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    • 1. 发明授权
    • Wafer drying apparatus
    • 晶圆烘干设备
    • US07343922B2
    • 2008-03-18
    • US11103802
    • 2005-04-12
    • Jae-Hyung JungYoung-Min KwonJong-Jae LeeDong-Hoon Jung
    • Jae-Hyung JungYoung-Min KwonJong-Jae LeeDong-Hoon Jung
    • B08B5/00F26B19/00
    • H01L21/67034Y10S134/902
    • A wafer drying method includes submerging a wafer in a cleaning solution in a dry chamber. An organic liquid vapor from an organic liquid is supplied into the dry chamber at a first volumetric supply rate to form an organic liquid layer on a surface of the cleaning solution, the organic liquid layer having at least a prescribed concentration of the organic liquid. The organic liquid vapor is supplied into the dry chamber at a second volumetric supply rate that is lower than the first volumetric supply rate. During and/or following the supplying of the organic liquid vapor into the dry chamber, at least a portion of the wafer is removed from the cleaning solution through the organic liquid layer.
    • 晶片干燥方法包括将晶片浸没在干燥室中的清洁溶液中。 来自有机液体的有机液体蒸气以第一体积供应速率供应到干燥室中,以在清洁溶液的表面上形成有机液体层,有机液体层至少具有规定浓度的有机液体。 有机液体蒸气以低于第一体积供应速率的第二体积供应速率供应到干燥室中。 在将有机液体蒸气供应到干燥室中和/或之后,晶片的至少一部分通过有机液体层从清洗溶液中除去。
    • 4. 发明授权
    • Liquid crystal display
    • 液晶显示器
    • US09291868B2
    • 2016-03-22
    • US13242875
    • 2011-09-23
    • Chang-Soo LeeKee-Bum ParkYun Jae ParkJong Jae LeeHoi Sik Moon
    • Chang-Soo LeeKee-Bum ParkYun Jae ParkJong Jae LeeHoi Sik Moon
    • G02F1/136G02F1/1343G02F1/1362H01L29/417
    • G02F1/1362G02F1/13624G02F1/136286H01L29/41733
    • A liquid crystal display includes a plurality of pixels arranged in a matrix, each pixel having a first sub-pixel electrode and a second sub-pixel electrode. A first thin film transistor is connected to the first sub-pixel electrode. A second thin film transistor is connected to the second sub-pixel electrode. A third thin film transistor is connected to the second sub-pixel electrode. A fourth thin film transistor is connected to a drain electrode of the third thin film transistor. A first gate line is connected to the first thin film transistor and the second thin film transistor. A data line is connected to the first thin film transistor and the second thin film transistor. A second gate line is connected to the third thin film transistor. A third gate line is connected to the fourth thin film transistor.
    • 液晶显示器包括以矩阵排列的多个像素,每个像素具有第一子像素电极和第二子像素电极。 第一薄膜晶体管连接到第一子像素电极。 第二薄膜晶体管连接到第二子像素电极。 第三薄膜晶体管连接到第二子像素电极。 第四薄膜晶体管连接到第三薄膜晶体管的漏电极。 第一栅极线连接到第一薄膜晶体管和第二薄膜晶体管。 数据线连接到第一薄膜晶体管和第二薄膜晶体管。 第二栅极线连接到第三薄膜晶体管。 第三栅极线连接到第四薄膜晶体管。
    • 5. 发明授权
    • Display device and driving method thereof
    • 显示装置及其驱动方法
    • US09053661B2
    • 2015-06-09
    • US13102076
    • 2011-05-06
    • Chang-Soo LeeJong Jae Lee
    • Chang-Soo LeeJong Jae Lee
    • G09G5/00G09G3/20G09G3/32G09G3/36
    • G09G3/20G09G3/3266G09G3/3677G09G2310/0267
    • A gate-off voltage generator provides a gate-off voltage to a gate line of a display panel. The gate-off voltage generator includes a transistor having a base terminal, a collector terminal, and an emitter terminal, the emitter terminal configured to output the gate-off voltage to the gate line. A controller is connected to the base terminal. A feedback circuit is connected between the gate line and the controller, the feedback circuit configured to provide to the controller a feedback voltage based upon the gate-off voltage outputted from the emitter terminal. The gate-off voltage from the emitter terminal is compared with a desired gate-off voltage in the controller and the voltage at the base terminal is controlled by the controller to provide the desired gate-off voltage to gate line.
    • 栅极截止电压发生器向显示面板的栅极线提供栅极截止电压。 栅极截止电压发生器包括具有基极端子,集电极端子和发射极端子的晶体管,发射极端子被配置为将栅极截止电压输出到栅极线。 控制器连接到基本终端。 反馈电路连接在栅极线和控制器之间,反馈电路被配置为基于从发射极端子输出的栅极截止电压向控制器提供反馈电压。 将来自发射极端子的栅极截止电压与控制器中的期望栅极截止电压进行比较,并且由控制器控制基极端子处的电压,以向栅极线提供所需的栅极截止电压。
    • 10. 发明授权
    • Vacuum dryer of drying semiconductor device using the same
    • 干燥半导体装置的真空干燥机使用相同
    • US6108928A
    • 2000-08-29
    • US115231
    • 1998-07-14
    • Chan-geun ParkJong-jae Lee
    • Chan-geun ParkJong-jae Lee
    • H01L21/304F26B5/04H01L21/00F26B21/06
    • H01L21/67034Y10S134/902
    • A vacuum dryer and a method of drying a semiconductor device using the same are provided. In the present invention, a vacuum dryer using isopropyl alcohol vapor, including an outer bath, an inner bath, a main water supply line, a supplementary water supply line, an inner bath drain line, and an outer bath drain line, is provided. After cleaning the inside of the vacuum dryer, the inner bath is filled with the supplied deionized water and the deionized water is continuously overflowed. Then, the semiconductor substrate is loaded into the inner bath of the vacuum dryer to which the deionized is continuously overflowed. The loaded semiconductor substrate is dried by supplying the isopropyl alcohol vapor to the inner bath into which the semiconductor substrate is loaded.
    • 提供一种真空干燥机和使用其的半导体装置的干燥方法。 在本发明中,提供了使用异丙醇蒸气的真空干燥机,包括外浴,内浴,主供水管,辅助供水管,内槽排水管,外槽排水管。 在清洁真空干燥器的内部后,内部的浴液被供应的去离子水填充,去离子水被连续溢出。 然后,将半导体衬底装载到去离子水不断溢出的真空干燥器的内槽中。 通过将异丙醇蒸气供给到其中加载半导体基板的内部浴中来干燥负载的半导体衬底。