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    • 7. 发明授权
    • Method and apparatus of calibrating multi-position SLM elements
    • 校准多位置SLM单元的方法和装置
    • US06965119B2
    • 2005-11-15
    • US10238220
    • 2002-09-10
    • Torbjörn SandströmJarek Luberek
    • Torbjörn SandströmJarek Luberek
    • G02B26/08G02B27/46G03F7/20G01N21/86
    • G03F7/70291G02B26/0841G02B27/46
    • The present invention relates to a method for calibrating elements in a spatial light modulator (SLM) as a function of an applied element control signal. A plurality of elements are calibrated simultaneously. A beam of electromagnetic radiation is projected onto at least a part of the SLM. An image of said part of said SLM is formed on a device for measuring intensity of electromagnetic radiation. Element calibrating data is generated by using the intensity data as a function of the applied element control signal by either driving a sub-matrix comprising at least two elements out of said part of the SLM to a sequence of applied element control signals or by seeking out the control signal for each element which give the same predetermined intensity value on the device for measuring the intensity of electromagnetic radiation and stepping through N different predetermined intensity values. The invention also relates to an apparatus for patterning a workpiece having such a calibration method. Other aspects of the present invention are reflected in the detailed description.
    • 本发明涉及一种用于校准空间光调制器(SLM)中的元件的方法,该方法是应用元件控制信号的函数。 多个元件被同时校准。 一束电磁辐射投射到SLM的至少一部分上。 所述SLM的所述部分的图像形成在用于测量电磁辐射强度的装置上。 通过使用强度数据作为所施加的元素控制信号的函数,通过将包括所述SLM的所述部分中的至少两个元素的子矩阵驱动到所应用的元素控制信号的序列或通过寻找所述元素校准数据来生成元素校准数据 在用于测量电磁辐射的强度并跨过N个不同的预定强度值的装置上给出相同的预定强度值的每个元件的控制信号。 本发明还涉及一种用于使具有这种校准方法的工件图案化的装置。 本发明的其他方面在详细描述中被体现。
    • 9. 发明申请
    • ILLUMINATION METHODS AND DEVICES FOR PARTIALLY COHERENT ILLUMINATION
    • 用于部分相干照明的照明方法和装置
    • US20110216302A1
    • 2011-09-08
    • US12718904
    • 2010-03-05
    • Jarek Luberek
    • Jarek Luberek
    • G03B27/32G02B26/00
    • G03F7/70425G03F7/70116G03F7/70583
    • The technology disclosed relates to a partially coherent illuminators. In particular, it relates to a partially coherent illuminator that directs laser radiation across multiple areas of an illumination pupil. In some circumstances, this reduces spatial and/or temporal coherence of the laser radiation. It must be used with a continuous laser to provide partially coherent illumination from a coherent laser. It can be combined with a workpiece tracker that effectively freezes the workpiece and extends the time that laser radiation can be applied to expose a pattern stamp on the workpiece or, it can be used with a stepper platform, without a tracker. A dynamically controllable aperture architecture is a by product of the technology disclosed.
    • 所公开的技术涉及部分相干的照明器。 特别地,它涉及将激光辐射引导到照明瞳孔的多个区域上的部分相干照明器。 在某些情况下,这降低了激光辐射的空间和/或时间相干性。 必须使用连续激光来提供来自相干激光的部分相干照明。 它可以与有效冻结工件的工件跟踪器组合,并延长激光辐射可以施加的时间,以露出工件上的图案印模,或者可以与步进平台一起使用,而不需要跟踪器。 动态可控的孔径结构是所公开的技术的产物。