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    • 2. 发明授权
    • Microsystem package structure
    • 微系统封装结构
    • US06809852B2
    • 2004-10-26
    • US10603957
    • 2003-06-24
    • Su TaoKuo-Chung YeeJen-Chieh KaoChih-Lung ChenHsing-Jung Liau
    • Su TaoKuo-Chung YeeJen-Chieh KaoChih-Lung ChenHsing-Jung Liau
    • G02B2600
    • G02B7/1821H01L2224/16145H01L2224/32225H01L2224/73265H01L2924/00014H01L2224/0401
    • The present invention relates to a package structure for a microsystem, comprising a substrate, a chip, an adhesive structure, a carrying substrate, a micro-mechanism, a plurality of wires, an annular body and a transparent plate. The chip is placed on the substrate. The annular adhesive structure having an opening is placed on the chip. The carrying substrate is placed on the adhesive structure, thus forming an interspace between the chip, the adhesive structure and the carrying substrate. The pressure inside the interspace can be balanced with the pressure outside the interspace through the opening. The micro-mechanism is disposed on the carrying substrate. The annular body is formed on the substrate and the transparent plate is attached on the annular body, thus forming a closed chamber between the substrate, the annular body and the transparent plate. The chip, the micro-mechanism, the adhesive structure, the carrying substrate and the wires are disposed within the closed chamber.
    • 本发明涉及一种用于微系统的封装结构,其包括基板,芯片,粘合结构,承载基板,微机构,多根导线,环形体和透明板。 将芯片放置在基板上。 具有开口的环形粘合剂结构被放置在芯片上。 携带衬底被放置在粘合剂结构上,从而在芯片,粘合剂结构和承载衬底之间形成间隙。 间隙内的压力可以通过开口与间隙外的压力平衡。 微机构设置在承载基板上。 环状体形成在基板上,透明板安装在环状体上,由此在基板,环状体和透明板之间形成封闭室。 芯片,微机构,粘合剂结构,承载基板和电线设置在封闭室内。