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    • 2. 发明授权
    • Microsystem package structure
    • 微系统封装结构
    • US06809852B2
    • 2004-10-26
    • US10603957
    • 2003-06-24
    • Su TaoKuo-Chung YeeJen-Chieh KaoChih-Lung ChenHsing-Jung Liau
    • Su TaoKuo-Chung YeeJen-Chieh KaoChih-Lung ChenHsing-Jung Liau
    • G02B2600
    • G02B7/1821H01L2224/16145H01L2224/32225H01L2224/73265H01L2924/00014H01L2224/0401
    • The present invention relates to a package structure for a microsystem, comprising a substrate, a chip, an adhesive structure, a carrying substrate, a micro-mechanism, a plurality of wires, an annular body and a transparent plate. The chip is placed on the substrate. The annular adhesive structure having an opening is placed on the chip. The carrying substrate is placed on the adhesive structure, thus forming an interspace between the chip, the adhesive structure and the carrying substrate. The pressure inside the interspace can be balanced with the pressure outside the interspace through the opening. The micro-mechanism is disposed on the carrying substrate. The annular body is formed on the substrate and the transparent plate is attached on the annular body, thus forming a closed chamber between the substrate, the annular body and the transparent plate. The chip, the micro-mechanism, the adhesive structure, the carrying substrate and the wires are disposed within the closed chamber.
    • 本发明涉及一种用于微系统的封装结构,其包括基板,芯片,粘合结构,承载基板,微机构,多根导线,环形体和透明板。 将芯片放置在基板上。 具有开口的环形粘合剂结构被放置在芯片上。 携带衬底被放置在粘合剂结构上,从而在芯片,粘合剂结构和承载衬底之间形成间隙。 间隙内的压力可以通过开口与间隙外的压力平衡。 微机构设置在承载基板上。 环状体形成在基板上,透明板安装在环状体上,由此在基板,环状体和透明板之间形成封闭室。 芯片,微机构,粘合剂结构,承载基板和电线设置在封闭室内。
    • 8. 发明申请
    • CHIP PACKAGING PROCESS
    • 芯片包装工艺
    • US20070004087A1
    • 2007-01-04
    • US11306049
    • 2005-12-15
    • Jen-Chieh KaoKuo-Chung Yee
    • Jen-Chieh KaoKuo-Chung Yee
    • H01L21/00
    • H01L31/0203H01L24/94H01L27/14687H01L31/1876Y02E10/50Y02P70/521
    • A chip packaging process is provided. First, a matrix package substrate having a carrying surface with a plurality of scribe lines thereon is provided. The scribe lines divide the package substrate into a plurality of package substrate units. Then, a sealant is formed on each scribe line. A chip is disposed on each package substrate unit. Furthermore, the chip is electrically connected to a corresponding package substrate unit. Thereafter, a transparent cover is disposed over the matrix package substrate. The transparent cover and the matrix package substrate are connected via the sealant. After that, a trimming process along the scribe lines is performed to cut the transparent cover, the matrix package substrate and the sealant.
    • 提供了芯片封装工艺。 首先,提供具有其上具有多个划线的承载面的矩阵封装基板。 划线将封装衬底分成多个封装衬底单元。 然后,在每个划线上形成密封剂。 芯片设置在每个封装基板单元上。 此外,芯片电连接到相应的封装衬底单元。 此后,在矩阵封装基板上设置透明盖。 透明盖和矩阵封装基板通过密封剂连接。 之后,进行沿着划线的修整处理,以切割透明盖,矩阵封装基板和密封剂。