inner profile defining a bore (17) of a circular cross section eccentric to the outer profile thereof. A relief valve (30) is provided in a part of the holder member defined between the outer profile thereof and the bore owing to an eccentricity of the bore relative to the outer profile. Owing to the eccentric relationship between the outer profile and inner bore of the holder member, a space for a relief valve can be provided in the area where the distance between the inner wall of the bore and the outer profile is the greatest, and this allows the relief valve to be mounted without complicating the structure.
摘要翻译：在加油管组件中，固定在加油管（2）的内壁上的保持件（13.15）设置有基本上符合加油管内周壁的圆形截面的外轮廓，内部轮廓限定了与其外部轮廓偏心的圆形横截面的孔（17）。由于孔相对于外轮廓的偏心，安全阀（30）设置在保持构件的位于其外轮廓和孔之间的部分中。由于保持器构件的外轮廓和内孔之间的偏心关系，可以在孔的内壁和外轮廓之间的距离最大的区域中设置安全阀的空间，并且这允许安装安全阀，不会使结构复杂化。

6. 发明授权

US5170063A Inspection device for detecting defects in a periodic pattern on a semiconductor wafer 失效
标题翻译：用于检测半导体晶片周期性图案中的缺陷的检查装置
公开(公告)号：US5170063A
公开(公告)日：1992-12-08
申请号：US661140
申请日：1991-02-27
申请人： Yoko Miyazaki , Hitoshi Tanaka , Nobuyuki Kosaka , Toshimasa Tomoda
发明人： Yoko Miyazaki , Hitoshi Tanaka , Nobuyuki Kosaka , Toshimasa Tomoda
IPC分类号： G01N21/88 , G01N21/956 , G03H1/00 , G06T1/00
CPC分类号： G01N21/95623 , G03H1/00
摘要： An inspection device for detecting defects in a periodic pattern on a semiconductor wafer includes a laser oscillator. In the exposure process, light emitted from the laser oscillator is divided into a subject beam and a reference beam. The subject beam is guided to a semiconductor wafer having a periodic pattern thereon by mirrors and a beam expander. The light scattered from the specimen is collected by a lens on a photographic plate. The reference beam is guided to the photographic plate via a second beam expander and another mirror. The intensity of the reference beam is adjusted to a level at which the reference beams interferes on the photographic plate with the light scattered from defects in the periodic pattern and collected by the lens. Thus, a hologram of the defects in the pattern is recorded on the photographic plate. After development, the photographic plate is returned to its original position and used to form a holographic image of the defects with a transmitted regeneration light beam.
摘要翻译：用于检测半导体晶片周期性图案中的缺陷的检查装置包括激光振荡器。在曝光过程中，从激光振荡器发射的光被分成目标光束和参考光束。目标光束通过反射镜和光束扩展器被引导到其上具有周期性图案的半导体晶片。从样本散射的光由照相板上的透镜收集。参考光束通过第二光束扩展器和另一个反射镜被引导到照相板。参考光束的强度被调整到参考光束干涉照相板的水平，其中光从周期性图案中的缺陷散射并由透镜收集。因此，图案上的缺陷的全息图被记录在照相板上。在显影之后，照相板返回其原始位置，并用于通过发射的再生光束形成缺陷的全息图像。

7. 发明申请

US20090077785A1 Structure for attaching vibration insulating member 有权
标题翻译：用于安装防振构件的结构
公开(公告)号：US20090077785A1
公开(公告)日：2009-03-26
申请号：US12231990
申请日：2008-09-08
申请人： Yoshikazu Kaneyasu , Taiki Yanase , Nobuyuki Kosaka , Takeshi Chiba
发明人： Yoshikazu Kaneyasu , Taiki Yanase , Nobuyuki Kosaka , Takeshi Chiba
IPC分类号： B23P11/00 , F16F7/00
CPC分类号： F16F1/376 , B60K15/067 , E05Y2800/422 , Y10T29/49826
摘要： There is provided a structure of a vibration insulating member for firmly fixing the member between a fuel tank mounted on a vehicle body by means of a tank band and the vehicle body. The vibration insulating member includes an engaging protrusion that is fixed to a fixing hole that is made through the vehicle body in a direction orthogonal to a direction in which the tank band is fastened.
摘要翻译：提供了一种隔振构件的结构，用于通过油箱带和车身牢固地将构件固定在安装在车身上的燃料箱之间。所述防振构件包括：接合突起，其固定在与所述车体沿与所述油箱带紧固的方向正交的方向上形成的固定孔。

8. 发明授权

US5317618A Light transmission type vacuum separating window and soft X-ray transmitting window 失效
标题翻译：透光式真空分离窗和软X射线透射窗
公开(公告)号：US5317618A
公开(公告)日：1994-05-31
申请号：US4596
申请日：1993-01-14
申请人： Takehiko Nakahara , Masao Koshinaka , Nobuyuki Kosaka
发明人： Takehiko Nakahara , Masao Koshinaka , Nobuyuki Kosaka
IPC分类号： G21K5/00 , B01J19/12 , G21K1/10 , H01J5/18 , H01J35/18 , H05G1/00 , G21K1/00
CPC分类号： B01J19/125 , G21K1/10 , H01J35/18 , H01J5/18
摘要： A light transmission type vacuum separating window for separating a vacuum area into a plurality of vacuum areas through a film that transmits the light of a wavelength area such as an X-ray area and an infrared ray area. This vacuum separating window includes a thin film that transmits the light. The vacuum area is separated into the plurality of vacuum areas through this thin film. The light is any one of an X-ray, an infrared ray, a visible ray and an ultraviolet ray. A metal or an alloy that turns out a liquid in a range of temperature of a using environment may be provided between the thin film and the support member for supporting the thin film. This metal is preferably gallium. The alloy preferably contains gallium and, more preferably, consists of 75.5 weight % gallium and 24.5 weight % indium.
摘要翻译：一种透光型真空分离窗，用于通过透射诸如X射线区域和红外线区域之类的波长区域的光而将真空区域分离成多个真空区域。该真空分离窗包括透射光的薄膜。真空区域通过该薄膜分离成多个真空区域。光是X射线，红外线，可见光和紫外线中的任一种。可以在薄膜和用于支撑薄膜的支撑构件之间设置在使用环境温度范围内流出液体的金属或合金。该金属优选为镓。该合金优选含有镓，更优选由75.5重量％的镓和24.5重量％的铟组成。

9. 发明授权

US5534073A Semiconductor producing apparatus comprising wafer vacuum chucking device 失效
标题翻译：半导体制造装置，包括晶片真空吸附装置
公开(公告)号：US5534073A
公开(公告)日：1996-07-09
申请号：US116968
申请日：1993-09-07
申请人： Yoshimi Kinoshita , Tomoyuki Kanda , Katsuhisa Kitano , Kazuo Yoshida , Hiroshi Ohnishi , Kenichiro Yamanishi , Shigeo Sasaki , Hideki Komori , Taizo Eshima , Kouichirou Tsutahara , Toshihiko Noguchi , Toru Takahama , Yoshihiko Kusakabe , Takeshi Iwamoto , Nobuyuki Kosaka
发明人： Yoshimi Kinoshita , Tomoyuki Kanda , Katsuhisa Kitano , Kazuo Yoshida , Hiroshi Ohnishi , Kenichiro Yamanishi , Shigeo Sasaki , Hideki Komori , Taizo Eshima , Kouichirou Tsutahara , Toshihiko Noguchi , Toru Takahama , Yoshihiko Kusakabe , Takeshi Iwamoto , Nobuyuki Kosaka
IPC分类号： B23Q3/08 , B25B11/00 , C23C16/34 , C23C16/44 , C23C16/455 , C23C16/458 , C23C16/48 , H01L21/683 , C23C16/00 , B23B5/22 , B23B31/30
CPC分类号： C23C16/34 , B25B11/005 , C23C16/4405 , C23C16/455 , C23C16/4583 , C23C16/481 , H01L21/6838 , Y10T279/11
摘要： It is an object of the present invention to obtain a vacuum chucking which can vacuum suck a wafer even if dusts attach thereon. The main body of vacuum chuck (101) has a plurality of block grooves (125) on the surface on which the wafer (1) is sucked and fixed, in which vacuum evacuation paths (105) each for vacuum evacuating each block groove (125) are provided for each block groove (125). When the wafer(1) is sucked and fixed under low pressure, even if the degree of vacuum in one of the block grooves (125) decreases due to attachment of dusts on part of the suction surface, or the like, the wafer (1) can surely be sucked and held.
摘要翻译：本发明的目的是获得即使在其上附着有灰尘也能真空吸附晶片的真空吸盘。真空吸盘（101）的主体在其上吸引和固定晶片（1）的表面上具有多个块状凹槽（125），其中各真空抽空路径（105）用于真空抽吸每个块状凹槽（125））被设置用于每个块槽（125）。当晶片（1）在低压下被吸入和固定时，即使一个块状槽（125）中的一个真空度由于吸附表面的一部分上的灰尘等的附着而降低，晶片（1））肯定被吸住了。

10. 发明授权

US5379150A Method of manufacturing a spatial frequency filter for use in a pattern defect detection device 失效
标题翻译：制造用于图案缺陷检测装置的空间频率滤波器的方法
公开(公告)号：US5379150A
公开(公告)日：1995-01-03
申请号：US176571
申请日：1993-12-30
申请人： Yoko Miyazaki , Toshimasa Tomoda , Hitoshi Tanaka , Nobuyuki Kosaka , Toyomi Ohshige
发明人： Yoko Miyazaki , Toshimasa Tomoda , Hitoshi Tanaka , Nobuyuki Kosaka , Toyomi Ohshige
IPC分类号： G01B11/24 , G01N21/88 , G01N21/94 , G01N21/956 , G06K9/74 , H01L21/66 , G02B27/46 , G01B9/00
CPC分类号： G06K9/74 , G01N21/95623
摘要： A spatial frequency filter used in a pattern defect detection device, including a pattern which includes a black spot having a diameter expanded by a controlled amount in comparison with the diameter of a black spot on a photosensitive plate obtained by exposure by diffracted light from a pattern on a model specimen.
摘要翻译：一种在图案缺陷检测装置中使用的空间频率滤波器，包括图案，该图形包括直径扩大了受控量的黑点，与通过衍射光从图案曝光获得的感光片上的黑点的直径相比较在模型标本上。

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