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1. 发明申请

US20080025009A1 DIELECTRIC TRENCHES, NICKEL/TANTALUM OXIDE STRUCTURES, AND CHEMICAL MECHANICAL POLISHING TECHNIQUES 有权
标题翻译：电介质，镍/氧化钛结构和化学机械抛光技术
公开(公告)号：US20080025009A1
公开(公告)日：2008-01-31
申请号：US11866186
申请日：2007-10-02
申请人： Sergey Savastiouk , Valentin Kosenko , James Roman
发明人： Sergey Savastiouk , Valentin Kosenko , James Roman
IPC分类号： H05K7/02
CPC分类号： H01L28/40 , H01L21/4857 , H01L21/486 , H01L23/49822 , H01L23/49827 , H01L23/50 , H01L23/5223 , H01L23/53238 , H01L2224/16 , H01L2224/16235 , H01L2924/01019 , H01L2924/01057 , H01L2924/01068 , H01L2924/3025
摘要： A portion of a conductive layer (310, 910) provides a capacitor electrode (310.0, 910.0). Dielectric trenches (410, 414, 510) are formed in the conductive layer to insulate the capacitor electrode from those portions of the conductive layer which are used for conductive paths passing through the electrode but insulated from the electrode. Capacitor dielectric (320) can be formed by anodizing tantalum while a nickel layer (314) protects an underlying copper (310) from the anodizing solution. This protection allows the tantalum layer to be made thin to obtain large capacitance. Chemical mechanical polishing of a layer (610) is made faster, and hence possibly less expensive, by first patterning the layer photolithographically to form, and/or increase in height, upward protrusions of this layer.
摘要翻译：导电层（310,910）的一部分提供电容器电极（310.0,910.0）。电介质沟槽（410,414,510）形成在导电层中，以将电容器电极与用于穿过电极但与电极绝缘的导电路径的导电层的那些部分绝缘。可以通过阳极氧化钽形成电容器电介质（320），同时镍层（314）保护底层铜（310）与阳极氧化溶液。该保护允许使钽层变薄以获得大的电容。通过首先对该层进行光刻图案化以形成和/或增加该层的向上突起，使层（610）的化学机械抛光更快，因此可能更便宜。

2. 发明申请

US20070257367A1 Dielectric trenches, nickel/tantalum oxide structures,and chemical mechanical polishing techniques 失效
标题翻译：介质沟槽，镍/氧化钽结构和化学机械抛光技术
公开(公告)号：US20070257367A1
公开(公告)日：2007-11-08
申请号：US11418801
申请日：2006-05-05
申请人： Sergey Savastiouk , Valentin Kosenko , James Roman
发明人： Sergey Savastiouk , Valentin Kosenko , James Roman
IPC分类号： H01L23/52 , H01L23/48 , H01L29/40 , H01L21/4763
CPC分类号： H01L28/40 , H01L21/4857 , H01L21/486 , H01L23/49822 , H01L23/49827 , H01L23/50 , H01L23/5223 , H01L23/53238 , H01L2224/16 , H01L2224/16235 , H01L2924/01019 , H01L2924/01057 , H01L2924/01068 , H01L2924/3025
摘要： A portion of a conductive layer (310, 910) provides a capacitor electrode (310.0, 910.0). Dielectric trenches (410, 414, 510) are formed in the conductive layer to insulate the capacitor electrode from those portions of the conductive layer which are used for conductive paths passing through the electrode but insulated from the electrode. Capacitor dielectric (320) can be formed by anodizing tantalum while a nickel layer (314) protects an underlying copper (310) from the anodizing solution. This protection allows the tantalum layer to be made thin to obtain large capacitance. Chemical mechanical polishing of a layer (610) is made faster, and hence possibly less expensive, by first patterning the layer photolithographically to form, and/or increase in height, upward protrusions of this layer.
摘要翻译：导电层（310,910）的一部分提供电容器电极（310.0,910.0）。电介质沟槽（410,414,510）形成在导电层中，以将电容器电极与用于穿过电极但与电极绝缘的导电路径的导电层的那些部分绝缘。可以通过阳极氧化钽形成电容器电介质（320），同时镍层（314）保护底层铜（310）与阳极氧化溶液。该保护允许使钽层变薄以获得大的电容。通过首先对该层进行光刻图案化以形成和/或增加该层的向上突起，使层（610）的化学机械抛光更快，因此可能更便宜。

3. 发明授权

US06684007B2 Optical coupling structures and the fabrication processes 有权
标题翻译：光耦合结构和制造工艺
公开(公告)号：US06684007B2
公开(公告)日：2004-01-27
申请号：US09853449
申请日：2001-05-09
申请人： Tetsuzo Yoshimura , Yasuhito Takahashi , James Roman , Mark Thomas McCormack , Solomon I. Beilin , Wen-chou Vincent Wang , Masaaki Inao
发明人： Tetsuzo Yoshimura , Yasuhito Takahashi , James Roman , Mark Thomas McCormack , Solomon I. Beilin , Wen-chou Vincent Wang , Masaaki Inao
IPC分类号： G02B626
CPC分类号： H01L24/82 , G02B6/06 , G02B6/10 , G02B6/12002 , G02B6/124 , G02B6/13 , G02B6/132 , G02B6/136 , G02B6/26 , G02B6/42 , G02B6/4214 , G02B6/43 , G02B2006/12104 , G02B2006/12107 , G02B2006/12173 , H01L21/6835 , H01L23/48 , H01L23/5389 , H01L24/24 , H01L24/96 , H01L25/167 , H01L2221/68345 , H01L2221/6835 , H01L2221/68359 , H01L2221/68363 , H01L2221/68368 , H01L2224/05001 , H01L2224/05022 , H01L2224/05184 , H01L2224/05568 , H01L2224/05572 , H01L2224/05573 , H01L2224/16225 , H01L2224/24226 , H01L2924/01005 , H01L2924/01006 , H01L2924/0101 , H01L2924/01013 , H01L2924/01015 , H01L2924/01018 , H01L2924/01019 , H01L2924/01023 , H01L2924/01024 , H01L2924/01027 , H01L2924/01029 , H01L2924/0103 , H01L2924/01032 , H01L2924/01033 , H01L2924/01039 , H01L2924/01046 , H01L2924/01047 , H01L2924/01049 , H01L2924/01056 , H01L2924/01057 , H01L2924/01058 , H01L2924/01074 , H01L2924/01075 , H01L2924/01078 , H01L2924/01079 , H01L2924/01082 , H01L2924/014 , H01L2924/10253 , H01L2924/10329 , H01L2924/10336 , H01L2924/12041 , H01L2924/12042 , H01L2924/12043 , H01L2924/14 , H01L2924/18162 , H01L2924/19041 , H01L2924/19043 , H01L2924/30105 , H01L2924/3011 , H01L2924/3511 , H05K1/0274 , H05K1/14 , H01L2924/00 , H01L2224/05611 , H01L2924/00014 , H01L2224/05644 , H01L2224/05664
摘要： An optical apparatus including an optical substrate having an embedded waveguide and an optical device adapted to receive light transmitted from an end of the waveguide. The optical apparatus includes a coupling structure for coupling the optical device to the substrate. The coupling structure has a thin metallic layer with an aperture. At least a portion of the optical device is disposed in the aperture. A method for making an optical apparatus comprising forming an optical substrate having a waveguide embedded therein; depositing a metal layer over an end of the waveguide; and depositing a polymeric layer over the metal layer. An aperture is formed in the metal layer and in the polymeric layer by removing a portion of the metal layer and a portion of the polymeric layer disposed over the end of the waveguide. The method for making an optical apparatus also comprises inserting at least a portion of an optical device within the aperture so that the optical device is positioned to receive light from the first end of the waveguide.
摘要翻译：一种光学装置，包括具有嵌入式波导的光学基板和适于接收从波导的端部传输的光的光学装置。光学装置包括用于将光学装置耦合到基板的耦合结构。耦合结构具有带孔的薄金属层。光学装置的至少一部分设置在孔中。一种制造光学装置的方法，包括：形成具有嵌入其中的波导的光学基板; 在所述波导的一端上沉积金属层; 以及在所述金属层上沉积聚合物层。通过去除金属层的一部分和设置在波导端部上的聚合物层的一部分，在金属层和聚合物层中形成孔。制造光学装置的方法还包括将光学装置的至少一部分插入孔内，使得光学装置被定位成接收来自波导的第一端的光。

4. 发明授权

US07059609B1 Metal gasket with cold formed stopper 有权
标题翻译：带冷成型止动件的金属垫片
公开(公告)号：US07059609B1
公开(公告)日：2006-06-13
申请号：US09592969
申请日：2000-06-13
申请人： Edward James Locke , James Roman Zwick
发明人： Edward James Locke , James Roman Zwick
IPC分类号： F02F11/00
CPC分类号： F16J15/0825 , F16J2015/0843 , Y10T29/49297
摘要： A multilayer metal gasket has a pair of outer active layers separated by an intermediate layer. The outer active layers are formed with at least one pair of aligned apertures and sealing beads surrounding the apertures in radially outwardly spaced relation thereto presenting laterally opposed sealing surfaces of the active layers of predetermined spacing or thickness when the gasket is in a compressed free state. The intermediate layer extends radially inwardly beyond the apertures and is provided with a cold formed stopper portion having a thickness greater than the combined material thicknesses of the intermediate layer and outer active layers but less than the thickness of the sealing beads. The stopper portion is cold formed under a compressive load exceeding the compressive load required to deform the sealing beads beyond their elastic limit, thereby preventing irreversible damage to the sealing beads. The stopper portion presents opposing sealing surfaces which, when the gasket is clamped between two members having a passage to be sealed, serves as a primary seal or fire dam, shielding the sealing beads of the outer active layers from direct exposure to the heat of any fluid in the passage, such as hot exhaust gases of an internal combustion engine.
摘要翻译：多层金属垫片具有由中间层隔开的一对外部活性层。外部有源层形成有至少一对对齐的孔和围绕这些孔径的向外间隔的关系的密封珠，当衬垫处于压缩自由状态时，其具有预定间隔或厚度的有源层的横向相对的密封表面。中间层径向向内延伸超过孔，并且设置有具有大于中间层和外部活性层的组合材料厚度但小于密封珠的厚度的厚度的冷成型止挡部分。止动部分在超过超过其弹性极限使密封珠变形所需的压缩载荷的压缩载荷下冷成型，从而防止密封珠的不可逆损坏。止动部分呈现相对的密封表面，当垫圈被夹紧在具有待密封通道的两个构件之间时，该密封表面用作初级密封或防火堤，屏蔽外部活性层的密封珠直接暴露于任何通道中的流体，例如内燃机的热废气。

5. 发明授权

US06785447B2 Single and multilayer waveguides and fabrication process 失效
标题翻译：单层和多层波导和制造工艺
公开(公告)号：US06785447B2
公开(公告)日：2004-08-31
申请号：US09767582
申请日：2001-01-22
申请人： Tetsuzo Yoshimura , Yasuhito Takahashi , James Roman , Solomon I. Beilin , Wen-chou Vincent Wang , Masaaki Inao
发明人： Tetsuzo Yoshimura , Yasuhito Takahashi , James Roman , Solomon I. Beilin , Wen-chou Vincent Wang , Masaaki Inao
IPC分类号： G02B626
CPC分类号： G02B6/10 , G02B6/06 , G02B6/12002 , G02B6/124 , G02B6/13 , G02B6/132 , G02B6/136 , G02B6/26 , G02B6/42 , G02B6/4214 , G02B6/43 , G02B2006/12104 , G02B2006/12107 , G02B2006/12173 , H01L21/6835 , H01L23/48 , H01L23/5389 , H01L24/24 , H01L24/82 , H01L24/96 , H01L25/167 , H01L2221/68345 , H01L2221/6835 , H01L2221/68359 , H01L2221/68363 , H01L2221/68368 , H01L2224/05568 , H01L2224/05573 , H01L2224/16225 , H01L2224/24226 , H01L2924/01005 , H01L2924/01006 , H01L2924/0101 , H01L2924/01013 , H01L2924/01015 , H01L2924/01018 , H01L2924/01019 , H01L2924/01023 , H01L2924/01024 , H01L2924/01027 , H01L2924/01029 , H01L2924/0103 , H01L2924/01032 , H01L2924/01033 , H01L2924/01039 , H01L2924/01046 , H01L2924/01047 , H01L2924/01049 , H01L2924/01056 , H01L2924/01057 , H01L2924/01058 , H01L2924/01074 , H01L2924/01075 , H01L2924/01076 , H01L2924/01078 , H01L2924/01079 , H01L2924/01082 , H01L2924/014 , H01L2924/10253 , H01L2924/10329 , H01L2924/10336 , H01L2924/12041 , H01L2924/12042 , H01L2924/12043 , H01L2924/14 , H01L2924/18162 , H01L2924/19041 , H01L2924/19043 , H01L2924/30105 , H01L2924/3011 , H01L2924/3511 , H05K1/0274 , H05K1/14 , H01L2924/00 , H01L2224/05611 , H01L2924/00014 , H01L2224/05644 , H01L2224/05664
摘要： An optoreflective structure for reflecting an optical signal following a path defined by an optical waveguide comprising a first cladding layer having a first planar cladding surface; a waveguide disposed on the first cladding layer; and a second cladding layer disposed on the waveguide and having a second planar cladding surface. The first cladding layer, the second cladding layer and the waveguide terminate in a generally dove-tailed structure having a beveled planar surface. An optoreflector is disposed on the beveled planar surface for a changing direction of an optical signal passing through the waveguide. Methods of producing the optoreflective structure are disclosed.
摘要翻译：一种用于反射遵循由光波导限定的路径的光信号的光反射结构，包括具有第一平面包层表面的第一包层; 布置在所述第一包层上的波导; 以及设置在波导上并具有第二平面包层表面的第二包覆层。第一包层，第二包层和波导终止于具有斜面平坦表面的大致鸽尾结构中。光反射器设置在倾斜平面上，用于通过波导的光信号的改变方向。公开了制造光反射结构的方法。

6. 发明授权

US06572780B2 Methods for fabricating flexible circuit structures 失效
公开(公告)号：US06572780B2
公开(公告)日：2003-06-03
申请号：US09872629
申请日：2001-05-31
申请人： Mark Thomas McCormack , James Roman , Lei Zhang , Solomon I. Beilin
发明人： Mark Thomas McCormack , James Roman , Lei Zhang , Solomon I. Beilin
IPC分类号： H01B1300
CPC分类号： B32B37/26 , B32B2457/08 , H01L21/6835 , H01L2221/68318 , H01L2221/68345 , H01L2221/68381 , H05K3/025 , H05K3/205 , Y10S438/957 , Y10S438/968 , Y10S438/976 , Y10T29/49155 , Y10T29/4916 , Y10T156/1082 , Y10T156/1158
摘要： Improved methods and articles used to fabricate flexible circuit structures are disclosed. The methods include depositing a release layer or a dielectric film on a substrate, and then forming a conductive laminate on the release layer or the dielectric film. The conductive laminate may be easily separated by the substrate to eventually form a flexible circuit structure.

7. 发明授权

US06898343B2 Optical switching apparatus and method for fabricating 失效
标题翻译：光开关装置及其制造方法
公开(公告)号：US06898343B2
公开(公告)日：2005-05-24
申请号：US09932526
申请日：2001-08-17
申请人： Alexei Glebov , Michael Peters , Michael Lee , James Roman , David Kudzuma
发明人： Alexei Glebov , Michael Peters , Michael Lee , James Roman , David Kudzuma
IPC分类号： G02B6/12 , G02B6/13 , G02F1/31 , G02F1/313 , G02B6/42
CPC分类号： G02F1/31
摘要： A hybrid integration process for fabrication of an optical cross-connect switching apparatus. The switching element is based on the deflection of light beam in electro-optic materials by applying electric field across electrodes of an appropriate configuration. The integration process includes fabrication of a substrate (e.g. silicon substrate) with 2D imaging optics from polymeric materials (or silica), fabrication of the light deflecting element, and assembly of the deflecting element on the substrate with imaging optics. The fabrication of the light deflecting element includes fabrication of a LN (lithium niobate) block. The LN block assembled in an optical switching apparatus includes a two-dimensional waveguide formed on a surface of the LN block and an electrode on a surface of the LN block.
摘要翻译：一种用于制造光交叉连接开关装置的混合集成方法。开关元件基于通过在适当配置的电极上施加电场而在光电材料中的光束的偏转。整合过程包括使用来自聚合材料（或二氧化硅）的2D成像光学器件制造衬底（例如硅衬底），制造光偏转元件，以及使用成像光学器件将偏转元件组装在衬底上。光偏转元件的制造包括制造LN（铌酸锂）块。组装在光开关装置中的LN块包括形成在LN块表面上的二维波导和LN块表面上的电极。

8. 发明授权

US06669801B2 Device transfer method 有权
公开(公告)号：US06669801B2
公开(公告)日：2003-12-30
申请号：US09853353
申请日：2001-05-09
申请人： Tetsuzo Yoshimura , James Roman , Wen-chou Vincent Wang , Masaaki Inao , Mark Thomas McCormack
发明人： Tetsuzo Yoshimura , James Roman , Wen-chou Vincent Wang , Masaaki Inao , Mark Thomas McCormack
IPC分类号： B32B3100
CPC分类号： H01L24/73 , H01L21/568 , H01L21/6835 , H01L24/24 , H01L24/82 , H01L2221/68359 , H01L2221/68368 , H01L2224/04105 , H01L2224/05568 , H01L2224/05573 , H01L2224/16225 , H01L2224/18 , H01L2224/24137 , H01L2224/82005 , H01L2924/01004 , H01L2924/01005 , H01L2924/01006 , H01L2924/01013 , H01L2924/01015 , H01L2924/01019 , H01L2924/01023 , H01L2924/01029 , H01L2924/0103 , H01L2924/01033 , H01L2924/01039 , H01L2924/01046 , H01L2924/01051 , H01L2924/01066 , H01L2924/01072 , H01L2924/01074 , H01L2924/01075 , H01L2924/01077 , H01L2924/01078 , H01L2924/01079 , H01L2924/01105 , H01L2924/014 , H01L2924/09701 , H01L2924/10329 , H01L2924/12042 , H01L2924/12043 , H01L2924/14 , H01L2924/19041 , H01L2924/19042 , H01L2924/19043 , Y10T156/1089 , H01L2924/00 , H01L2224/05611 , H01L2924/00014 , H01L2224/05644 , H01L2224/05647
摘要： A method for transferring devices to a device substrate is disclosed. In one embodiment, the method includes providing an array of devices on a carrier substrate having a generally horizontal surface, where the array comprises multiple device pluralities. The method includes tilting the device pluralities with respect to the generally horizontal surface of the carrier substrate. Each tilted device plurality is preferably in substantially the same pattern, and each tilted device plurality is placed on device regions on respective device substrates.

9. 发明授权

US06544430B2 Methods for detaching a layer from a substrate 失效
公开(公告)号：US06544430B2
公开(公告)日：2003-04-08
申请号：US09872795
申请日：2001-05-31
申请人： Mark Thomas McCormack , James Roman , Lei Zhang , Solomon I. Beilin
发明人： Mark Thomas McCormack , James Roman , Lei Zhang , Solomon I. Beilin
IPC分类号： C03C2568
CPC分类号： B32B37/26 , B32B2457/08 , H01L21/6835 , H01L2221/68318 , H01L2221/68345 , H01L2221/68381 , H05K3/025 , H05K3/205 , Y10S438/957 , Y10S438/968 , Y10S438/976 , Y10T29/49155 , Y10T29/4916 , Y10T156/1082 , Y10T156/1158
摘要： Improved methods and articles used to fabricate flexible circuit structures are disclosed. The methods include depositing a release layer or a dielectric film on a substrate, and then forming a conductive laminate on the release layer or the dielectric film. The conductive laminate may be easily separated by the substrate to eventually form a flexible circuit structure. Plasma may be used to treat a surface of the release layer or the dielectric film to produce a plasma-treated surface to lower the peel strength of any film or layer bound to the plasma-treated surface.

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