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1. 发明授权

US07730767B2 Micro-sensor for sensing chemical substance 失效
标题翻译：用于感测化学物质的微量传感器
公开(公告)号：US07730767B2
公开(公告)日：2010-06-08
申请号：US11976683
申请日：2007-10-26
申请人： Long Sun Huang , Chih-Kung Lee , Shih-Yuan Lee , Kuang-Chong Wu , Yi Kuang Yen
发明人： Long Sun Huang , Chih-Kung Lee , Shih-Yuan Lee , Kuang-Chong Wu , Yi Kuang Yen
IPC分类号： G01N9/00
CPC分类号： G01N29/036 , G01N2291/0257
摘要： The invention discloses a micro-sensor for sensing a chemical substance. The micro-sensor according to the invention includes a substrate, a micro-cantilever, an electrode structure, and a measuring device. The micro-cantilever is formed on the substrate and has a capturing surface for capturing chemical substances. The electrode structure is for supplying an electrical field. The electrical field is disposed so as to assist the capturing surface in capturing chemical substances. The measuring device, coupled to the micro-cantilever, is for measuring a variation on a mechanical property of the micro-cantilever induced by the captured chemical substance and interpreting the variation on the mechanical property of the micro-cantilever into information relative to the chemical substance.
摘要翻译：本发明公开了一种感测化学物质的微型传感器。根据本发明的微型传感器包括基底，微悬臂，电极结构和测量装置。微悬臂形成在基板上，具有用于捕获化学物质的捕获表面。电极结构用于提供电场。电场被设置成辅助捕获表面捕获化学物质。耦合到微型悬臂的测量装置用于测量由捕获的化学物质引起的微悬臂的机械性能的变化，并将微悬臂梁的机械性能的变化解释为相对于化学物质的信息物质。

2. 发明申请

US20090019934A1 Micro-sensor for sensing chemical substance 失效
标题翻译：用于感测化学物质的微量传感器
公开(公告)号：US20090019934A1
公开(公告)日：2009-01-22
申请号：US11976683
申请日：2007-10-26
申请人： Long Sun Huang , Chih-Kung Lee , Shih-Yuan Lee , Kuang-Chong Wu , Yi Kuang Yen
发明人： Long Sun Huang , Chih-Kung Lee , Shih-Yuan Lee , Kuang-Chong Wu , Yi Kuang Yen
IPC分类号： G01H13/00
CPC分类号： G01N29/036 , G01N2291/0257
摘要： The invention discloses a micro-sensor for sensing a chemical substance. The micro-sensor according to the invention includes a substrate, a micro-cantilever, an electrode structure, and a measuring device. The micro-cantilever is formed on the substrate and has a capturing surface for capturing chemical substances. The electrode structure is for supplying an electrical field. The electrical field is disposed so as to assist the capturing surface in capturing chemical substances. The measuring device, coupled to the micro-cantilever, is for measuring a variation on a mechanical property of the micro-cantilever induced by the captured chemical substance and interpreting the variation on the mechanical property of the micro-cantilever into information relative to the chemical substance.
摘要翻译：本发明公开了一种感测化学物质的微型传感器。根据本发明的微传感器包括基板，微悬臂梁，电极结构和测量装置。微悬臂形成在基板上，具有用于捕获化学物质的捕获表面。电极结构用于提供电场。电场被设置成辅助捕获表面捕获化学物质。耦合到微型悬臂的测量装置用于测量由捕获的化学物质引起的微悬臂的机械性能的变化，并将微悬臂梁的机械性能的变化解释为相对于化学物质的信息物质。

3. 发明申请

US20090057789A1 PACKAGE STRUCTURE FOR MICRO-SENSOR 审中-公开
标题翻译：微型传感器的包装结构
公开(公告)号：US20090057789A1
公开(公告)日：2009-03-05
申请号：US12186388
申请日：2008-08-05
申请人： Long Sun Huang , Yung Shan Chiou , Kuan Yi Lin , Yi Kuang Yen , Chia Ming Hung
发明人： Long Sun Huang , Yung Shan Chiou , Kuan Yi Lin , Yi Kuang Yen , Chia Ming Hung
IPC分类号： H01L29/00
CPC分类号： G01N29/036 , G01D11/245 , G01N2291/0256
摘要： The invention discloses a package structure for a micro-sensor including a micro-cantilever for capturing a chemical substance. The package structure, according to the invention, includes a first substrate, a second substrate, and a casing. The first substrate thereon forms a processing circuit. The micro-sensor is bonded to a first upper surface of the first substrate and is electrically connected to the processing circuit capable of outputting a signal relative to the chemical substance sensed by the micro-sensor. The second substrate has a formed-through aperture. The second substrate is bonded to the first substrate such that the micro-sensor is disposed in the formed-through aperture. The casing is bonded to the second substrate and includes a reaction chamber in which the micro-cantilever is installed and a fluid containing the chemical substance flows into.
摘要翻译：本发明公开了一种用于微传感器的封装结构，其包括用于捕获化学物质的微型悬臂。根据本发明的封装结构包括第一基板，第二基板和外壳。其上的第一衬底形成处理电路。微传感器结合到第一衬底的第一上表面并且电连接到能够输出相对于由微传感器感测到的化学物质的信号的处理电路。第二基板具有成形通孔。第二基板被结合到第一基板，使得微传感器设置在成形通孔中。壳体结合到第二基板，并且包括其中安装微悬臂的反应室，并且含有化学物质的流体流入。

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