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    • 4. 发明申请
    • GENERATING SUBIMAGES OF AN IMAGE TO USE TO REPRESENT THE IMAGE
    • 产生图像的副图像来表示图像
    • US20090285495A1
    • 2009-11-19
    • US12121720
    • 2008-05-15
    • David Laurence Wagner
    • David Laurence Wagner
    • G06K9/36
    • G06K9/00463
    • Provided are a method, system, and article of manufacture for generating subimages of an image to use to represent the image. A determination is made of a pixel location on one axis of an image comprising a plurality of pixels. The image is divided into multiple subimages at the determined pixel location on the axis. A determination is made as to whether each subimage can be cropped to remove regions of white pixels from the subimage. Each subimage is cropped to remove a region of white pixels in response to determining that the subimage can be cropped. An image file is generated defining the image including the subimages.
    • 提供了用于生成用于表示图像的图像的子图像的方法,系统和制品。 确定包括多个像素的图像的一个轴上的像素位置。 图像在轴上确定的像素位置被划分为多个子图像。 确定每个子图像是否可以被裁剪以从子图像去除白色像素的区域。 响应于确定可以裁剪子图像,每个子图像被裁剪以去除白色像素的区域。 生成定义包括子图像的图像的图像文件。
    • 6. 发明授权
    • Generating subimages of an image to use to represent the image
    • 生成用于表示图像的图像的子图像
    • US08023755B2
    • 2011-09-20
    • US12121720
    • 2008-05-15
    • David Laurence Wagner
    • David Laurence Wagner
    • G06K9/36
    • G06K9/00463
    • Provided are a method, system, and article of manufacture for generating subimages of an image to use to represent the image. A determination is made of a pixel location on one axis of an image comprising a plurality of pixels. The image is divided into multiple subimages at the determined pixel location on the axis. A determination is made as to whether each subimage can be cropped to remove regions of white pixels from the subimage. Each subimage is cropped to remove a region of white pixels in response to determining that the subimage can be cropped. An image file is generated defining the image including the subimages.
    • 提供了用于生成用于表示图像的图像的子图像的方法,系统和制品。 确定包括多个像素的图像的一个轴上的像素位置。 图像在轴上确定的像素位置被划分为多个子图像。 确定每个子图像是否可以被裁剪以从子图像去除白色像素的区域。 响应于确定可以裁剪子图像,每个子图像被裁剪以去除白色像素的区域。 生成定义包括子图像的图像的图像文件。
    • 7. 发明授权
    • Use of calcium fluoride substrate for lithography masks
    • 使用氟化钙衬底进行光刻掩模
    • US07541115B1
    • 2009-06-02
    • US11075993
    • 2005-03-09
    • William VolkLaurence Wagner
    • William VolkLaurence Wagner
    • G03F1/00G03C5/00
    • G03F7/0002B82Y10/00B82Y40/00G03F1/30G03F1/34G03F1/60G03F1/62
    • Photolithographic masks and nano-imprint lithography masks with calcium fluoride substrates are disclosed. A photolithographic mask has a calcium fluoride substrate having a surface, a patterned layer disposed on the surface, and a polymer layer forming a pellicle that covers the patterned layer. A mask for nano-imprint lithography has a calcium fluoride substrate with a surface and a nano-imprint lithography pattern formed on the surface. Such masks can be used in a method for reducing the effects of hydration during lithography. In the method a layer of photoresist is formed on a substrate. A mask having a substrate made of calcium fluoride with a patterned surface is disposed proximate the layer of photoresist. The photoresist is exposed to radiation that passes through the mask. The radiation is characterized by a vacuum wavelength between about 190 nm and about 450 nm. Calcium fluoride masks can also be used to reduce the effects of hydration nano-imprint lithography.
    • 公开了具有氟化钙衬底的光刻掩模和纳米压印光刻掩模。 光刻掩模具有具有表面的氟化钙衬底,设置在表面上的图案层,以及形成覆盖图案层的防护薄膜的聚合物层。 用于纳米压印光刻的掩模具有形成在表面上的表面和纳米压印光刻图案的氟化钙衬底。 这样的掩模可用于降低光刻期间水合作用的方法。 在该方法中,在衬底上形成一层光致抗蚀剂。 具有由具有图案化表面的氟化钙制成的衬底的掩模设置在光致抗蚀剂层附近。 光致抗蚀剂暴露于通过掩模的辐射。 辐射的特征在于约190nm至约450nm之间的真空波长。 氟化钙面膜也可用于降低水合纳米压印光刻的影响。