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1. 发明授权

US5702569A Method for manufacturing a thin film actuated mirror having a stable elastic member 失效
标题翻译：一种具有稳定弹性部件的薄膜致动反射镜的制造方法
公开(公告)号：US5702569A
公开(公告)日：1997-12-30
申请号：US703257
申请日：1996-08-26
申请人： Myung-Hyun Park , Myung-Kwon Koo , Min-Sik Um
发明人： Myung-Hyun Park , Myung-Kwon Koo , Min-Sik Um
IPC分类号： B81B3/00 , G02B26/08 , C03C15/00 , B05D5/06
CPC分类号： B81B3/0072 , G02B26/0858
摘要： A method for forming an elastic member in a thin film actuated mirror, the method being capable of controlling a stress built up therein, is disclosed. The method includes the steps of: forming a thin film sacrificial layer; depositing an elastic layer on top of the thin film sacrificial layer by using a CVD method; forming an actuating structure on top of the elastic layer, the actuating structure having a first thin film electrode, a thin film electrodisplacive member, a second thin film electrode and an elastic member; and removing the thin film sacrificial layer. In the present invention, the elastic layer is vertically divided into at least two portions, each of the portions being made of a same material having a different stoichiometry. The stress built up in the elastic layer is controlled by controlling the ratio of the source gases.
摘要翻译：公开了一种在薄膜致动反射镜中形成弹性部件的方法，该方法能够控制其中形成的应力。该方法包括以下步骤：形成薄膜牺牲层; 通过使用CVD法在所述薄膜牺牲层的顶部上沉积弹性层; 在所述弹性层的顶部上形成致动结构，所述致动结构具有第一薄膜电极，薄膜电致位移元件，第二薄膜电极和弹性元件; 并去除薄膜牺牲层。在本发明中，弹性层被纵向分割为至少两部分，每个部分由具有不同化学计量的相同材料制成。通过控制源气体的比例来控制在弹性层中积聚的应力。

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