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    • 2. 发明授权
    • Semiconductor device manufacturing method
    • 半导体器件制造方法
    • US08211796B2
    • 2012-07-03
    • US13282494
    • 2011-10-27
    • Takaharu ItaniKoji MatsuoKazuhiko Nakamura
    • Takaharu ItaniKoji MatsuoKazuhiko Nakamura
    • H01L21/44
    • H01L21/28518H01L29/665H01L29/66575H01L29/78
    • A semiconductor device manufacturing method has conducting first heating processing at a first heating temperature in an inert atmosphere under a first pressure in a first process chamber to silicide an upper part of the source-drain diffusion layer and form a silicide film; conducting second heating processing at a second heating temperature in an oxidizing atmosphere under a second pressure in a second process chamber to selectively oxidize at least a surface of the metal film on the element isolating insulation film and form a metal oxide film; conducting third heating processing at a third heating temperature which is higher than the first heating temperature and the second heating temperature in an atmosphere in a third process chamber to increase a concentration of silicon in the silicide film; and selectively removing the metal oxide film and an unreacted part of the metal film on the element isolating insulation film.
    • 半导体器件制造方法在第一处理室中在第一压力下在惰性气氛中在第一加热温度下进行第一加热处理,以硅化源极 - 漏极扩散层的上部并形成硅化物膜; 在第二处理室中在第二压力的氧化气氛中在第二加热温度下进行第二加热处理,以选择性地氧化元件隔离绝缘膜上的金属膜的至少一个表面,并形成金属氧化物膜; 在第三处理室的气氛中,在高于第一加热温度和第二加热温度的第三加热温度下进行第三加热处理,以增加硅化物膜中硅的浓度; 并且在元件隔离绝缘膜上选择性地除去金属氧化物膜和金属膜的未反应部分。
    • 4. 发明申请
    • TEMPERATURE SENSOR
    • 温度感应器
    • US20120044972A1
    • 2012-02-23
    • US13213033
    • 2011-08-18
    • Masamichi ITOKoji MATSUOSatoshi ISHIKAWA
    • Masamichi ITOKoji MATSUOSatoshi ISHIKAWA
    • G01K7/00
    • G01K1/08G01K1/16G01K7/16G01K2205/04
    • A temperature sensor (100) includes a heat-sensitive element (21) having a thermistor sintered-body (22), an insulating support (31), an insulation sheath (41) and a housing tube (11). The insulating support (31) is in contact with the rear end of the heat-sensitive element (21) and the insulation sheath (41) is in contact with the rear end of the insulating support (31). The housing tube (11) accommodates the heat-sensitive element (21), the insulating support (31) and the insulation sheath (41). The housing tube (11) includes a sheath accommodation portion (14) which accommodates the insulation sheath (41) and a distal accommodation portion (13). The distal accommodation portion (13) is located toward the distal end of the housing tube (11) with respect to the sheath accommodation portion (14), is smaller in outside diameter than the sheath accommodation portion (14), and accommodates at least half of the insulating support (31) as measured from the axially distal end of the insulating support (31).
    • 温度传感器(100)包括具有热敏电阻烧结体(22)的热敏元件(21),绝缘支架(31),绝缘护套(41)和外壳管(11)。 绝缘支撑件(31)与热敏元件(21)的后端接触,并且绝缘护套(41)与绝缘支撑件(31)的后端接触。 容纳管(11)容纳热敏元件(21),绝缘支撑件(31)和绝缘护套(41)。 容纳管(11)包括容纳绝缘护套(41)和远端容纳部分(13)的护套容纳部分(14)。 远侧容纳部(13)相对于护套容置部(14)朝向容纳管(11)的前端侧配置,比护套容纳部(14)的外径小,容纳至少一半 的绝缘支撑件(31),其从绝缘支撑件(31)的轴向远端测量。
    • 5. 发明申请
    • SEMICONDUCTOR DEVICE MANUFACTURING METHOD
    • 半导体器件制造方法
    • US20120040526A1
    • 2012-02-16
    • US13282494
    • 2011-10-27
    • Takaharu ItaniKoji MatsuoKazuhiko Nakamura
    • Takaharu ItaniKoji MatsuoKazuhiko Nakamura
    • H01L21/3205
    • H01L21/28518H01L29/665H01L29/66575H01L29/78
    • A semiconductor device manufacturing method has conducting first heating processing at a first heating temperature in an inert atmosphere under a first pressure in a first process chamber to silicide an upper part of the source-drain diffusion layer and form a silicide film; conducting second heating processing at a second heating temperature in an oxidizing atmosphere under a second pressure in a second process chamber to selectively oxidize at least a surface of the metal film on the element isolating insulation film and form a metal oxide film; conducting third heating processing at a third heating temperature which is higher than the first heating temperature and the second heating temperature in an atmosphere in a third process chamber to increase a concentration of silicon in the silicide film; and selectively removing the metal oxide film and an unreacted part of the metal film on the element isolating insulation film.
    • 半导体器件制造方法在第一处理室中在第一压力下在惰性气氛中在第一加热温度下进行第一加热处理,以硅化源极 - 漏极扩散层的上部并形成硅化物膜; 在第二处理室中在第二压力的氧化气氛中在第二加热温度下进行第二加热处理,以选择性地氧化元件隔离绝缘膜上的金属膜的至少一个表面,并形成金属氧化物膜; 在第三处理室的气氛中,在高于第一加热温度和第二加热温度的第三加热温度下进行第三加热处理,以增加硅化物膜中硅的浓度; 并且在元件隔离绝缘膜上选择性地除去金属氧化物膜和金属膜的未反应部分。
    • 6. 发明授权
    • Semiconductor device manufacturing method
    • 半导体器件制造方法
    • US08062973B2
    • 2011-11-22
    • US12693093
    • 2010-01-25
    • Takaharu ItaniKoji MatsuoKazuhiko Nakamura
    • Takaharu ItaniKoji MatsuoKazuhiko Nakamura
    • H01L21/44
    • H01L21/28518H01L29/665H01L29/66575H01L29/78
    • A semiconductor device manufacturing method has conducting first heating processing at a first heating temperature in an inert atmosphere under a first pressure in a first process chamber to silicide an upper part of the source-drain diffusion layer and form a silicide film; conducting second heating processing at a second heating temperature in an oxidizing atmosphere under a second pressure in a second process chamber to selectively oxidize at least a surface of the metal film on the element isolating insulation film and form a metal oxide film; conducting third heating processing at a third heating temperature which is higher than the first heating temperature and the second heating temperature in an atmosphere in a third process chamber to increase a concentration of silicon in the silicide film; and selectively removing the metal oxide film and an unreacted part of the metal film on the element isolating insulation film.
    • 半导体器件制造方法在第一处理室中在第一压力下在惰性气氛中在第一加热温度下进行第一加热处理,以硅化源极 - 漏极扩散层的上部并形成硅化物膜; 在第二处理室中在第二压力的氧化气氛中在第二加热温度下进行第二加热处理,以选择性地氧化元件隔离绝缘膜上的金属膜的至少一个表面,并形成金属氧化物膜; 在第三处理室的气氛中,在高于第一加热温度和第二加热温度的第三加热温度下进行第三加热处理,以增加硅化物膜中硅的浓度; 并且在元件隔离绝缘膜上选择性地除去金属氧化物膜和金属膜的未反应部分。
    • 7. 发明授权
    • Inkjet head and inkjet recording apparatus
    • 喷墨头和喷墨记录装置
    • US06604802B2
    • 2003-08-12
    • US09877109
    • 2001-06-11
    • Hideaki HorioKoji MatsuoHaruyuki HatanoYutaka Miyazono
    • Hideaki HorioKoji MatsuoHaruyuki HatanoYutaka Miyazono
    • B41J2938
    • B41J2/04578B41J2/0458B41J2/04581B41J2/04588B41J2/04596
    • An inkjet recording apparatus includes a moving device which moves an inkjet head relative to a recording medium. When the head is moved relative to the recording medium by the moving device, a nozzle of the head ejects ink onto the recording medium, so that recording is carried out. The inkjet head includes (a) pressure chambers containing ink, (b) nozzles communicating through the pressure chambers, (c) piezoelectric elements, (d) piezoelectric actuators that deform to increase or decrease the capacities of the pressure chambers due to piezoelectric effect of the piezoelectric elements, and (e) a controller for driving the actuators at a frequency not less than 20 kHz. This structure allows the actuators to operate substantially noiseless, and an image can be recorded at higher speed.
    • 喷墨记录装置包括使喷墨头相对于记录介质移动的移动装置。 当头部通过移动装置相对于记录介质移动时,头部的喷嘴将墨水喷射到记录介质上,从而进行记录。 喷墨头包括(a)包含油墨的压力室,(b)通过压力室连通的喷嘴,(c)压电元件,(d)由于压电腔的压电效应而使压力室的容量增大或减小的压电致动器 压电元件,以及(e)用于以不小于20kHz的频率驱动致动器的控制器。 这种结构允许致动器基本上无噪声地操作,并且可以以更高的速度记录图像。
    • 10. 发明授权
    • Image display apparatus
    • 图像显示装置
    • US06236381B1
    • 2001-05-22
    • US09198167
    • 1998-11-23
    • Takatsugu KurataMichio OhsugiHironari TaniguchiKoji MatsuoKanji Imai
    • Takatsugu KurataMichio OhsugiHironari TaniguchiKoji MatsuoKanji Imai
    • H01J3112
    • H01J29/467H01J31/125
    • An image display apparatus comprises, in a vacuum container whose inside is kept under vacuum, a fluorescent layer, an electron emission source having a plurality of electron sources, a deflecting electrode to deflect electron beams emitted from the electron emission source, and an ultrafocusing electrode to focus the electron beams and land the focused electron beams on predetermined positions of the fluorescent layer. The ultrafocusing electrode is arranged between the electron emission source and the fluorescent layer while the deflecting electrode is arranged between the electron emission source and the ultrafocusing electrode, so that the fluorescent layer is illuminated by the electron beams. If the landing position of the electron beam is deviated because of errors such as manufacturing errors in assembling the components into the image display apparatus, the deviation is minimized and an image display apparatus with high resolution can be obtained.
    • 图像显示装置在内部保持真空的真空容器中包括荧光层,具有多个电子源的电子发射源,用于偏转从电子发射源发射的电子束的偏转电极和超聚焦电极 聚焦电子束并将聚焦电子束落在荧光层的预定位置上。 超聚焦电极设置在电子发射源和荧光层之间,而偏转电极设置在电子发射源和超聚焦电极之间,使得荧光层被电子束照射。 如果电子束的着陆位置由于诸如将部件组装到图像显示装置中的制造误差等错误而偏移,则偏差最小化,并且可以获得高分辨率的图像显示装置。