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    • 2. 发明授权
    • Method for forming an electrical connection in a thin film actuated
mirror
    • 在薄膜致动反射镜中形成电连接的方法
    • US5834163A
    • 1998-11-10
    • US699755
    • 1996-08-20
    • Yong-Ki MinMin-Sik Um
    • Yong-Ki MinMin-Sik Um
    • G02B26/08H05K3/40G03C5/00G02B21/26
    • G02B26/0858H05K3/4092
    • A method for electrically connecting a thin film electrode to a connecting terminal on an active matrix in the manufacture of a thin film actuated mirror is disclosed. The method includes the steps of: forming a thin film sacrificial layer having an empty cavity on top of the active matrix; forming an elastic, a second thin film and a thin film electrodisplacive layers, successively, on top of the thin film sacrificial layer including the empty cavity; forming a contact hole extending from top of the thin film electrodisplacive layer to top of the connecting terminal; forming a first thin film layer on top of the thin film electrodisplacive layer including the contact hole; patterning the first thin film, the thin film electrodisplacive, the second thin film and the elastic layers, respectively; and removing the thin film sacrificial layer, thereby forming the thin film actuated mirror.
    • 公开了一种在薄膜致动反射镜的制造中将薄膜电极电连接到有源矩阵上的连接端子上的方法。 该方法包括以下步骤:在有源矩阵的顶部上形成具有空腔的薄膜牺牲层; 在包括空腔的薄膜牺牲层的顶部上依次形成弹性,第二薄膜和薄膜电致位移层; 形成从所述薄膜电致位移层的顶部延伸到所述连接端子的顶部的接触孔; 在包括接触孔的薄膜电致位移层的顶部上形成第一薄膜层; 分别构图第一薄膜,薄膜电致位移,第二薄膜和弹性层; 并除去薄膜牺牲层,由此形成薄膜致动反射镜。
    • 7. 发明授权
    • Method for the manufacture of a thin film actuated mirror array
    • 用于制造薄膜致动反射镜阵列的方法
    • US5877889A
    • 1999-03-02
    • US918870
    • 1997-08-26
    • Min-Sik UmMyung-Kwon Koo
    • Min-Sik UmMyung-Kwon Koo
    • G02B5/08G02B26/08H04N5/74G02B26/00
    • G02B26/0858Y10S359/904
    • An inventive method for the manufacture of an array of M.times.N thin film actuated mirrors for use in an optical projection system includes the steps of: providing an active matrix; depositing a thin film sacrificial layer; depositing a protective oxidation layer on top of the thin film sacrificial layer; creating an array of empty cavities; depositing an elastic layer; forming an array of conduits in the elastic layer; depositing a second thin film, a thin film electrodisplacive and a first thin film layers, successively, thereby forming a multiple layer structure; patterning the multiple layer structure, until the thin film sacrificial layer is exposed; and removing the thin film sacrificial layer to thereby form an array of M.times.N thin film actuated mirrors. The protective oxidation layer is deposited on top of the thin film sacrificial layer before the formation of each of the empty cavities, which, in turn, prevents phosphorus on the surface of thin film sacrificial layer from getting oxidized.
    • 用于制造用于光学投影系统的MxN薄膜致动反射镜阵列的创新方法包括以下步骤:提供有源矩阵; 沉积薄膜牺牲层; 在所述薄膜牺牲层的顶部上沉积保护氧化层; 创造一个空腔阵列; 沉积弹性层; 在弹性层中形成导管阵列; 依次沉积第二薄膜,薄膜电致位移和第一薄膜层,从而形成多层结构; 图案化多层结构,直到薄膜牺牲层被暴露; 并移除薄膜牺牲层从而形成MxN薄膜致动反射镜阵列。 在形成每个空腔之前,保护氧化层沉积在薄膜牺牲层的顶部上,这进而防止了薄膜牺牲层的表面上的磷被氧化。
    • 9. 发明授权
    • Method for manufacturing a thin film actuated mirror having a stable
elastic member
    • 一种具有稳定弹性部件的薄膜致动反射镜的制造方法
    • US5702569A
    • 1997-12-30
    • US703257
    • 1996-08-26
    • Myung-Hyun ParkMyung-Kwon KooMin-Sik Um
    • Myung-Hyun ParkMyung-Kwon KooMin-Sik Um
    • B81B3/00G02B26/08C03C15/00B05D5/06
    • B81B3/0072G02B26/0858
    • A method for forming an elastic member in a thin film actuated mirror, the method being capable of controlling a stress built up therein, is disclosed. The method includes the steps of: forming a thin film sacrificial layer; depositing an elastic layer on top of the thin film sacrificial layer by using a CVD method; forming an actuating structure on top of the elastic layer, the actuating structure having a first thin film electrode, a thin film electrodisplacive member, a second thin film electrode and an elastic member; and removing the thin film sacrificial layer. In the present invention, the elastic layer is vertically divided into at least two portions, each of the portions being made of a same material having a different stoichiometry. The stress built up in the elastic layer is controlled by controlling the ratio of the source gases.
    • 公开了一种在薄膜致动反射镜中形成弹性部件的方法,该方法能够控制其中形成的应力。 该方法包括以下步骤:形成薄膜牺牲层; 通过使用CVD法在所述薄膜牺牲层的顶部上沉积弹性层; 在所述弹性层的顶部上形成致动结构,所述致动结构具有第一薄膜电极,薄膜电致位移元件,第二薄膜电极和弹性元件; 并去除薄膜牺牲层。 在本发明中,弹性层被纵向分割为至少两部分,每个部分由具有不同化学计量的相同材料制成。 通过控制源气体的比例来控制在弹性层中积聚的应力。