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    • 4. 发明授权
    • Method of researching and analyzing information contained in a database
    • 研究和分析数据库中包含的信息的方法
    • US07117198B1
    • 2006-10-03
    • US09723960
    • 2000-11-28
    • John Edward CroninYu Wang Bibby
    • John Edward CroninYu Wang Bibby
    • G06F17/00
    • G06F17/30675G06F2216/11Y10S707/99933
    • A method (100) of researching and analyzing information contained in documents that belong to a first database (200) and are organized according to a first set of fields (210) for an electronic search and retrieval by a computer (850). The method includes the steps of: a) conducting an electronic search (202) of the first database to retrieve at least one document; b) developing user-defined fields (300); c) reading (310) the at least one document to retrieve information pertaining to the user-defined fields; d) entering into a second database (510) the at least one document, values of the first set of fields for the at least one document, the user-defined fields and the retrieved information pertaining to the user-defined fields; and e) analyzing (506) the information contained in the second database.
    • 一种用于研究和分析包含在属于第一数据库(200)的文档中并根据用于计算机的电子搜索和检索的第一集合字段(210)组织的信息的方法(100)(850)。 该方法包括以下步骤:a)进行第一数据库的电子搜索(202)以检索至少一个文档; b)开发用户定义的字段(300); c)读取(310)所述至少一个文档以检索与所述用户定义字段有关的信息; d)将所述至少一个文档,所述至少一个文档的所述第一组字段的值,所述用户定义的字段和与所述用户定义的字段有关的检索的信息的值输入到第二数据库(510)中; 以及e)分析(506)包含在第二数据库中的信息。
    • 7. 发明授权
    • Methods for the preparation of a semiconductor structure having multiple
levels of self-aligned interconnection metallization
    • 用于制备具有多级自对准互连金属化的半导体结构的方法
    • US5960254A
    • 1999-09-28
    • US838580
    • 1997-04-10
    • John Edward Cronin
    • John Edward Cronin
    • H01L21/60H01L21/768H01L23/522H01L21/463
    • H01L21/76897H01L21/76877H01L23/5226H01L2924/0002
    • An improved semiconductor structure is disclosed, including at least one stud-up and an interconnection line connected thereto, wherein the stud-up and interconnection line are formed from a single layer of metal. The structure is prepared by a method in which an insulator region is first provided on a semiconductor substrate, and is then patterned and etched to define at least one opening having a pre-selected depth. Metal is deposited to fill the opening and form the interconnection line, followed by the patterning and formation of a stud-up of desired dimensions within the metal-filled opening. The lower end of the stud-up becomes connected to the interconnection line, and the upper end of the stud-up terminates at or near the upper surface of the insulator region. Other embodiments also include an interconnected stud-down.An endpoint detection technique can be used to precisely control the height of the stud-up and the width of the interconnection line.
    • 公开了一种改进的半导体结构,其包括至少一个连接线和与之连接的互连线,其中分离线和互连线由单层金属形成。 该结构通过首先在半导体衬底上提供绝缘体区域的方法制备,然后将其图案化和蚀刻以限定具有预选深度的至少一个开口。 金属沉积以填充开口并形成互连线,随后在金属填充的开口内形成图案并形成所需尺寸的分层。 分支的下端连接到互连线,并且分支的上端终止于或靠近绝缘体区域的上表面。 其他实施例还包括互连的分离。 端点检测技术可以用于精确控制分支的高度和互连线的宽度。
    • 9. 发明授权
    • Self-aligned metallurgy
    • 自对准冶金
    • US5759911A
    • 1998-06-02
    • US517782
    • 1995-08-22
    • John Edward CroninCarter Welling Kaanta
    • John Edward CroninCarter Welling Kaanta
    • H01L21/28H01L21/311H01L21/768H01L21/31
    • H01L21/76811H01L21/31144H01L21/76802Y10S438/947
    • A method is provided for filling undesired sublithographic contact hole defects in a semiconductor structure caused by misalignment and undesirable overlap of metal line images over contact openings during photolithographic patterning. Unwanted contact between conductive metallization levels through these defects is thereby diminished. The method also provides self-alignment of the lines and contact holes for subsequent formation of stud via connections through which contact is desired to underlying metallization levels. Deposition of a conformal sacrificial material film fills the small, undesired sublithographic contact hole image formed and covers both mask surfaces through which the misaligned line image and contact opening were etched. Isotropic etching removes the conformal layer from all planar surfaces except those of the undesired sublithographic contact hole image. Translation into the underlying insulating layer results in the formation of only contact holes through which contact with underlying substrate metallization is desired. The method of the present invention may alternatively be practiced after the undesired sublithographic contact hole image is etched into the insulating layer to the underlying substrate metallization. Translation of sublithographic defects in a single mask layer overlying an insulating layer disposed over a substrate having metallization therein can also be avoided.
    • 提供了一种用于在光刻图案化期间在接触开口上的金属线图像的不对准和不期望的重叠引起的用于填充半导体结构中的不期望的亚光刻接触孔缺陷的方法。 因此,通过这些缺陷的导电金属化水平之间的不期望的接触被减少。 该方法还提供了线和接触孔的自对准,以便随后通过需要接触到底层金属化水平的连接形成螺柱。 共形牺牲材料膜的沉积填充形成的小的不期望的亚光刻接触孔图像,并覆盖蚀刻不对准线图像和接触开口的两个掩模表面。 各向同性蚀刻除了不需要的亚光刻接触孔图像之外的所有平面表面去除保形层。 翻译到下面的绝缘层导致仅形成接触孔,通过该孔与下面的衬底金属化接触是期望的。 本发明的方法可以替代地在不希望的亚光刻接触孔图像被蚀刻到绝缘层中到下面的衬底金属化之后实施。 也可以避免在设置在其上具有金属化的衬底上的绝缘层上的单个掩模层中的亚光刻缺陷的翻译。