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1. 发明申请

US20110258163A1 DYNAMICALLY CREATED TWO-STAGE SELF EXTRACTING ARCHIVES 审中-公开
标题翻译：动态创建两级自动提取档案
公开(公告)号：US20110258163A1
公开(公告)日：2011-10-20
申请号：US13091080
申请日：2011-04-20
申请人： Serge Volkoff , Darryl Lovato , Michael Halpin
发明人： Serge Volkoff , Darryl Lovato , Michael Halpin
IPC分类号： G06F17/30
CPC分类号： H03M7/30 , G06F16/113
摘要： A method of dynamically creating a two-stage self-extracting archives. During the archive creation process the executable code segments for inverse algorithms are selectively added to the self-extracting archive, but only for those algorithms applied during archive creation. This results in a considerably smaller size of the self-extracting archive. Additional space savings can be achieved by reprocessing the original data to eliminate the use of any algorithm applied in the archive creation which resulted in less savings than the additional size of the corresponding inverse algorithm. The selected inverse algorithms are themselves compressed. A compact inverse algorithm is provided as ready-to-execute code, which restores the selected inverse algorithms to an executable state, and then causes them to be executed on the compressed file data.
摘要翻译：一种动态创建两阶段自解压存档的方法。在归档创建过程中，用于逆算法的可执行代码段被选择性地添加到自解压缩存档，但仅适用于在归档创建期间应用的那些算法。这导致自解压档案的大小更小。通过重新处理原始数据可以实现额外的空间节省，以消除使用归档创建中应用的任何算法，这导致比相应逆算法的附加大小更少的节省。所选择的逆算法本身被压缩。提供了一种紧凑的逆算法作为可执行代码，将所选择的逆算法恢复为可执行状态，然后使其在压缩文件数据上执行。

2. 发明申请

US20070056150A1 APPARATUS AND METHODS FOR PREVENTING ROTATIONAL SLIPPAGE BETWEEN A VERTICAL SHAFT AND A SUPPORT STRUCTURE FOR A SEMICONDUCTOR WAFER HOLDER 审中-公开
标题翻译：用于防止垂直轴和用于半导体波形支架的支撑结构之间的旋转滑移的装置和方法
公开(公告)号：US20070056150A1
公开(公告)日：2007-03-15
申请号：US11557037
申请日：2006-11-06
申请人： Thomas Weeks , Lewis Bernett , Loren Jacobs , Eric Wood , Michael Halpin
发明人： Thomas Weeks , Lewis Bernett , Loren Jacobs , Eric Wood , Michael Halpin
IPC分类号： H01L21/00 , C23C16/00
CPC分类号： H01L21/68728 , C23C16/4584 , H01L21/68792
摘要： A substrate support assembly positively secures a substrate holder support to a rotation shaft with respect to rotationally applied forces. A substrate holder support is configured to have an opening in a socket into which, when aligned with an indentation in the rotational shaft to form a passage, a retaining member is removably inserted to engage both the socket opening and the shaft indentation. Methods of rotating a substrate while minimizing rotational slippage of the substrate holder support with respect to the shaft are also provided.
摘要翻译：衬底支撑组件相对于旋转施加的力将衬底保持器支撑件主动地固定到旋转轴。衬底保持器支撑件构造成在插座中具有开口，当与旋转轴中的凹槽对准以形成通道时，保持构件可移除地插入到该插座中以与插座开口和轴凹部接合。还提供了使衬底旋转同时使衬底保持器支撑件相对于轴的旋转滑动最小化的方法。

3. 发明申请

US20050166849A1 Apparatus and methods for preventing rotational slippage between a vertical shaft and a support structure for a semiconductor wafer holder 有权
标题翻译：用于防止用于半导体晶片保持器的垂直轴和支撑结构之间的旋转滑动的装置和方法
公开(公告)号：US20050166849A1
公开(公告)日：2005-08-04
申请号：US10769549
申请日：2004-01-30
申请人： Thomas Weeks , Lewis Barnett , Loren Jacobs , Eric Wood , Michael Halpin
发明人： Thomas Weeks , Lewis Barnett , Loren Jacobs , Eric Wood , Michael Halpin
IPC分类号： H01L21/683 , C23C16/00 , C23C16/458 , H01L21/68 , H01L21/687
CPC分类号： H01L21/68728 , C23C16/4584 , H01L21/68792 , Y10T29/41
摘要： A substrate support assembly positively secures a substrate holder support to a rotation shaft with respect to rotationally applied forces. A substrate holder support is configured to have an opening in a socket into which, when aligned with an indentation in the rotational shaft to form a passage, a retaining member is removably inserted to engage both the socket opening and the shaft indentation. Methods of rotating a substrate while minimizing rotational slippage of the substrate holder support with respect to the shaft are also provided.
摘要翻译：衬底支撑组件相对于旋转施加的力将衬底保持器支撑件主动地固定到旋转轴。衬底保持器支撑件构造成在插座中具有开口，当与旋转轴中的凹槽对准以形成通道时，保持构件可移除地插入到该插座中以与插座开口和轴凹部接合。还提供了使衬底旋转同时使衬底保持器支撑件相对于轴的旋转滑动最小化的方法。

4. 发明授权

US08933375B2 Susceptor heater and method of heating a substrate 有权
标题翻译：受体加热器和加热基材的方法
公开(公告)号：US08933375B2
公开(公告)日：2015-01-13
申请号：US13535214
申请日：2012-06-27
申请人： Todd Dunn , Fred Alokozai , Jerry Winkler , Michael Halpin
发明人： Todd Dunn , Fred Alokozai , Jerry Winkler , Michael Halpin
IPC分类号： F27B5/14 , F26B19/00
CPC分类号： H01L21/67103 , F28D15/00 , H01L21/67109 , H01L21/68714 , H01L21/68742
摘要： A wafer processing apparatus may include a susceptor having a top side and a backside, a susceptor heater having a spacing member and a heating member, a shim removably mounted between the susceptor and the susceptor heater, a cavity formed by the susceptor backside, the susceptor heater, and the shim, a fluid inlet communicating with the cavity, and a plurality of fluid outlets communicating with the cavity.
摘要翻译：晶片处理装置可以包括具有顶侧和背面的基座，具有间隔构件和加热构件的基座加热器，可移除地安装在基座和基座加热器之间的垫片，由基座背面形成的空腔，基座加热器和垫片，与空腔连通的流体入口以及与空腔连通的多个流体出口。

5. 发明申请

US20140000843A1 SUSCEPTOR HEATER AND METHOD OF HEATING A SUBSTRATE 有权
标题翻译： SUSCEPTOR加热器和加热基材的方法
公开(公告)号：US20140000843A1
公开(公告)日：2014-01-02
申请号：US13535214
申请日：2012-06-27
申请人： Todd Dunn , Fred Alokozai , Jerry Winkler , Michael Halpin
发明人： Todd Dunn , Fred Alokozai , Jerry Winkler , Michael Halpin
IPC分类号： H01L21/324 , F28F7/00
CPC分类号： H01L21/67103 , F28D15/00 , H01L21/67109 , H01L21/68714 , H01L21/68742
摘要： A wafer processing apparatus may include a susceptor having a top side and a backside, a susceptor heater having a spacing member and a heating member, a shim removably mounted between the susceptor and the susceptor heater, a cavity formed by the susceptor backside, the susceptor heater, and the shim, a fluid inlet communicating with the cavity, and a plurality of fluid outlets communicating with the cavity.
摘要翻译：晶片处理装置可以包括具有顶侧和背面的基座，具有间隔构件和加热构件的基座加热器，可移除地安装在基座和基座加热器之间的垫片，由基座背面形成的空腔，基座加热器和垫片，与空腔连通的流体入口以及与空腔连通的多个流体出口。

6. 发明授权

US08702080B2 Method and system for dual resolution translation stage 有权
标题翻译：双分辨率翻译阶段的方法和系统
公开(公告)号：US08702080B2
公开(公告)日：2014-04-22
申请号：US12782640
申请日：2010-05-18
申请人： John Michael Halpin
发明人： John Michael Halpin
IPC分类号： B23Q3/18 , B25B1/22 , B23Q3/00
CPC分类号： G02B27/149 , G02B7/005 , G02B27/0075 , G02B27/1073
摘要： A dual resolution translation stage includes a stage assembly operable to receive an optical element and a low resolution adjustment device mechanically coupled to the stage assembly. The dual resolution stage also includes an adjustable pivot block mechanically coupled to the stage assembly. The adjustable pivot block includes a pivot shaft. The dual resolution stage further includes a lever arm mechanically coupled to the adjustable pivot block. The lever arm is operable to pivot about the pivot shaft. The dual resolution stage additionally includes a high resolution adjustment device mechanically coupled to the lever arm and the stage assembly.
摘要翻译：双分辨率平移平台包括可操作以接收光学元件的台架组件和机械地联接到舞台组件的低分辨率调节装置。双分辨率级还包括机械地联接到平台组件的可调枢轴块。可调枢轴块包括枢轴。双分辨率级还包括机械地联接到可调枢轴块的杠杆臂。杠杆臂可操作以围绕枢轴枢转。双分辨率级还包括机械耦合到杠杆臂和台架组件的高分辨率调节装置。

7. 外观设计

USD698904S1 Vacuum flange ring 有权
标题翻译：真空法兰环
公开(公告)号：USD698904S1
公开(公告)日：2014-02-04
申请号：US29412887
申请日：2012-02-08
申请人： Robert Brennan Milligan , Michael Halpin
设计人： Robert Brennan Milligan , Michael Halpin

8. 发明申请

US20070119377A1 BARRIER COATING FOR VITREOUS MATERIALS 审中-公开
标题翻译：用于耐火材料的障碍涂层
公开(公告)号：US20070119377A1
公开(公告)日：2007-05-31
申请号：US11615878
申请日：2006-12-22
申请人： Michael Halpin
发明人： Michael Halpin
IPC分类号： G01K1/14 , C23C16/00
CPC分类号： C23C16/4404 , C03C17/225 , C03C2217/281 , C03C2217/282 , C03C2218/152
摘要： A chemical vapor deposition apparatus comprises a reaction chamber and one or more vitreous components having an outer surface that is covered at least in part by a devitrification barrier layer. In some arrangements, the one or more vitrious components can include a thermocouple. In a preferred arrangement, the devitrification barrier coating is formed from silicon nitride, which can be deposited on the vitreous component using chemical vapor deposition (CVD).
摘要翻译：化学气相沉积设备包括反应室和一个或多个玻璃体组分，其具有至少部分被失透阻挡层覆盖的外表面。在一些布置中，一个或多个无害组分可以包括热电偶。在优选的布置中，失透屏障涂层由氮化硅形成，其可以使用化学气相沉积（CVD）沉积在玻璃质组分上。

9. 发明申请

US20050088003A1 Bonded structures for use in semiconductor processing environments 有权
标题翻译：用于半导体加工环境的结合结构
公开(公告)号：US20050088003A1
公开(公告)日：2005-04-28
申请号：US10225545
申请日：2002-08-20
申请人： Michael Halpin
发明人： Michael Halpin
IPC分类号： B65G49/07 , H01L21/677 , H01L21/687 , B25J15/06
CPC分类号： H01L21/68707 , Y10S414/141
摘要： A structure for use in a semiconductor processing environment is provided, including a first plate a second plate bonded to the first plate. A distal end of the second plate extends beyond a distal end of the first plate. The distal end of the first plate is tapered along a length at least one-half of a width of the first plate adjacent the tapered distal end of the first plate.
摘要翻译：提供一种用于半导体处理环境的结构，包括：第一板，第二板与第一板结合。第二板的远端延伸超过第一板的远端。第一板的远端沿与第一板的锥形远端相邻的第一板的宽度的至少一半的长度是锥形的。

10. 发明申请

US20110286122A1 Method and System For Dual Resolution Translation Stage 有权
标题翻译：双分辨率翻译阶段的方法与系统
公开(公告)号：US20110286122A1
公开(公告)日：2011-11-24
申请号：US12782640
申请日：2010-05-18
申请人： John Michael Halpin
发明人： John Michael Halpin
IPC分类号： G02B7/00
CPC分类号： G02B27/149 , G02B7/005 , G02B27/0075 , G02B27/1073
摘要： A dual resolution translation stage includes a stage assembly operable to receive an optical element and a low resolution adjustment device mechanically coupled to the stage assembly. The dual resolution stage also includes an adjustable pivot block mechanically coupled to the stage assembly. The adjustable pivot block includes a pivot shaft. The dual resolution stage further includes a lever arm mechanically coupled to the adjustable pivot block. The lever arm is operable to pivot about the pivot shaft. The dual resolution stage additionally includes a high resolution adjustment device mechanically coupled to the lever arm and the stage assembly.
摘要翻译：双分辨率平移平台包括可操作以接收光学元件的台架组件和机械地联接到舞台组件的低分辨率调节装置。双分辨率级还包括机械地联接到平台组件的可调枢轴块。可调枢轴块包括枢轴。双分辨率级还包括机械地联接到可调枢轴块的杠杆臂。杠杆臂可操作以围绕枢轴枢转。双分辨率级还包括机械耦合到杠杆臂和台架组件的高分辨率调节装置。

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