发明申请
US20050166849A1 Apparatus and methods for preventing rotational slippage between a vertical shaft and a support structure for a semiconductor wafer holder
有权
基本信息:
- 专利标题： Apparatus and methods for preventing rotational slippage between a vertical shaft and a support structure for a semiconductor wafer holder
- 专利标题（中）：用于防止用于半导体晶片保持器的垂直轴和支撑结构之间的旋转滑动的装置和方法
- 申请号：US10769549 申请日：2004-01-30
- 公开(公告)号：US20050166849A1 公开(公告)日：2005-08-04
- 发明人： Thomas Weeks , Lewis Barnett , Loren Jacobs , Eric Wood , Michael Halpin
- 申请人： Thomas Weeks , Lewis Barnett , Loren Jacobs , Eric Wood , Michael Halpin
- 主分类号： H01L21/683
- IPC分类号： H01L21/683 ; C23C16/00 ; C23C16/458 ; H01L21/68 ; H01L21/687
摘要：
A substrate support assembly positively secures a substrate holder support to a rotation shaft with respect to rotationally applied forces. A substrate holder support is configured to have an opening in a socket into which, when aligned with an indentation in the rotational shaft to form a passage, a retaining member is removably inserted to engage both the socket opening and the shaft indentation. Methods of rotating a substrate while minimizing rotational slippage of the substrate holder support with respect to the shaft are also provided.
摘要（中）：
衬底支撑组件相对于旋转施加的力将衬底保持器支撑件主动地固定到旋转轴。 衬底保持器支撑件构造成在插座中具有开口，当与旋转轴中的凹槽对准以形成通道时，保持构件可移除地插入到该插座中以与插座开口和轴凹部接合。 还提供了使衬底旋转同时使衬底保持器支撑件相对于轴的旋转滑动最小化的方法。