专利快速检索-快速检索全球专利，免费商用专利数据库-IPRDB

1. 发明授权

US5305366A Thin film forming apparatus 失效
标题翻译：薄膜成型装置
公开(公告)号：US5305366A
公开(公告)日：1994-04-19
申请号：US817660
申请日：1992-01-07
申请人： Takehiko Nakahara , Masao Koshinaka , Nobuyuki Kosaka , Toshimasa Tomoda
发明人： Takehiko Nakahara , Masao Koshinaka , Nobuyuki Kosaka , Toshimasa Tomoda
IPC分类号： G01N23/223 , G01N23/225 , H01L21/66
CPC分类号： G01N23/2252 , G01N23/223 , G01N23/2257 , G01N2223/076
摘要： This invention relates to a method and apparatus for analyzing a plurality of elements that are present on the surface of a material of interest or in its neighborhood, as well as a thin-film forming apparatus that is capable of measuring the composition of a sample during thin film formation in the process of semi-conductor fabrication. The apparatus are characterized in that a detector is isolated from the light and heat generated in a sample making mechanism by means of a shield which is not only heat-resistant but also transmissive of fluorescent X-ray containing soft X-rays of 1 Kev and below and that a mirror for total reflection of X-rays which is equipped with slits capable of adjusting the incident and exit angles of fluorescent X-rays from the sample excited with an excitation source as well as the ranges of those angles is provided either at the entrance or exit of said shield or at both.
摘要翻译：本发明涉及一种用于分析存在于感兴趣的材料的表面上或其附近的多个元素的方法和装置，以及能够测量样品组成的薄膜形成装置半导体制造过程中的薄膜形成。该装置的特征在于，检测器借助于不仅耐热而且还透射含有1Kev的软X射线的荧光X射线的屏蔽而与样品制造机构中产生的光和热隔离，并且配备有能够调节来自激发源激发的样品的荧光X射线的入射角和出射角度的狭缝以及这些角度的范围的X射线的全反射镜，可以在所述护罩的入口或出口或两者。

2. 发明授权

US5317618A Light transmission type vacuum separating window and soft X-ray transmitting window 失效
标题翻译：透光式真空分离窗和软X射线透射窗
公开(公告)号：US5317618A
公开(公告)日：1994-05-31
申请号：US4596
申请日：1993-01-14
申请人： Takehiko Nakahara , Masao Koshinaka , Nobuyuki Kosaka
发明人： Takehiko Nakahara , Masao Koshinaka , Nobuyuki Kosaka
IPC分类号： G21K5/00 , B01J19/12 , G21K1/10 , H01J5/18 , H01J35/18 , H05G1/00 , G21K1/00
CPC分类号： B01J19/125 , G21K1/10 , H01J35/18 , H01J5/18
摘要： A light transmission type vacuum separating window for separating a vacuum area into a plurality of vacuum areas through a film that transmits the light of a wavelength area such as an X-ray area and an infrared ray area. This vacuum separating window includes a thin film that transmits the light. The vacuum area is separated into the plurality of vacuum areas through this thin film. The light is any one of an X-ray, an infrared ray, a visible ray and an ultraviolet ray. A metal or an alloy that turns out a liquid in a range of temperature of a using environment may be provided between the thin film and the support member for supporting the thin film. This metal is preferably gallium. The alloy preferably contains gallium and, more preferably, consists of 75.5 weight % gallium and 24.5 weight % indium.
摘要翻译：一种透光型真空分离窗，用于通过透射诸如X射线区域和红外线区域之类的波长区域的光而将真空区域分离成多个真空区域。该真空分离窗包括透射光的薄膜。真空区域通过该薄膜分离成多个真空区域。光是X射线，红外线，可见光和紫外线中的任一种。可以在薄膜和用于支撑薄膜的支撑构件之间设置在使用环境温度范围内流出液体的金属或合金。该金属优选为镓。该合金优选含有镓，更优选由75.5重量％的镓和24.5重量％的铟组成。

3. 发明授权

US5008558A System for detecting minute particles on or above a substrate 失效
标题翻译：用于检测基板上或上方的微小颗粒的系统
公开(公告)号：US5008558A
公开(公告)日：1991-04-16
申请号：US373801
申请日：1989-06-29
申请人： Masao Koshinaka , Minoru Akiyama , Hitoshi Tanaka , Toshimasa Tomoda
发明人： Masao Koshinaka , Minoru Akiyama , Hitoshi Tanaka , Toshimasa Tomoda
IPC分类号： G01N21/88 , G01N15/02 , G01N15/14 , G01N21/89 , G01N21/94 , G01N21/95 , G01N21/956 , H01L21/66
CPC分类号： G01N21/94 , G01N2015/0238 , G01N2021/8909 , G01N2021/945 , G01N21/9501
摘要： A fine-particle measuring apparatus designed to measure fine particles attached to the surface of a substrate for a semiconductor device set in a processing unit for formation of films, etching, cleaning, etc. and fine particles suspended in the space above the substrate surface by the use of scattering of a laser beam caused by these fine particles. The measuring apparatus comprises a laser beam scanning mechanism for irradiating a measuring space with a laser beam the angular position of which is minutely modulated at a predetermined frequency, a photodetector which receives light scattered by a fine particle and converts the received light into an electrical signal, and a signal processor which extracts from the electrical signal output by the photodetector a signal component whose frequency is the same as or double that of a modulating signal for the minute scanning with the laser beam and which has a constant phase difference in terms of time with respect to the modulating signal. Thus, it is possible to measure fine particles with high sensitivity without substantially disturbing the environment inside the process unit or the process itself.
摘要翻译：一种微粒测量装置，被设计用于测量附着在用于形成膜，蚀刻，清洁等的处理单元中的用于半导体器件的基板的表面的细颗粒，以及悬浮在基板表面上方的空间中的细颗粒使用由这些细颗粒引起的激光束的散射。该测量装置包括：激光束扫描机构，用于以预定频率微调其角度位置的激光束照射测量空间;光电检测器，其接收由微粒散射的光并将接收的光转换成电信号以及信号处理器，其从由光电检测器输出的电信号中提取频率与用于用激光束进行微小扫描的调制信号的频率相同或者是两倍的信号分量，并且其在时间上具有恒定的相位差相对于调制信号。因此，可以以高灵敏度测量细颗粒，而基本上不会干扰处理单元内的环境或过程本身。

4. 发明授权

US5030842A Fine-particle measuring apparatus 失效
标题翻译：细颗粒测量仪
公开(公告)号：US5030842A
公开(公告)日：1991-07-09
申请号：US540893
申请日：1990-06-20
申请人： Masao Koshinaka , Minoru Akiyama , Toshimasa Tomoda
发明人： Masao Koshinaka , Minoru Akiyama , Toshimasa Tomoda
IPC分类号： G01N21/88 , G01N15/02 , G01N15/14 , G01N21/21 , G01N21/47 , G01N21/94 , G01N21/95 , G01N21/956 , H01L21/66
CPC分类号： G01N15/0205 , G01N21/94 , G01N2015/145 , G01N21/21 , G01N21/47 , G01N21/9501
摘要： A fine-particle measuring apparatus designed to measure fine particles attached to the surface of a substrate of a semiconductor device set in a processing unit for formation of films, etching, cleaning, etc. and fine particles suspended in the space above the substrate surface by the use of scattering of a laser beam caused by these fine particles. The measuring apparatus comprises a laser light phase modulator for generating two laser beams which have the same wavelength and the phase difference between which is modulated at a predetermined frequency, an optical system which causes the two laser beams to intersect each other within a space containing the fine particles being the objects of measurement, a photodetector which receives light scattered by any of the fine particles in the region which the two laser beams intersect, and converts the received light into an electrical signal, and a signal processor which extracts from the electrical signal based on the scattered light of a signal component whose frequency is the same as or double that of a phase modulating signal for the modulation effected in the laser beam phase modulator and which has a constant phase difference with respect to the phase modulating signal. Thus, it is possible to measure fine particles with high spatial resolving power without substantially disturbing the environment inside the process unit or the process itself.
摘要翻译：一种微粒测量装置，设计用于测量附着在半导体器件的基板的表面上的细颗粒，该半导体器件的基板的表面设置在用于形成膜，蚀刻，清洁等的处理单元中，以及悬浮在基板表面上方的空间中的细颗粒使用由这些细颗粒引起的激光束的散射。测量装置包括激光相位调制器，用于产生具有相同波长的两个激光束，并且其相位差以预定频率被调制;使得两个激光束在包含该两个激光束的空间内彼此相交的光学系统作为测量对象的微粒子，接收由两个激光束相交的区域中的任何细颗粒散射的光并将接收的光转换为电信号的光检测器，以及从电信号中提取的信号处理器基于在激光束相位调制器中进行的调制的相位调制信号的频率相同或相反的信号分量的散射光，并且相对于相位调制信号具有恒定的相位差。因此，可以测量具有高空间分辨能力的细颗粒，而基本上不会干扰处理单元内的环境或过程本身。

5. 发明授权

US5024182A Thin film forming apparatus having a gas flow settling device 失效
标题翻译：具有气流稳定装置的薄膜形成装置
公开(公告)号：US5024182A
公开(公告)日：1991-06-18
申请号：US376015
申请日：1989-07-06
申请人： Toshiyuki Kobayashi , Masao Koshinaka , Yoshimi Kinoshita , Masao Oda , Kenji Yoshizawa
发明人： Toshiyuki Kobayashi , Masao Koshinaka , Yoshimi Kinoshita , Masao Oda , Kenji Yoshizawa
IPC分类号： C23C16/50 , C23C16/44 , C23C16/452 , C23C16/455 , C23C16/511 , H01L21/205 , H01L21/31
CPC分类号： C23C16/45502 , C23C16/452 , C23C16/455
摘要： An apparatus for forming a thin film on a substrate by bringing a first gas and a second gas into reaction with each other in a reaction chamber near the surface of the substrate in the reaction chamber. The apparatus has a plasma generating chamber disposed adjacent to the reaction chamber for generating a plasma of the first gas in a predetermined direction. A first gas inlet is provided at the boundary between the plasma generating chamber and the reaction chamber and formed to extend in the predetermined direction, while a second gas inlet is provided in the vicinity of the first gas inlet and extended in the predetermined direction. The apparatus further has a first gas supplying device for introducing the first gas into the plasma generating chamber and for introducing the first gas activated by a plasma in the plasma generating chamber into the reaction chamber through the first gas inlet, and second gas supplying device for supplying the second gas into the reaction chamber through the second gas inlet. A first flow settling device having plates disposed transverse to the flow of the first gas is positioned between the first gas inlet and plasma chamber. A second flow settling device may be located between the second gas supplying device and second gas inlet.
摘要翻译：一种用于在反应室中的基板表面附近的反应室中使第一气体和第二气体彼此反应而在基板上形成薄膜的装置。该装置具有邻近反应室设置的等离子体产生室，用于沿预定方向产生第一气体的等离子体。第一气体入口设置在等离子体产生室和反应室之间的边界处并形成为沿预定方向延伸，而第二气体入口设置在第一气体入口附近并沿预定方向延伸。该装置还具有：第一气体供给装置，其用于将第一气体引入等离子体发生室，并且通过第一气体入口将等离子体产生室中的等离子体激活的第一气体引入反应室;第二气体供给装置，通过第二气体入口将第二气体供应到反应室中。具有横向于第一气体的流动设置的板的第一流动沉降装置位于第一气体入口和等离子体室之间。第二流动沉降装置可以位于第二气体供给装置和第二气体入口之间。

6. 发明授权

US07061345B2 Filter circuit with series and parallel elements 失效
标题翻译：具有串联和并联元件的滤波电路
公开(公告)号：US07061345B2
公开(公告)日：2006-06-13
申请号：US10493662
申请日：2002-12-13
申请人： Koichiro Misu , Koji Ibata , Kouji Murai , Kenji Yoshida , Kousaku Yamagata , Kenji Itoh , Isao Murase , Masao Koshinaka
发明人： Koichiro Misu , Koji Ibata , Kouji Murai , Kenji Yoshida , Kousaku Yamagata , Kenji Itoh , Isao Murase , Masao Koshinaka
IPC分类号： H03H9/54 , H03H9/64
CPC分类号： H03H9/6483 , H03H7/0115 , H03H7/0123 , H03H7/1758 , H03H7/1766 , H03H7/463
摘要： Filter circuitry is provided with a series element and a parallel element. The filter circuitry transmits signals that fall within a certain passband and attenuates signals that don't fall within the certain passband. The series element is comprised of a resonance element having antiresonance characteristics, and the parallel element is comprised of a series circuit including an inductor and a capacitor.
摘要翻译：滤波器电路具有串联元件和并联元件。滤波器电路传输落入一定通带内的信号，并衰减不落入某一通带内的信号。串联元件由具有反谐振特性的谐振元件构成，并联元件由包括电感器和电容器的串联电路构成。

你已经成功收藏专利！

检索式保存成功!

IPRDB

热门服务

关于我们

友情链接

联系方式