会员体验
专利管家(专利管理)
工作空间(专利管理)
风险监控(情报监控)
数据分析(专利分析)
侵权分析(诉讼无效)
联系我们
交流群
官方交流:
QQ群: 891211   
微信请扫码    >>>
现在联系顾问~
热词
    • 7. 发明授权
    • Vacuum treating method and apparatus
    • 真空处理方法及装置
    • US4733746A
    • 1988-03-29
    • US874934
    • 1986-06-16
    • Hiroyoshi NozakiHiroo EbisawaHirofumi Hara
    • Hiroyoshi NozakiHiroo EbisawaHirofumi Hara
    • H01J37/18B05C11/00B01J19/08B01J19/12C23C14/00
    • H01J37/185
    • A vacuum treating method and apparatus wherein preliminary vacuum chambers which are charged with and discharged therefrom materials to be treated are arranged on both sides of a vacuum treating chamber such that the preliminary vacuum chambers are switchingly communicated with and disconnected from the vacuum treating chamber; the materials are alternately moved between both the preliminary vacuum chambers and the vacuum treating chamber and are subject to vacuum treatment for a predetermined period of time in the vacuum treatment for a predetermined period of time in the vacuum treating chamber; wherein when a material to be treated has been charged from one preliminary vacuum chamber to the vacuum treating chamber and a treated materiala has been discharged from the vacuum treating chamber to the other preliminary chamber, the vacuum treating chamber and both the preliminary vacuum chambers are disconnected from each other, then the pressure within the vacuum treating chamber is reduced to a required degree of vacuum and the pressure with the one preliminary vacuum chamber is reduced to a degree of vacuum higher than that required for vacuum treatment, and in the other preliminary vacuum chamber, after a treated material has been discharged out and a new material to be treated has been charged, the pressure reduction is initiated from an atmospheric state; and wherein after vacuum treatment has been made in the vacuum treating chamber, the vacuum treating chamber and both the preliminary vacuum chambers are brought into communication with each other to move the materials therebetween.
    • 一种真空处理方法和装置,其特征在于,在真空处理室的两侧设置有预处理真空室,其中装有待处理材料和从其排出的真空室,使得所述预真空室与所述真空处理室切换地连通和断开; 这些材料在预真空室和真空处理室之间交替移动,并且在真空处理室中在真空处理中经过预定时间在预定时间内进行真空处理; 其中当待处理材料从一个预真空室装入真空处理室中时,处理过的材料a已从真空处理室排出到另一预备室时,真空处理室和两个初级真空室被断开 然后将真空处理室内的压力降低到所要求的真空度,并且将一个预真空室的压力降低到比真空处理所需的真空度更高的真空度,而在其它初步真空中 在经过处理的材料被排出并且待处理的新材料已经被充电之后,从大气状态开始减压; 并且其中在真空处理室中进行了真空处理之后,使真空处理室和两个初级真空室彼此连通以在其间移动材料。