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    • 10. 发明授权
    • Method for producing group III nitride compound semiconductor
    • III族氮化物半导体的制造方法
    • US06860943B2
    • 2005-03-01
    • US10268998
    • 2002-10-11
    • Masayoshi KoikeHiroshi Watanabe
    • Masayoshi KoikeHiroshi Watanabe
    • C30B29/38C30B25/02H01L21/20H01L21/205H01L29/201H01S5/323H01S5/343C30B25/04C30B25/14
    • C30B25/02C30B29/403C30B29/406H01L21/0237H01L21/02458H01L21/0254H01L21/0262H01L21/02639H01L21/02647H01L21/02658H01L33/007
    • Disclosed is a method for producing a Group III nitride compound semiconductor including a pit formation step in which a portion of an uppermost layer of a first Group III nitride compound semiconductor layer containing one or more sub-layers, the portion containing lattice defects, is subjected to treatment by use of a solution or vapor which corrodes the portion more easily than it corrodes a portion of the uppermost layer containing no lattice defects, the first Group III nitride compound semiconductor layer not being accompanied by a substrate therefor as a result of removal therefrom, or being accompanied by a substrate such that the semiconductor layer is formed with or without intervention of a buffer layer provided on the substrate; and a lateral growth step of growing a second Group III nitride compound semiconductor layer through vertical and lateral epitaxial overgrowth around nuclei as seeds for crystal growth which are on flat portions of the uppermost layer of the first Group III nitride compound semiconductor layer, but not on portions of the uppermost layer that define pits formed through the pit formation step.
    • 公开了一种制造含有凹坑形成步骤的III族氮化物化合物半导体的方法,其中包含一个或多个子层的第一III族氮化物化合物半导体层的最上层部分,包含晶格缺陷的部分被施加 通过使用比不腐蚀不含有晶格缺陷的最上层的一部分腐蚀该部分的溶液或蒸汽来进行处理,因此第一III族氮化物化合物半导体层不伴随其底物而被附着于其上 或伴随着衬底,使得半导体层形成有或没有介于设置在衬底上的缓冲层; 以及横向生长步骤,其通过垂直和横向外延过生长生长第二III族氮化物化合物半导体层,所述第三III族氮化物化合物半导体层作为晶体生长的晶种,其在第一III族氮化物半导体层的最上层的平坦部分上但不在 限定通过凹坑形成步骤形成的凹坑的最上层的部分。