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    • 5. 发明授权
    • Micro-sensor for sensing chemical substance
    • 用于感测化学物质的微量传感器
    • US07730767B2
    • 2010-06-08
    • US11976683
    • 2007-10-26
    • Long Sun HuangChih-Kung LeeShih-Yuan LeeKuang-Chong WuYi Kuang Yen
    • Long Sun HuangChih-Kung LeeShih-Yuan LeeKuang-Chong WuYi Kuang Yen
    • G01N9/00
    • G01N29/036G01N2291/0257
    • The invention discloses a micro-sensor for sensing a chemical substance. The micro-sensor according to the invention includes a substrate, a micro-cantilever, an electrode structure, and a measuring device. The micro-cantilever is formed on the substrate and has a capturing surface for capturing chemical substances. The electrode structure is for supplying an electrical field. The electrical field is disposed so as to assist the capturing surface in capturing chemical substances. The measuring device, coupled to the micro-cantilever, is for measuring a variation on a mechanical property of the micro-cantilever induced by the captured chemical substance and interpreting the variation on the mechanical property of the micro-cantilever into information relative to the chemical substance.
    • 本发明公开了一种感测化学物质的微型传感器。 根据本发明的微型传感器包括基底,微悬臂,电极结构和测量装置。 微悬臂形成在基板上,具有用于捕获化学物质的捕获表面。 电极结构用于提供电场。 电场被设置成辅助捕获表面捕获化学物质。 耦合到微型悬臂的测量装置用于测量由捕获的化学物质引起的微悬臂的机械性能的变化,并将微悬臂梁的机械性能的变化解释为相对于化学物质的信息 物质。