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    • 4. 发明授权
    • Method and apparatus for providing flow-stabilized microdischarges in metal capillaries
    • 用于在金属毛细管中提供流动稳定的微放电的方法和装置
    • US06700329B2
    • 2004-03-02
    • US10115840
    • 2002-04-03
    • Konstantinos P. GiapisMohan SankaranMichael J. Gordon
    • Konstantinos P. GiapisMohan SankaranMichael J. Gordon
    • H01J724
    • H05H1/48H05H2001/481H05H2240/10
    • Hollow cathode microdischarges in a tube geometry provides the formation of stable, high-pressure discharges in a variety of flowing gases including argon, helium, nitrogen, and hydrogen. Direct current discharges are ignited in stainless steel capillary tubes (dhole=178 &mgr;m) which are operated as the cathode and using a metal grid or plate as the anode. Argon discharges can be sustained at atmospheric pressure with voltages as low as 260 V for cathode-anode gaps of 0.5 mm. In one embodiment using a molybdenum substrate as the anode, microjets are struck in H2/CH4 mixtures at 200 Torr to deposit diamond films with well-faceted crystals. Optical emission spectroscopy of discharges used for growth confirms the presence of atomic hydrogen and CH radicals. Ballasting of individual tubes allows parallel operation of the microjets for larger area materials processing.
    • 管状几何形状的空心阴极微放电提供了在各种流动气体(包括氩气,氦气,氮气和氢气)中形成稳定的高压放电。 直流放电在不锈钢毛细管(dhole = 178 mum)中点燃,其作为阴极操作,并使用金属栅格或板作为阳极。 氩气放电可在大气压下持续,阴极 - 阳极间隙为0.5 mm的电压低至260 V。 在使用钼基材作为阳极的一个实施方案中,在200托下在H 2 / CH 4混合物中冲击微孔以沉积具有良好刻面晶体的金刚石膜。 用于生长的放电的光发射光谱证实了原子氢和CH自由基的存在。 单个管道的压载允许微型喷嘴的并行操作用于较大面积的材料加工。