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1. 发明授权

US4732646A Method of forming identically positioned alignment marks on opposite sides of a semiconductor wafer 失效
标题翻译：在半导体晶片的相对侧上形成相同定位的对准标记的方法
公开(公告)号：US4732646A
公开(公告)日：1988-03-22
申请号：US26510
申请日：1987-03-17
申请人： Gerhard Elsner , Johann Greschner , Holger Hinkel
发明人： Gerhard Elsner , Johann Greschner , Holger Hinkel
IPC分类号： H01L21/68 , H01L21/027 , H01L21/306 , H01L21/67 , H01L23/544 , B44C1/22 , C03C15/00 , C03C25/06
CPC分类号： H01L23/544 , H01L2223/54453 , H01L2924/0002 , Y10S438/975
摘要： A method of automatically forming identically positioned alignment marks on the front side and the back side of a silicon wafer especially prepared for use in silicon micromechanical technology. The front side and the back side of the silicon wafer are coated with an insulating layer. High-energy heavy ions are directed onto the front side insulating layer. The heavy ions penetrate the front side insulating layer, the wafer, and the back side insulating layer, thus forming single disturbed crystal lattice nuclear tracks in both insulating layers, with the wafer remaining undisturbed.The nuclear tracks in both insulating layers are etched so that corresponding identically positioned pores are opened. These pores are used as alignment marks for individual further method steps.
摘要翻译：在硅晶片的正面和背面上自动形成相同定位的对准标记的方法，特别是准备用于硅微机械技术。硅晶片的前侧和后侧涂有绝缘层。高能重离子被引导到前侧绝缘层上。重离子穿透前侧绝缘层，晶片和背面绝缘层，从而在两个绝缘层中形成单个受扰的晶格核磁道，晶片保持不受干扰。蚀刻两个绝缘层中的核轨道，使得相应相同定位的孔被打开。这些孔用作单独的其它方法步骤的对准标记。

2. 发明授权

US4583145A Apparatus comprising a lubricant-coated magnetic disc and a magnetic head, and method of making said apparatus 失效
标题翻译：包括润滑剂涂覆的磁盘和磁头的装置以及制造所述装置的方法
公开(公告)号：US4583145A
公开(公告)日：1986-04-15
申请号：US604798
申请日：1984-04-27
申请人： Annelie Monnich , Michael Glatzel , Holger Hinkel , Gerhard Kaus , Georg Kraus , Ulrich Kunzel , Erhard Max
发明人： Annelie Monnich , Michael Glatzel , Holger Hinkel , Gerhard Kaus , Georg Kraus , Ulrich Kunzel , Erhard Max
IPC分类号： G11B5/72 , C09D5/23 , C09D163/00 , C10M107/38 , C10N40/18 , G11B5/40 , G11B5/725 , G11B5/82
CPC分类号： G11B5/725 , G11B5/40 , Y10S428/90 , Y10T428/257 , Y10T428/31515 , Y10T428/31544 , Y10T428/31663
摘要： The magnetic disc comprises a magnetizable layer (1) to which an adhesion promoting layer (4) and thereto a lubricant film (5) are applied. Onto the substrate of the magnetic head (2) an adhesion reducing layer (9) is deposited. The apparatus can also show only one adhesion-influencing layer. The layers (4) and (9) are formed by the reaction of a sililating agent with reactive groups on the surface of the magnetizable layer (1), or of the substrate of the magnetic head (2), respectively. The sililating agents used differ in their terminal groups of which one category produce van der Waals bonds to the lubricant molecules, and the other is chemically indifferent relative to the lubricant molecules.The two layers (4) and (9) are made e.g. by the spin-coating of a solution of the sililating agent, and subsequent drying.The apparatus ensures a homogeneous coating of the magnetizable layer (1) with lubricant, and it prevents the pick-up of lubricant by the substrate of the magnetic head (2).
摘要翻译：磁盘包括可施加粘附促进层（4）和润滑剂膜（5）的可磁化层（1）。在磁头（2）的基板上沉积粘附降低层（9）。该装置还可以仅显示一个粘附影响层。层（4）和（9）分别通过硅化剂与可磁化层（1）的表面上的反应性基团或磁头（2）的基底的反应形成。所用的硅烷化剂在其末端基团中不同，其中一类与润滑剂分子产生范德华力键，而另一种类型相对于润滑剂分子化学无差异。两层（4）和（9）制成例如。通过旋涂硅胶剂的溶液，随后干燥。该装置确保可润滑层（1）的均匀涂层具有润滑剂，并且其防止由磁头（2）的基底拾取润滑剂。

3. 发明授权

US4415942A Magnetic disk substrate of fiber-reinforced plastic 失效
标题翻译：纤维增强塑料磁盘基片
公开(公告)号：US4415942A
公开(公告)日：1983-11-15
申请号：US287674
申请日：1981-07-28
申请人： Albert Frosch , Holger Hinkel , Georg Kraus
发明人： Albert Frosch , Holger Hinkel , Georg Kraus
IPC分类号： B32B5/28 , B32B5/22 , B32B33/00 , G11B5/62 , G11B5/73 , G11B5/733 , G11B5/82
CPC分类号： G11B5/62 , G11B5/7305 , G11B5/82
摘要： The substrate 1 for magnetic disks takes the form of a laminate made up of a plurality of individual thin, fiber-reinforced, anisotropic and unidirectional lamellae. These lamellae are arranged staggered on top of each other at few angular spacings, i.e., at great angles of up to 60.degree., and are finally pressed together. The outer layers and lamellae, respectively, may be reinforced by stronger fibers or other material, such as carbon fibers outside and glass fibers inside, to influence the flexural modulus and the shearing modulus independently of each other. This makes for a substrate which consists of anisotropic material, whose characteristics are essentially isotropic, which is lighter than previously used substrates, and which has a higher critical number of revolutions.
摘要翻译：用于磁盘的基板1采用由多个单独的薄的纤维增强的各向异性和单向薄片组成的叠层的形式。这些薄片以几个角度间隔（即，高达60°的大角度）以彼此顶部交错布置，并最终压在一起。外层和薄片分别可以由更强的纤维或其他材料（例如碳纤维外部）和玻璃纤维内部增强，以相互独立地影响弯曲模量和剪切模量。这使得由各向异性材料组成的衬底，其特性基本上是各向同性的，其比以前使用的衬底更轻，并且具有更高的临界转数。

4. 发明授权

US4288716A Ion source having improved cathode 失效
标题翻译：离子源具有改进的阴极
公开(公告)号：US4288716A
公开(公告)日：1981-09-08
申请号：US99369
申请日：1979-12-03
申请人： Holger Hinkel , Georg Kraus
发明人： Holger Hinkel , Georg Kraus
IPC分类号： H01J27/14 , H01J37/08 , H01L21/265 , H01J27/00
CPC分类号： H01J27/14 , H01J37/08
摘要： A direct heated rod-shaped cathode for an ion source is provided with a region of reduced cross-section adjacent its negative end to maximize the path length of electron movement within the discharge chamber and to provide effective control of the cathode resistance in a region that is relatively free of sputtering erosion during use.
摘要翻译：用于离子源的直接加热的棒状阴极设置有邻近其负端的横截面减小的区域，以使放电室内的电子运动的路径长度最大化，并提供对阴极电阻的有效控制，在使用过程中相对没有溅射侵蚀。

5. 发明授权

US4624048A Method of making magnetic head sliders 失效
标题翻译：制造磁头滑块的方法
公开(公告)号：US4624048A
公开(公告)日：1986-11-25
申请号：US638314
申请日：1984-08-06
申请人： Holger Hinkel , Gerhard Kaus , Ulrich Kuenzel , Gerhard Schmid
发明人： Holger Hinkel , Gerhard Kaus , Ulrich Kuenzel , Gerhard Schmid
IPC分类号： G11B5/10 , G11B5/187 , G11B5/31 , G11B5/60 , G11B21/21 , G11B5/42
CPC分类号： G11B5/1871 , G11B5/102 , G11B5/3103 , G11B5/3163 , G11B5/6005 , Y10T29/49041 , Y10T29/49044
摘要： For making rails in workpieces for magnetic head sliders for sensors of magnetizable media, anodic oxidation of highly pure aluminum substrates is applied. For that purpose, the respective surface of the substrates is covered with a mask cover which leaves uncovered the zones in the substrate surface area which are intended for the forming of rails. By means of anodic oxidation of the aluminum in the exposed regions, rail layer regions of oxide are formed which after the removal of the mask cover can themselves be used as an etching mask in order to provide a recessed region between two respective rails by means of chemical wet etching.
摘要翻译：为了在可磁化介质传感器的磁头滑块的工件上制作导轨，应用高纯度铝基板的阳极氧化。为此目的，衬底的相应表面被掩模盖覆盖，掩模盖未覆盖用于形成轨道的基板表面区域中的区域。通过暴露区域中的铝的阳极氧化，形成氧化物的轨道层区域，在去除掩模罩本身之后，可以将其自身用作蚀刻掩模，以便在两个相应的轨道之间通过化学湿法蚀刻。

6. 发明授权

US4598017A Composite magnetic disk with Si and SiC substrate 失效
标题翻译：具有Si和SiC衬底的复合磁盘
公开(公告)号：US4598017A
公开(公告)日：1986-07-01
申请号：US612768
申请日：1984-05-22
申请人： Thomas Bayer , Holger Hinkel , Kurt Kleischmann , Ulrich Kuenzel , Rolf Schafer
发明人： Thomas Bayer , Holger Hinkel , Kurt Kleischmann , Ulrich Kuenzel , Rolf Schafer
IPC分类号： G11B5/70 , G11B5/66 , G11B5/73 , G11B5/733 , G11B5/82 , G11B5/64
CPC分类号： G11B5/82 , G11B5/7315 , Y10S428/90 , Y10T428/265 , Y10T428/2918 , Y10T428/30 , Y10T428/31511 , Y10T428/31522 , Y10T428/31529 , Y10T428/31533
摘要： The invention relates to a composite magnetic disk for magnetic recording, which consists of an annular core of polymeric material to which is bonded at least one disk of reaction-bonded silicon carbide with a magnetic recording layer on its outer surface. After its processing, the SiSiC disk surface shows optimum planarity and smoothness so that it can be used as a magnetic disk substrate. Furthermore, the material has a low density and an extremely high specific modulus of elasticity so that numbers of revolution higher than obtainable with formerly known AlMg5 disk substrates can be reached.
摘要翻译：本发明涉及一种用于磁记录的复合磁盘，其由聚合物材料的环形芯组成，其中至少一个反应粘合的碳化硅盘与其外表面上的磁记录层结合。在其处理之后，SiSiC盘表面显示最佳平面度和平滑度，从而可以用作磁盘基片。此外，该材料具有低密度和非常高的比弹性模量，使得可以达到比先前已知的AlMg5盘基底可获得的转数高。

7. 发明授权

US4549238A Magnetic head slider of ceramic material 失效
标题翻译：陶瓷材料磁头滑块
公开(公告)号：US4549238A
公开(公告)日：1985-10-22
申请号：US456641
申请日：1983-01-10
申请人： Friedrich Ertingshausen , Volker Heinrich , Holger Hinkel , Gerhard Kaus , Jurgen Kempf , Hans-Georg Nauth , Manfred Schrader
发明人： Friedrich Ertingshausen , Volker Heinrich , Holger Hinkel , Gerhard Kaus , Jurgen Kempf , Hans-Georg Nauth , Manfred Schrader
IPC分类号： G11B21/21 , G11B5/10 , G11B5/255 , G11B5/60 , G11B23/50 , G11B17/32
CPC分类号： G11B5/255 , G11B23/507 , G11B5/10 , G11B5/6005
摘要： A magnetic head slider consisting of a mixed ceramic made of aluminum oxide/titanium carbide has on its sliding side adjacent a magnetic record carrier a thin layer from which the titanium carbide component has been removed. The titanium carbide component preferably is removed by preferential reactive ion etching in a CF.sub.4 plasma. The magnetic head slider with its sliding surface thus modified exhibits greatly improved sliding properties compared with sliders of the same material having a non-modified sliding surface.
摘要翻译：由氧化铝/碳化钛组成的混合陶瓷组成的磁头滑块在其滑动面上邻近磁记录载体，已经从其中除去碳化钛组分的薄层。碳化钛组分优选通过CF4等离子体中的优先反应离子蚀刻除去。与具有非改性滑动表面的相同材料的滑块相比，其具有如此改进的滑动表面的磁头滑块显示出大大改善的滑动性能。

8. 发明授权

US4461237A Plasma reactor for etching and coating substrates 失效
标题翻译：用于蚀刻和涂覆基板的等离子体反应器
公开(公告)号：US4461237A
公开(公告)日：1984-07-24
申请号：US476290
申请日：1983-03-17
申请人： Holger Hinkel , Gerhard Kaus , Georg Kraus , Ulrich Kunzel , Reinhold Muehl
发明人： Holger Hinkel , Gerhard Kaus , Georg Kraus , Ulrich Kunzel , Reinhold Muehl
IPC分类号： H01L21/302 , C23C4/00 , C23C16/50 , C23C16/509 , C23F4/00 , H01J37/32 , H01L21/3065 , H01L21/31 , C23C13/08
CPC分类号： H01J37/32623 , C23C16/5096 , C23F4/00 , H01J37/32541
摘要： A plasma reactor comprises a reaction chamber having two plate-shaped electrodes arranged parallel to and above each other, whereby the substrates are supported on the lower electrode and this electrode is additionally provided with a center opening (5) through which gas is fed into the electrode space or which is evacuated from it, and where (a) the upper electrode is connected to a high frequency AC or RF voltage and (b) which has no electrode material in the regions opposite the substrates and (c) where their position and shape are determined by the substrates on the lower electrode, causing the electric field in the electrode space to be selectively weakened at at least above the substrates.
摘要翻译：等离子体反应器包括具有平行于彼此并且彼此高度排列的两个板状电极的反应室，由此将基板支撑在下部电极上，并且该电极另外设置有中心开口（5），气体通过该中心开口供给到电极空间或者从其中排出，并且其中（a）上电极连接到高频AC或RF电压，和（b）在与衬底相对的区域中不具有电极材料，以及（c）其位置和形状由下电极上的衬底决定，使电极空间中的电场至少在衬底上方被选择性地弱化。

9. 发明授权

US4386968A Method of making semiconductor device structures by means of ion implantation under a partial pressure of oxygen 失效
标题翻译：通过离子注入在氧分压下制造半导体器件结构的方法
公开(公告)号：US4386968A
公开(公告)日：1983-06-07
申请号：US274986
申请日：1981-06-18
申请人： Holger Hinkel , Jurgen Kempf , Georg Kraus , Gerhard E. Schmid
发明人： Holger Hinkel , Jurgen Kempf , Georg Kraus , Gerhard E. Schmid
IPC分类号： H01L21/266 , H01L21/265 , H01L21/316 , H01L21/263
CPC分类号： H01L21/02238 , H01L21/02255 , H01L21/26513 , H01L21/2652 , H01L21/31662
摘要： Disclosed is a simplified method of producing semiconductor device structures in an integrated technology using at least one ion implantation step. Implantation of the doping ions into a silicon wafer, for example, for producing a subcollector or an emitter, is not effected, as previously, in an ultra-high vacuum atmosphere through a thin protective layer of silicon dioxide which is applied by a separate thermal oxidation step prior to implantation, but the doping ions are directly implanted into the bare silicon wafer. The latter implantation is effected in an atmosphere of increased partial pressure of oxygen. Enhanced diffusion of the oxygen adsorbed at the surface occurs into the vacancies which are generated by the implanted doping ions close the surface of the silicon wafer. In this manner a silicon dioxide protective layer is formed already in the initial stage of ion implantation. As a result one process step can be saved, namely, the production of the protective layer by thermal oxidation prior to ion implantation.
摘要翻译：公开了使用至少一个离子注入步骤以集成技术制造半导体器件结构的简化方法。将掺杂离子注入到例如用于制造子集电极或发射极的硅晶片中，如前所述，在超高真空气氛中通过二氧化硅的薄保护层进行注入，所述薄保护层通过单独的热在植入之前的氧化步骤，但掺杂离子被直接注入裸硅晶片。后者的注入在氧分压增加的气氛中进行。在表面处吸附的氧的增强的扩散发生在由注入的掺杂离子产生的空位中，这些离子靠近硅晶片的表面。以这种方式，在离子注入的初始阶段已形成二氧化硅保护层。因此，可以节省一个工艺步骤，即在离子注入之前通过热氧化生产保护层。

10. 发明授权

US4105924A Apparatus for making a rastered photoconductive layer 失效
标题翻译：用于制作光栅导电层的装置
公开(公告)号：US4105924A
公开(公告)日：1978-08-08
申请号：US741083
申请日：1976-11-11
申请人： Holger Hinkel
发明人： Holger Hinkel
IPC分类号： C23C14/48 , G03G5/00 , G03G5/082 , H01L31/08 , H01J37/00
CPC分类号： G03G5/08207 , C23C14/48
摘要： A method and apparatus for making a rastered photoconductive layer for electrophotography in order to achieve an improved representation of black areas. The raster is produced by means of ion implantation of substances altering the dark discharge speed.
摘要翻译：为了实现黑色区域的改进的表示，制造用于电子照相的带状光电导层的方法和装置。光栅通过离子注入来改变暗放电速度的物质产生。

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